A computer-implemented method comprising: receiving data comprising two-dimensional data and three-dimensional data of a component of an engine; identifying a feature of the component using the two-dimensional data; determining coordinates of the feature in the two-dimensional data; determining coordinates of the feature in the three-dimensional data using: the determined coordinates of the feature in the two-dimensional data; and a pre-determined transformation between coordinates in two-dimensional data and coordinates in three-dimensional data; and measuring a parameter of the feature of the component using the determined coordinates of the feature in the three-dimensional data.

In a side view, when an angle θ1 formed between the light axis of light incident on a surface of a silicon wafer and the surface (or an imaginary plane corresponding to the surface) is 67° to 78° and an angle formed between the surface of the silicon wafer (or an imaginary plane corresponding to the surface) and the detection optical axis of a photodetector is θ2, θ1−θ2 is −6° to −1° or 1° to 6°.

An inspecting apparatus includes a table for supporting a workpiece thereon, a light applying unit for applying light to the workpiece supported on the table, and a light detector for detecting light reflected from the workpiece. The light detector includes a camera and a diffusion plate disposed between the table and the camera.

In a processing apparatus, a vibration detecting unit includes a light source, an interference unit configured to apply light emitted from the light source to a measurement target member and generate an interference pattern image. A control unit includes a storage section configured to store a first interference pattern image captured at a predetermined timing by the imaging unit and a second interference pattern image captured at a timing different from the timing of the first interference pattern image by the imaging unit, a comparing section configured to compare the first interference pattern image and the second interference pattern image stored in the storage section with each other, and a vibration detecting section configured to detect vibration on the basis of the first interference pattern image and the second interference pattern image compared with each other by the comparing section.

Measurement cavities described herein include a cylindrical chamber having a first open end and a second open end; a first cap covering the first open end of the cylindrical chamber and a second cap covering the second open end of the cylindrical chamber, wherein the first and second caps hermetically seal the cylindrical chamber and wherein the first cap is rigidly coupled to the second cap; and a wafer holder positioned within and coupled to the cylindrical chamber. The measurement cavity has a mass m, a stiffness k, and a damping constant c configured such that the transmissibility $.Math.\frac{x}{F}.Math.$
of an input force at 60 Hz in the measurement cavity is reduced by a factor of at least 10 and the measurement cavity has a natural frequency of greater than 300 Hz.

Methods of autonomous diagnostic verification and detection of defects in the optical components of a vision-based inspection system are provided. The method includes illuminating a light panel with a first light intensity pattern, capturing a first image of the first light intensity pattern with a sensor, illuminating the light panel with a second light intensity pattern different than the first light intensity pattern, capturing a second image of the second light intensity pattern with the sensor, comparing the first image and the second image to generate a comparison of images, and identifying defects in the light panel or the sensor based upon the comparison of images. Systems adapted to carry out the methods are provided as are other aspects.

A reticle inspection system may include two or more inspection tools to generate two or more sets of inspection images for characterizing a reticle, where the two or more inspection tools include at least one reticle inspection tool providing inspection images of the reticle. The reticle inspection system may further include a controller to correlate data from the two or more sets of inspection images to positions on the reticle, detect one or more defects of interest on the reticle with the correlated data as inputs to a multi-input defect detection model, and output defect data associated with the defects of interest.

A method for detecting deposited particles (P) on a surface (11) of an object (3, 14) includes: irradiating a partial region of the surface (11) of the object (3, 14) with measurement radiation; detecting measurement radiation scattered on the irradiated partial region, and detecting particles in the partial region of the surface of the object (3, 14) based on the detected measurement radiation. In the steps of irradiating and detecting, the surface (11) of the object (3, 14) has an anti-reflective coating (13) and/or a surface structure (15) for reducing the reflectivity of the surface (11) for the measurement radiation (9), wherein the particle detection limit is lowered due to the anti-reflective coating (13) and/or the surface structure (15). Also disclosed are a wafer (3) and a mask blank for carrying out the method.

An apparatus for optical inspection of sanitaryware includes: a supporting device configured to receive a piece of sanitaryware to be inspected; at least one camera, configured to capture a plurality of images of the piece of sanitaryware under inspection; an automatic arm, movable between a plurality of operating positions relative to the supporting device, wherein the at least one camera is mounted on the automatic arm; a control unit, configured to receive the plurality of images, wherein the control unit is configured to process the plurality of images as a function of reference data to provide diagnostic information regarding the defectiveness of the piece of sanitaryware.

A method for generating a highly distinctive signature of a certain diamond, the method may include generating, based on one or more images of the certain diamond, a certain diamond signature of the certain diamond; finding, out of a group of reference diamonds, other diamonds having other diamond signatures; wherein the finding comprises calculating similarities between the certain diamond signature and reference diamond signatures of the reference diamonds of the group; and generating a new certain diamond signature that significantly differs from signatures of the other diamonds.