Despite the desire to measure the composition and concentration of the microparticles included in a gaseous body sample serving as the measurement target, there is a problem that measurement cannot be performed accurately due to the effect of substances other than the gaseous body sample adsorbing to a trapping body of the analyzing apparatus that traps the microparticles, for example. Therefore, provided is a microparticle composition analyzing apparatus that analyzes composition of microparticles contained in a gaseous body sample, comprising a gas analyzer and a control section that sequentially introduces into the gas analyzer a comparative gas and a sample gas caused by the microparticles generated by irradiating the gaseous body sample with a laser.

In order to surely remove deposits attached on the inner wall of an exhaust gas pipe, an exhaust gas measurement system that measures components contained in the exhaust gas of an internal combustion engine is adapted to include an exhaust gas piping member into which the exhaust gas is introduced; a purge gas supply mechanism adapted to supply purge gas to the exhaust gas piping member; a heating mechanism adapted to heat the exhaust gas piping member; and a control mechanism adapted to, after the heating mechanism has heated the exhaust gas piping member or the exhaust gas flowing through the exhaust gas piping member to a predetermined temperature, control the purge gas supply mechanism to start supplying the purge gas.

An actuating and sensing module includes a first substrate, a second substrate, an actuating device and a sensor. A gas flow channel is formed by stacking the first substrate and the second substrate. The gas inlet, the gas flow channel and the gas outlet are in communication with each other to define a gas flow loop. The actuating device is disposed in the gas inlet of the second substrate and electrically connected to a control circuit to obtain a driving power. The sensor is disposed in the gas flow loop and electrically connected to a control circuit of the first substrate to transmit sensed data. While the actuating device drives outside gas from the outside, the gas is transported into the gas flow loop and sensed by the sensor.

Described is a method for quantifying the amount of optically interfering gas impurities in a gas detection system comprising a sample gas inlet, a reference gas inlet, a gas modulation valve, and an infrared absorption gas detector used for analysis of methane or natural gas, wherein the gas modulation valve alternatingly connects the sample gas inlet to the gas detector during a sample gas time period and the reference gas inlet to the gas detector during a reference gas time period. The method includes measuring an infrared absorption for at least two different sample gas concentrations in the gas detector achieved via respective different ratios from the sample gas time period and the reference gas time period, and comparing amplitudes of different measurement signals of the at least two different sample gas concentrations with calibration functions to assess an actual gas impurity concentration in the sampled gas.

Method for wide range gas detection using a gas detection system comprising a sample gas inlet, a reference gas inlet, a gas modulation valve and a gas analyzer, wherein the gas modulation valve alternatingly connects the sample gas inlet to the gas analyzer during a sample gas time period and the reference gas inlet to the gas analyzer during a reference gas time period, characterized in that the sample gas time period is shorter than the reference gas time period such that the sample gas concentration in the gas analyzer is reduced.

A gas detection system, comprising a sample gas inlet, a reference gas inlet and a gas modulation valve alternatingly connecting one of the sample gas inlet and the reference gas inlet to a gas sensor, is characterized in that a selective transfer filter is located in the gas flow path connecting the gas modulation valve and the gas sensor.

A biological gas detection device acquires a reference output value that is an output value outputted from a semiconductor gas sensor in a reference air sample, the semiconductor gas sensor having sensitivity to an interfering gas and a target gas contained in a biological gas, acquires a target gas concentration that is a concentration of the target gas measured based on a first output value, the first output value being outputted from the semiconductor gas sensor during measurement of the biological gas, corrects the target gas concentration based on a second output value and the reference output value, the second output value being outputted from the semiconductor gas sensor in an air sample prior to measurement of the biological gas; and outputs information according to the corrected target gas concentration.

A process gas analyzer and method for analyzing a process gas carried in a plant section, wherein light from a light source is passed through the process gas and detected via a detector, evaluated in an evaluation unit to produce an analysis result with respect to the absorption in the process gas, where chambers or purging pipes, present between the light source and the plant section and also between the detector and the plant section, are flushed with a purge gas to analyze the process gas, and where the volume flow rate of the purge gas is periodically modulated and the effect of the purge gas on the analysis result is determined based on changes in the detected absorption caused by the modulation and removed from the analysis result to enable a high degree of compensation for measurement errors caused by the purging.

A particle supply device according to one embodiment includes a housing and a particle supplier. The housing seals a space between a substrate carry-out port provided in a FOUP and a substrate carry-in port provided at a load port of a substrate processing device. A particle supplier supplies particles to an inside of the housing.

A gas sensor apparatus (100) comprising a gas inlet (10); a first gas sensor (40); a first gas flow path between the inlet and the gas sensor; a humidifier (20) disposed between the gas inlet and the gas sensor in the first gas flow path of the gas sensor apparatus; and a dehumidifier (30) disposed between the humidifier and the first gas sensor in the first gas flow path. The gas sensor apparatus may have more than one gas flow path. The gas sensor apparatus may contain more than one sensor. The gas sensor apparatus may contain one or more filters for filtering a target gas or a non-target gas. The gas sensor apparatus may be used in detection of ethylene and/or 1-methylcyclopropene.