Patent classifications
G01N2201/06113
Optical sensor for surface inspection and metrology
An optical system configured to measure a raised or receded surface feature on a surface of a sample may comprise a broadband light source; a tunable filter configured to filter broadband light emitted from the broadband light source and to generate a first light beam at a selected wavelength; a linewidth control element configured to receive the first light beam and to generate a second light beam having a predefined linewidth and a predetermined coherence length; collimating optics optically coupled to the second light beam and configured to collimate the second light beam; collinearizing optics optically coupled to the collimating optics and configured to align the collimated second light beam onto the raised or receded surface feature of the sample, and a processor system and at least one digital imager configured to measure a height of the raised surface or depth of the receded surface from light reflected at least from those surfaces.
SYSTEMS AND METHODS FOR IMAGING AND ABLATING A SAMPLE
Disclosed herein are systems for imaging and ablating a sample. An imaging/ablating device includes an optical assembly, a sample stage, and a receiver. The optical assembly enables ablation of a region of interest within the sample. The laser light propagated from the optical assembly during ablation propagates substantially in the same direction as the direction of travel of the ablation plume toward the receiver. A laser focus detection unit including at least one reference laser and photodetector generates at least one real-time detection signal indicative of one or more characteristics of the sample during ablation and/or of a distance from the objective to the sample stage or a surface of the sample. A controller coupled with the laser focus detection unit dynamically controls in real-time one or more parameters of the ablation laser and/or a position of the objective and/or a position of the receiver relative to the sample to improve MS imaging quality.
Multiplexed sensor network using swept source Raman spectroscopy
Swept-source Raman spectroscopy uses a tunable laser and a fixed-wavelength detector instead of a spectrometer or interferometer to perform Raman spectroscopy with the throughput advantage of Fourier transform Raman spectroscopy without bulky optics or moving mirrors. Although the tunable laser can be larger and more costly than a fixed wavelength diode laser used in other Raman systems, it is possible to split and switch the laser light to multiple ports simultaneously and/or sequentially. Each site can be monitored by its own fixed-wavelength detector. This architecture can be scaled by cascading fiber switches and/or couplers between the tunable laser and measurement sites. By multiplexing measurements at different sites, it is possible to monitor many sites at once. Moreover, each site can be meters to kilometers from the tunable laser. This makes it possible to perform swept-source Raman spectroscopy at many points across a continuous flow manufacturing environment with a single laser.
Molecular construct for multiphoton fluorescence microscopy imaging
The present disclosure generally relates to a molecular construct for multiphoton fluorescence microscopy imaging. The molecular construct has a first, non-fluorescent configuration (2PAP-C) and a second, fluorescent configuration (2PAP-CL), and comprises a two-photon absorbing probe (2PAP) linked to a photochromic molecule that can be reversibly changed from a first colored isomeric form (C) to a second colorless isomeric form (CL). The first colored form (C) can be isomerized to the second colorless isomeric form (CL) upon absorption of two photons by the two-photon absorbing probe (2PAP). The present disclosure also relates to a method for analyzing a target structure in a multiphoton microscope utilizing the molecular construct. Furthermore, the present disclosure relates to an antibody tagged with the molecular construct, and to the use of the molecular construct for imaging a target structure.
APPARATUS FOR DETECTING MATTER
An apparatus for detecting matter including: a light source arrangement adapted to emit a first and a second set of light beams towards a first detection zone through which the matter is provided. A spectroscopy system adapted to receive and analyse light which is reflected and/or scattered by matter in the first detection zone. A laser triangulation system including, a laser arrangement adapted to emit a line of laser light towards a second detection zone. A camera-based sensor arrangement configured to receive and analyse light which is reflected and/or scattered by matter in the second detection zone. The received light of the spectroscopy system completely or partially intersects the received light of the camera-based sensor arrangement and/or the line of laser light.
METHODS AND SYSTEMS TO MEASURE PROPERTIES OF MOVING PRODUCTS IN DEVICE MANUFACTURING MACHINES
Described are systems and techniques directed to optical inspection of moving products (wafers, substrates, films, patterns) that are being transported to or from processing chambers in device manufacturing systems. Implementations include a system that has a first source of light to direct a first light to a first location on a surface of a product. The first light generates, at the first location, a first reflected light. The system further includes a first optical sensor to generate a first data representative of a first reflected light, and a processing device, in communication with the first optical sensor to determine, using the first data, a property of the product.
SURFACE-ENHANCED RAMAN SCATTERING SUBSTRATE BASED ON SURFACE PLASMON RESONANCE AND METHOD OF FABRICATING THE SAME
The present invention relates to a surface-enhanced Raman scattering substrate and a method of fabricating the same. More particularly, the surface-enhanced Raman scattering substrate according to an embodiment includes a substrate; a lower plasmonic layer formed on the substrate and based on a first metal nanostructure; an oxide layer formed on the lower plasmonic layer; and an upper plasmonic layer formed on the oxide layer and based on a second metal nanostructure.
System and Method of Measuring Contaminants in a Substantially Translucent Material, Such as Water
A system for sensing analyte in at least partly translucent material, including one or more radiation sources configured for successively providing radiation at a first and a second wavelength, respectively, two or more waveguides for simultaneously transmitting the radiation at each wavelength provided by the radiation source, a first waveguide being a reference waveguide and a second being a sensing waveguide; and measuring means for measuring a phase difference between the radiation waves from the reference waveguide and the measuring waveguide, resp. The present method can be used for measuring contaminants such as Fe, Sn, and/or Pb in oil related products, such as carburant or lubricant.
Estimating a condition of a physical structure
In a computer-implemented method and system for capturing the condition of a structure, the structure is scanned with an unmanned aerial vehicle (UAV). Data collected by the UAV corresponding to points on a surface of a structure is received and a 3D point cloud is generated for the structure, where the 3D point cloud is generated based at least in part on the received UAV data. A 3D model of the surface of the structure is reconstructed using the 3D point cloud.
Photoacoustic excitation sensing enhanced by cross-correlated unfocused speckle images
A method and a system for photoacoustic inspection of a part are provided herein. The method may include the following steps: photo-acoustically exciting a predetermined position in a predetermined region on a part by pulsed laser illumination, to yield ultrasonic excitation of the part; coherently illuminating a predetermined location in the predetermined region on the part; detecting an illumination scattered from the predetermined location; determining, based on the scattered illumination, a plurality of sequence of two or more temporally-sequential de-focused speckle pattern images, wherein each of the sequences corresponds to one of the predetermined illuminated locations; and determining a set of translations, each determined based on the sequences, wherein each translation in the set is determined based on two temporally-sequential speckle patterns images in the respective sequence.