Disclosed herein is a method, comprising: capturing portion images of scene portions (i), i=1, . . . , N of a scene with radiation detectors of an image sensor. For i=1, . . . , N, Qi portion images of the scene portion (i) are respectively captured by Qi radiation detectors of the P radiation detectors, Qi being an integer greater than 1. The Qi portion images are of the portion images. The method further includes, for i=1, . . . , N, generating an enhanced portion image (i) from the Qi portion images of the scene portion (i). Generating the enhanced portion image (i) is based on positions and orientations of the Qi radiation detectors with respect to the image sensor and displacements between Qi imaging positions of the scene with respect to the image sensor. The scene is at the Qi imaging positions when the Qi radiation detectors respectively capture the Qi portion images.

Detection can be performed even for a thick inspection target object through time delay integration without degradation of spatial resolution. There is provided an X-ray inspection device configured to include: an X-ray source that generates X-rays; a transport unit that performs transporting a sample; a detecting unit that has a time delay integration type detector which detects X-rays generated by the X-ray source and transmitted through the sample transported by the transport unit; and a defect determining unit that processes a signal obtained by detecting the X-rays transmitted through the sample by the time delay integration type detector of the detecting unit and determines a defect in the sample. The transport unit performs transporting the sample while causing the sample to rotate in synchronization with the transporting when the sample passes in front of the time delay integration type detector of the detecting unit.

Detection can be performed even for a thick inspection target object through time delay integration without degradation of spatial resolution. There is provided an X-ray inspection device configured to include: an X-ray source that generates X-rays; a transport unit that performs transporting a sample; a detecting unit that has a time delay integration type detector which detects X-rays generated by the X-ray source and transmitted through the sample transported by the transport unit; and a defect determining unit that processes a signal obtained by detecting the X-rays transmitted through the sample by the time delay integration type detector of the detecting unit and determines a defect in the sample. The transport unit performs transporting the sample while causing the sample to rotate in synchronization with the transporting when the sample passes in front of the time delay integration type detector of the detecting unit.

Ad. X-ray inspection apparatus includes a conveyance unit, an X-ray radiation unit, an X-ray detection, unit, and an image processing unit. The X-ray detection unit has a plurality of direct conversion-type X-ray detection element arrays disposed, side-by-side in rows along a direction intersecting both a conveyance direction in which an object is conveyed by the conveyance unit and a radiation direction in which X-rays are radiated by the X-ray radiation unit The image processing unit has an edge detection unit configured to carry out edge detection processing on an X-ray transmission image to generate an edge detected image, a horizontal direction gradation unit configured to carry out horizontal direction gradation processing on the edge detected image to generate a horizontal direction gradation linage, and a synthesizing unit configured to synthesize the X-ray transmission image and the horizontal direction gradation image to generate a post-processing X-ray transmission image.

Ad. X-ray inspection apparatus includes a conveyance unit, an X-ray radiation unit, an X-ray detection, unit, and an image processing unit. The X-ray detection unit has a plurality of direct conversion-type X-ray detection element arrays disposed, side-by-side in rows along a direction intersecting both a conveyance direction in which an object is conveyed by the conveyance unit and a radiation direction in which X-rays are radiated by the X-ray radiation unit The image processing unit has an edge detection unit configured to carry out edge detection processing on an X-ray transmission image to generate an edge detected image, a horizontal direction gradation unit configured to carry out horizontal direction gradation processing on the edge detected image to generate a horizontal direction gradation linage, and a synthesizing unit configured to synthesize the X-ray transmission image and the horizontal direction gradation image to generate a post-processing X-ray transmission image.

A method of irradiating a target with a high power density irradiation beam is described. The method can use an irradiation system configured to output an irradiation beam through a vacuum window. The irradiation beam is scanned repetitively back and forth between two angular orientations of the irradiation beam as the irradiation beam strikes and traverses the vacuum window. The target is moved as the irradiation beam is scanned. The irradiation beam and the target are aligned. The scanning of the irradiations beam and the moving of the target are synchronized to each other. The scanning of the irradiation beam prevents localized overheating of the vacuum window and allows the irradiation beam to have a power density that would damage the vacuum window if the irradiation beam were not scanned.

A method of irradiating a target with a high power density irradiation beam is described. The method can use an irradiation system configured to output an irradiation beam through a vacuum window. The irradiation beam is scanned repetitively back and forth between two angular orientations of the irradiation beam as the irradiation beam strikes and traverses the vacuum window. The target is moved as the irradiation beam is scanned. The irradiation beam and the target are aligned. The scanning of the irradiations beam and the moving of the target are synchronized to each other. The scanning of the irradiation beam prevents localized overheating of the vacuum window and allows the irradiation beam to have a power density that would damage the vacuum window if the irradiation beam were not scanned.

An inspection device includes: an electromagnetic wave irradiator that irradiates, with a predetermined electromagnetic wave from a first film side, the package that is conveyed along a predetermined direction and that has the spaces at a plurality of positions in a width direction; an imaging device that is disposed opposed to the electromagnetic wave irradiator across the package, includes an electromagnetic wave detector including a plurality of detection elements that is arrayed along the width direction and that detects the electromagnetic wave radiated from the electromagnetic wave irradiator and transmitted through the package, and sequentially outputs an obtained electromagnetic wave transmission image every time the package is conveyed by a predetermined amount; and an image processing device that processes an image signal output from the imaging device.

Areal weight or thickness of a moving coated metal sheet along its entire cross directional width is derived by correlating thermographic image data to online, scanning basis weight measurements. Thermal imaging camera captures thermal images of a heated moving coated metal sheet material along a cross direction at a first position along the machine direction to generate sequential temperature profiles. Scanning beta gauge measures the areal weight of the moving coated metal sheet downstream at a second position. An infrared temperature sensor also measures the temperature of the moving coated metal sheet which is at a lower temperature at or near the second position. The temperature differential between the cross directional thermographic image data and the latter infrared temperature is a function of the basis weight. Basis weight measurements from the beta gauge is used to extrapolate cross directional basis weight data.

The present invention provides a method of inspecting a surface including detecting a presence or absence of a defect derived from a surface irregularity part of a planar inspection object to be conveyed in a predetermined direction, using a change in intensity of inspection light, the inspection light including at least two inspection lights that are parallel to a surface of the inspection object in a side view of the inspection object and pass over the surface of the inspection object or through the inspection object in a direction intersecting the conveyance direction in a plan view of the inspection object, the two inspection lights being non-parallel to each other in the plan view.