An x-ray tomography system which can generate a qualitative 3D image of a region of interest using a an x-ray source, the x-ray source configured to emit x-ray radiation at the region of interest. The x-ray radiation or the x-ray source or the relative position of the x ray source configured to be moved in a two dimensional plane. An x-ray detector including a plurality of detector elements arranged in a two dimensional plane opposite the x-ray source, the x-ray detector configured to detect x-ray radiation after attenuation by the subject and provide an indication of the detected x-rays. And a processor configured to receive the indication of the detected x-rays and resolve the detected x-ray radiation into a three dimensional image. The three dimensional image is qualitative in nature.

In an inspection device having a storage unit and an exposure dose calculation unit, the exposure dose calculation unit executes a first step for calculating the dose when an image is acquired by irradiating radiation from a radiation generator based on the reference dose stored in the storage unit, a second step for calculating the dose when the relative position between the radiation generator and an inspection object is changed, a third step for calculating the total value of the dose irradiated to the inspection object, and a fourth step for outputting the total value.

A system is disclosed for the examination and inspection of integrated devices such as integrated circuits using 3-D laminography. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. In some embodiments, the incidence angle of the x-rays is varied to gather multiple images that allow internal three-dimensional structures of the integrated device to be determined using computed laminography. In some embodiments, the recorded images are compared with reference data to enable inspection for manufacturing quality control.

A system is disclosed for the examination and inspection of integrated devices such as integrated circuits using 3-D laminography. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. In some embodiments, the incidence angle of the x-rays is varied to gather multiple images that allow internal three-dimensional structures of the integrated device to be determined using computed laminography. In some embodiments, the recorded images are compared with reference data to enable inspection for manufacturing quality control.

The invention relates to a method for verifying the positioning of a fibrous preform in a blade, the blade having been obtained by injecting a resin into a mould having the shape of a blade and in which a preform has been placed, the blade extending in an orthonormal blade frame of reference X, Y, Z, the blade comprising a blade root extending longitudinally along an axis X, a vane extending from the blade root along an axis Z, the blade having a thickness defined along an axis Y, the preform comprising glass tracers positioned at the surface of the preform, the centre of the tracers defining a neutral axis located at a height along the axis Z in the direction defined by the axis X, the method comprising the following steps: the acquisition (E31) of tomographic 2D projections of the blade using an imaging system comprising an X-ray source, each projection being acquired at a given orientation of the X-ray source with respect to the blade; the combining (E32, E32a, E32b) of the 2D projections in the direction of the axis Y so as to obtain a cumulative 2D image in the directions X and Z; the determining (E33), for each pixel column defined in the direction of the axis Z, of a greyscale profile; the processing (E34) of each of the profiles obtained so as to locate the position, in Z, of the neutral axis in the direction of the axis X.

The invention relates to a method for verifying the positioning of a fibrous preform in a blade, the blade having been obtained by injecting a resin into a mould having the shape of a blade and in which a preform has been placed, the blade extending in an orthonormal blade frame of reference X, Y, Z, the blade comprising a blade root extending longitudinally along an axis X, a vane extending from the blade root along an axis Z, the blade having a thickness defined along an axis Y, the preform comprising glass tracers positioned at the surface of the preform, the centre of the tracers defining a neutral axis located at a height along the axis Z in the direction defined by the axis X, the method comprising the following steps: the acquisition (E31) of tomographic 2D projections of the blade using an imaging system comprising an X-ray source, each projection being acquired at a given orientation of the X-ray source with respect to the blade; the combining (E32, E32a, E32b) of the 2D projections in the direction of the axis Y so as to obtain a cumulative 2D image in the directions X and Z; the determining (E33), for each pixel column defined in the direction of the axis Z, of a greyscale profile; the processing (E34) of each of the profiles obtained so as to locate the position, in Z, of the neutral axis in the direction of the axis X.

To provide an inspection device capable of imaging a transmission image while changing relative positions of a radiation source, an inspection object, and a detector. An inspection device comprises a radiation generator, a substrate holding unit for holding an inspection object, a detector, a substrate holding unit driving unit and a detector driving unit, a substrate position detection unit and a detector position detection unit, and a control unit, wherein the control unit executes a step for causing the detector to start acquiring an image while the relative positions of the radiation generator, the substrate holding unit and the detector are changing, a step for acquiring information relating to the positions of the substrate holding unit and the detector when the detector starts acquiring an image, and a step for storing the image acquired by the detector and the information relating to the position in association with each other.

To provide an inspection device capable of imaging a transmission image while changing relative positions of a radiation source, an inspection object, and a detector. An inspection device comprises a radiation generator, a substrate holding unit for holding an inspection object, a detector, a substrate holding unit driving unit and a detector driving unit, a substrate position detection unit and a detector position detection unit, and a control unit, wherein the control unit executes a step for causing the detector to start acquiring an image while the relative positions of the radiation generator, the substrate holding unit and the detector are changing, a step for acquiring information relating to the positions of the substrate holding unit and the detector when the detector starts acquiring an image, and a step for storing the image acquired by the detector and the information relating to the position in association with each other.

The invention relates to non-destructive imaging of the internal structure for safe and intuitive operator work. In the context of the invented method, electronic scanning first creates a virtual image of the surface of the object (5) whose internal structure is the subject of research. Part of the surface of the object (5) and the angle of scanning are set by voice or by movement of the operator's body (9). The virtual image of the surface of the object (5) is subsequently projected in the stereoscopic glasses (7), followed by creation of the virtual image of the internal structure of the object (5) for the same angle of scanning. The virtual image of the internal structure is projected in the virtual image of the surface of the object (5), or replaces the virtual image of the object (5).

The invention relates to non-destructive imaging of the internal structure for safe and intuitive operator work. In the context of the invented method, electronic scanning first creates a virtual image of the surface of the object (5) whose internal structure is the subject of research. Part of the surface of the object (5) and the angle of scanning are set by voice or by movement of the operator's body (9). The virtual image of the surface of the object (5) is subsequently projected in the stereoscopic glasses (7), followed by creation of the virtual image of the internal structure of the object (5) for the same angle of scanning. The virtual image of the internal structure is projected in the virtual image of the surface of the object (5), or replaces the virtual image of the object (5).