Patent classifications
G01N21/8806
Metrology system configured to measure apertures of workpieces
A metrology system includes front and back vision components portions. The front vision components portion includes a light source, camera, variable focal length (VFL) lens, and objective lens defining an optical axis. The back vision components portion may include a reflective surface and a polarization altering component. A workpiece with apertures is located between the front and back vision components portions. For each aperture of the workpiece, the system adjusts a relative position between the front vision components portion and the workpiece to align its optical axis with each aperture such that light from the light source passes through the aperture and is reflected by the reflective surface of the back vision components portion. The system uses the VFL lens and camera to acquire an image stack including images of the aperture, and analyzes the image stack to determine a measurement related to a workpiece feature of the aperture.
Apparatus and Method for Determining a Material Property of a Test Specimen in a Test Specimen Region Near the Surface
The invention relates to an apparatus (1; 1a; 1b; 1c) and a method for determining a material property of a test specimen (5; 5a; 5b; 5c) in a test specimen region (6; 6a; 6b; 6c) near the surface, said apparatus comprising at least one electromagnetic radiation source (2; 2a; 2b; 2c) for irradiating at least one surface region (4; 4a; 4b; 4c) of the test specimen, and a detection device (8; 8a; 8b; 8c) for detecting thermal radiation (9; 9a; 9b) emitted by the surface region and/or for detecting radiation (31) reflected from the surface region (4; 4a; 4b; 4c) of the test specimen. An evaluation device (13; 13a; 13b; 13c) for ascertaining the material property to be determined on the basis of the emitted thermal radiation (9: 9a: 9b) and/or the reflected radiation (31) is expediently provided. Advantageously, it is possible for the material property to be determined particularly reliably and nondestructively.
AUTOMATED CABLE PREPARATION WITH MODULAR SYSTEM
Techniques, systems, and articles are described for preparing electrical cables for connections to a power grid. In one example, a system includes a handheld cable preparation device configured to cut one or more layers of an electrical cable and a computing device configured to control the cable preparation device to cut the one or more layers of the electrical cable.
Container Visual Inspection Assembly and Method
Assemblies (10), devices, and methods are described herein that allow an examiner to inspect a container (12) of liquid product (14) through a bottom wall (18) of the container using a line-of-sight diversion member (28, e.g. beam splitter, mirror or prism). In some forms, the assemblies described herein can be provided with mounts and connecting arms to couple the devices to inspection booths.
METHOD FOR EVALUATING ORIENTATION OF NANOWIRE IN TRANSPARENT MATERIAL, METHOD FOR MANAGING STEPS IN WHICH SAID METHOD IS USED, AND METHOD FOR PRODUCING RESIN CURED ARTICLE
An evaluation method includes a step of disposing a sensitive color plate between two polarization plates disposed in a crossed Nicols shape, a step of disposing a measurement material that is a transparent material containing a nanowire between any of one polarization plate or the other polarization plate of the polarization plates and the sensitive color plate, a step of making white light incident from a side of one of the disposed polarization plates, a step of observing a color of the measurement material from a side of the other polarization plate, and a step of evaluating an orientation direction of the nanowire from the color of the measurement material obtained by observation.
FOREIGN OBJECT DEBRIS DISCRIMINATION WITH MODULATED LASER LIGHT
A method of foreign object debris discrimination includes illuminating a particle located within a sensing volume with a modulated electromagnetic radiation pulse emitted from a source; receiving one or more electromagnetic radiation return signals that have been scattered by the particle illuminated by the modulated electromagnetic radiation pulse at a detector; mixing, using a controller, the electromagnetic radiation return signal of amplitude I.sub.RS and frequency f.sub.RS with a reference signal of amplitude I.sub.LS and frequency f.sub.RS; analyzing, using the controller, an amplitude of the mixed signal √{square root over (I.sub.LSI.sub.RS)}, and frequency of the mixed signal, f.sub.RS−f.sub.LS; and classifying, using the controller, a particle position, a velocity, and electromagnetic characteristic of the particle based on the amplitude, √{square root over (I.sub.LSI.sub.RS)}, and frequency, f.sub.RS−f.sub.LS of the mixed signal.
APPARATUS FOR INSPECTING SUBSTRATE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME
A method for fabricating a semiconductor device is provided. The method includes: loading a substrate on a stage of an apparatus for inspecting the substrate; extracting a first light having a first wavelength from a light by using a light source; acquiring first position information on at least one focal point, formed on the substrate, based on the first wavelength by using a controller, the at least one focal point being a pre-calculated at least one focal point; adjusting a position of at least one from among an objective lens and at least one microsphere in a vertical direction by using the first position information in the controller; condensing the first light, which has passed through the at least one microsphere, on the at least one focal point formed on the substrate; and inspecting the substrate by using the first light condensed on the at least one focal point.
Method Of And Optical System For Illuminating A Sample Surface
Various embodiments may provide a method of illuminating a sample surface. The method may include arranging an illumination subsystem, the illumination subsystem including an optical source and at least one lens, having an optic axis at an incident angle greater than 0° and less than 90° to a normal of the sample surface such that a reference illumination distribution is directly generated on the sample surface based on optical light emitted by the illumination subsystem. The method may also include arranging an adjustment optical subsystem such that an adjusted illumination distribution which is more symmetrical compared to the reference illumination distribution is generated on the sample surface based on optical light emitted by the illumination subsystem.
FREEFORM SURFACE METROLOGY AND DEFLECTOMETRY
Methods, devices and systems describe compact and simple deflectometry configurations that can measure complex shapes of freeform surfaces. One deflectometry system includes a first panel and a second panel positioned at an offset position from each other to provide illumination for an object. The second panel, positioned closer to the object, is operable as a substantially transparent panel, and as a pixelated panel to provide structured light patterns. The system also includes two or more cameras positioned on the second panel an is operable in a first mode where the first panel provides a first structured illumination and the second panel is configured as a substantially transparent panel that allows the first structured illumination from the first panel to transmit toward the object. The system is also operable in a second mode where the second panel is configured to provide a second structured illumination for illuminating the object.
INSPECTION OF DRINKING STRAW
Method and arrangements for inspection of a drinking straw (101; 201) involving use of the drinking straw (101; 201) as a light guide for inspection of a sidewall (102; 202) of the drinking straw (101; 201) based on light leakage of guided light out from the drinking straw (101; 201) via the sidewall (102), such a through a damage (204) in the sidewall (102). It is illuminated (601), by means of one or more light sources (123), a first portion (131) of the drinking straw (101; 201) so that at least some of the light (127) on the first portion (131) is transmitted through a sidewall (102; 202) of the drinking straw (101; 201) into the drinking straw (101), and is guided therein. It is provided (602) one or more digital images (241) imaging another, second, portion (133; 233) of the drinking straw (101; 201) during said illumination. A light pattern captured by said one or more digital images (241) is analysed (603), corresponding to light escape of the internally reflected light out from the second portion (133) of the drinking straw (101; 201) via a sidewall (102; 202) of the drinking straw (101; 201). The damage (204) may be detected as a local spot (243) of image data discrepancy.