Patent classifications
G01N27/413
LEVELING COMPOUND CONTROL
An apparatus and method of adjusting a plating solution are described. Suppressor is added to the plating solution until a comparison to reference data of an RDE potential taken at a first time during a constant current experiment indicates a threshold suppressor concentration is present. The amount of suppressor added to reach the threshold suppressor concentration is used to determine suppressor concentration of the solution. Another amount of suppressor is added to a new plating solution so that the new plating solution has a specific suppressor concentration. The RDE potential or slope of RDE potential change of the new plating concentration with the specific suppressor concentration taken at a second time during another constant current experiment is compared with the reference data to determine the leveler concentration. The suppressor and leveler concentrations of the original plating solution are adjusted before a semiconductor substrate is plated.
ELECTROCHEMICAL SENSOR WITH OPENING BETWEEN SOLID ELEMENTS
There is presented an electrochemical sensor (100) for sensing an analyte in an associated volume (106), the sensor comprising a first solid element (126), a second solid element (128) being joined to the first solid element, a chamber (110) being placed at least partially between the first solid element and the second solid element, a working electrode (104) in the chamber (110), a reference electrode (108), and wherein one or more analyte permeable openings (122) connect the chamber (110) with the associated volume (106), and wherein the electrochemical sensor (100) further comprises an analyte permeable membrane (124) in said one or more analyte permeable openings, wherein the one or more analyte permeable openings are placed at least partially between the first solid element and the second solid element.
ELECTROCHEMICAL SENSOR WITH OPENING BETWEEN SOLID ELEMENTS
There is presented an electrochemical sensor (100) for sensing an analyte in an associated volume (106), the sensor comprising a first solid element (126), a second solid element (128) being joined to the first solid element, a chamber (110) being placed at least partially between the first solid element and the second solid element, a working electrode (104) in the chamber (110), a reference electrode (108), and wherein one or more analyte permeable openings (122) connect the chamber (110) with the associated volume (106), and wherein the electrochemical sensor (100) further comprises an analyte permeable membrane (124) in said one or more analyte permeable openings, wherein the one or more analyte permeable openings are placed at least partially between the first solid element and the second solid element.
Compact microelectronic integrated gas sensor
A compact microelectronic gas sensor module includes electrical contacts formed in such a way that they do not consume real estate on an integrated circuit chip. Using such a design, the package can be miniaturized further. The gas sensor is packaged together with a custom-designed Application Specific Integrated Circuit (ASIC) that provides circuitry for processing sensor signals to identify gas species within a sample under test. In one example, the output signal strength of the sensor is enhanced by providing an additional metal surface area in the form of pillars exposed to an electrolytic gas sensing compound, while reducing the overall package size. In some examples, bottom side contacts are formed on the underside of the substrate on which the gas sensor is formed. Sensor electrodes may be electrically coupled to the ASIC directly, or indirectly by vias.
Electrodes Having at Least One Sensing Structure and Methods for Making and Using the Same
Embodiments of the present disclosure relate to electrochemical analyte sensor electrodes that have one or more sensing structures, each structure has a respective perimeter at least partially around it to define the structure so that each of the structures have a liquid limiting barrier around their perimeters. The liquid limiting perimeter may completely or partially encompass the perimeter of each sensing structure of the electrode. Also provided are methods for fabricating the electrodes, analyte sensors employing the subject electrodes, and methods of using the analyte sensors in analyte monitoring.
Electrodes Having at Least One Sensing Structure and Methods for Making and Using the Same
Embodiments of the present disclosure relate to electrochemical analyte sensor electrodes that have one or more sensing structures, each structure has a respective perimeter at least partially around it to define the structure so that each of the structures have a liquid limiting barrier around their perimeters. The liquid limiting perimeter may completely or partially encompass the perimeter of each sensing structure of the electrode. Also provided are methods for fabricating the electrodes, analyte sensors employing the subject electrodes, and methods of using the analyte sensors in analyte monitoring.
ELECTROCHEMICAL GAS SENSOR ASSEMBLY
Various example embodiments described herein relate to an electrochemical gas sensor. The electrochemical gas sensor can include a sensor cap having one or more solid features disposed on a surface of the sensor cap. The electrochemical gas sensor can include a counter electrode configured to generate a gas during use of the electrochemical gas sensor. The electrochemical gas sensor can include a vent assembly adapted to release at least a portion of the gas generated at the counter electrode out from the electrochemical gas sensor. The vent assembly can include a vent conduit and a vent membrane that defines a passage for the gas to flow from an extended portion of the counter electrode, to the vent conduit, via the vent membrane, so as to be vented from the electrochemical gas sensor.
ELECTROCHEMICAL GAS SENSOR ASSEMBLY
Various example embodiments described herein relate to an electrochemical gas sensor. The electrochemical gas sensor can include a sensor cap having one or more solid features disposed on a surface of the sensor cap. The electrochemical gas sensor can include a counter electrode configured to generate a gas during use of the electrochemical gas sensor. The electrochemical gas sensor can include a vent assembly adapted to release at least a portion of the gas generated at the counter electrode out from the electrochemical gas sensor. The vent assembly can include a vent conduit and a vent membrane that defines a passage for the gas to flow from an extended portion of the counter electrode, to the vent conduit, via the vent membrane, so as to be vented from the electrochemical gas sensor.
GAS SENSOR, SCANNING ELECTROCHEMICAL GAS MICROSCOPE, AND METHOD OF PREPARING GAS SENSOR
A gas sensor for measuring a gas content in an electrolyte, including: an at least partially closed capillary tube, including a first channel and a second channel separated by a septum; and a tip; a first electrode is located in the first channel, extends to an outer surface of the tip, and exposed on the outer surface of the tip; a second electrode is located in the second channel, extends to the outer surface of the tip, exposed on the outer surface of the tip, and spaced apart from the first electrode; an electrolyte in contact with the outer surface of the tip, in contact with the first electrode and the second electrode, and exposed to an outer surface of the gas sensor; a voltage source; and a current meter, wherein the electrolyte is not present in the first channel and the second channel.
GAS SENSOR, SCANNING ELECTROCHEMICAL GAS MICROSCOPE, AND METHOD OF PREPARING GAS SENSOR
A gas sensor for measuring a gas content in an electrolyte, including: an at least partially closed capillary tube, including a first channel and a second channel separated by a septum; and a tip; a first electrode is located in the first channel, extends to an outer surface of the tip, and exposed on the outer surface of the tip; a second electrode is located in the second channel, extends to the outer surface of the tip, exposed on the outer surface of the tip, and spaced apart from the first electrode; an electrolyte in contact with the outer surface of the tip, in contact with the first electrode and the second electrode, and exposed to an outer surface of the gas sensor; a voltage source; and a current meter, wherein the electrolyte is not present in the first channel and the second channel.