A system for providing active real-time characterization of an article under test is disclosed. An infrared light source, a first visible light source and a second visible light source each outputs and directs a beam of coherent light at a particular area on the article under test. A visible light camera and a visible light second harmonic generation camera, an infrared camera and an infrared second harmonic generation camera, a sum frequency camera and a third order camera are each configured to receive a respective predetermined return beam of light from the particular area on the article under test. A processor receives signals from the cameras and calculates in real time respective spectroscopic signals and compares each calculated signal with each other calculated signal and with a predetermined baseline signal to ensure that the article under test conforms to an expected value.

An example system for detecting pipe defects is provided. The system includes a transmitter, a receiver and a processing device. The transmitter is oriented to transmit Terahertz (THz) waveform pulses towards at least one of an outer surface of a pipe or an inner surface of the pipe. The receiver is oriented to receive reflected Terahertz (THz) waveform pulses from at least one of the outer surface of the pipe or the inner surface of the pipe. The processing device configured is to receive as input the Terahertz (THz) waveform pulses transmitted from the transmitter and the reflected Terahertz (THz) waveform pulses received by the receiver and, based on the received input, determine if a defect in the pipe exists.

Disclosed is an illumination source for generating measurement radiation for an inspection apparatus. The source generates at least first measurement radiation and second measurement radiation such that the first measurement radiation and the second measurement radiation interfere to form combined measurement radiation modulated with a beat component. The illumination source may be a HHG source. Also disclosed is an inspection apparatus comprising such a source and an associated inspection method.

A workpiece inspection device 1 includes a table (3), image capturing unit fixing part (7), first light projection unit (4), second light projection unit (5), linear movement mechanism (8), turning mechanism (9), quality determination unit (10), and control unit (11). The control unit (11) performs first image capturing step of causing first light projection unit (4) to project light and causing image capturing unit (6) to capture image, detailed inspection portion-determination step of setting, portion of workpiece (2) determined to require detailed inspection based on image captured in the first image capturing step, second image capturing step of causing second light projection unit (5) to project light onto the workpiece (2) and causing image capturing unit (6) to capture image of the detailed inspection-requiring portion, and quality determination step of determining quality of the detailed inspection-requiring portion based on image captured in the second image capturing step.

A system for imaging and analyzing a vehicle may include a frame having a central passage, wherein the central passage is configured and dimensioned to allow a vehicle to pass through. The frame may include, for example, a pair of substantially vertical legs connected at the top by a cross member, wherein the legs and cross member define the central passage. One or more bollards may be positioned in front of and/or behind the frame. A plurality of cameras within the each leg, cross member, and/or bollard may be directed toward the passage to record video images of a passing vehicle. Integrated LED array panels may provide bands of light to aid in detection of surface anomalies, for example by simultaneous analysis of symmetrical sides of the vehicle.

An apparatus for testing an edge portion of a substrate, includes a first illumination source configured to irradiate light to an end portion of the edge portion of the substrate; a second illumination source configured to irradiate light to a lower portion of the edge portion; a third illumination source configured to irradiate light to an upper portion of the edge portion; and first to third photographing portions, respectively corresponding to the first to third illumination sources, wherein the first illumination source comprises a C-shaped cross-section and comprises a first curved surface facing the end portion of the edge portion, the second illumination source comprises a half C-shaped cross-section and comprises a second curved surface facing the lower portion of the edge portion, and the third illumination source comprises a half C-shaped cross-section and comprises a third curved surface facing the upper portion of the edge portion.

A method for illumination of an object to be observed to be observed and the background, the method comprising the steps of: obtaining a relationship between wavelength and spectral radiance of the object while the object and the background are illuminated by a first light source that emits light that has a continuous spectrum in the wavelength range from 380 nanometers and 780 nanometers, and determining a value of representative wavelength that corresponds to a maximum value of the spectral radiance of the object plotted against wavelength or values of representative wavelength that correspond to maximum values of the spectral radiance of the object plotted against wavelength; determining a value or values of comparative wavelength; and illuminating the object and the background with light of the value or values of representative wavelength and light of the value or values of comparative wavelength.

The invention relates to a method in the preparation of samples for microscopic examination onto which a coverslip is applied. The method is notable for the fact that the coverslipping quality is checked automatically and at least partly optically. The invention further relates to an apparatus for carrying out the method, and to an apparatus for checking the coverslipping quality of samples onto which a coverslip is applied.

An image inspection device and a lighting device capable of setting an irradiation solid angle for each location of a visual field and capable of miniaturization are provided. The image inspection device includes a photographing portion that photographs the target, and a light transmissible lighting portion that is disposed between the target and the photographing portion and configured to irradiate light in a direction toward the target. The lighting portion includes a plurality of light-emitting portions that is arranged in a matrix form and configured to be capable of selectively emitting light, and an optical system configured to control irradiation directions of the light emitted from each of the plurality of light-emitting portions to be directions corresponding to positions of each of the plurality of light-emitting portions.

In accordance with some embodiments of the present disclosure, an inspection method of a photomask includes performing a first inspection process, unloading the photomask from the inspection system, and performing a second inspection process. In the first inspection process, a common Z calibration map of an objective lens of an optical module with respect to the photomask is generated and stored, and a first image of the photomask is captured by using an image sensor while focusing the objective lens of the optical module based on the common Z calibration map. The photomask is unloaded from the inspection system. In the second inspection process, the photomask is loaded on the inspection system and a second image of the photomask is captured by using an image sensor while focusing an objective lens of an optical module based on the common Z calibration map generated in the first inspection process.