A method of inspection for defects on a substrate, such as a reflective reticle substrate, and associated apparatuses. The method includes performing the inspection using inspection radiation obtained from a high harmonic generation source and having one or more wavelengths within a wavelength range of between 20 nm and 150 nm. Also, a method including performing a coarse inspection using first inspection radiation having one or more first wavelengths within a first wavelength range; and performing a fine inspection using second inspection radiation having one or more second wavelengths within a second wavelength range, the second wavelength range comprising wavelengths shorter than the first wavelength range.

Apparatus and methods relating to photonic bandgap optical nanostructures are described. Such optical nanostructures may exhibit prohibited photonic bandgaps or allowed photonic bands, and may be used to reject (e.g., block or attenuate) radiation at a first wavelength while allowing transmission of radiation at a second wavelength. Examples of photonic bandgap optical nanostructures includes periodic and quasi-periodic structures, with periodicity or quasi-periodicity in one, two, or three dimensions and structural variations in at least two dimensions. Such photonic bandgap optical nanostructures may be formed in integrated devices that include photodiodes and CMOS circuitry arranged to analyze radiation received by the photodiodes.

A calibration target for calibrating an optoelectronic device for analyzing biomolecules by detecting fluorescence signals from a sample includes a substrate and a solid fluorescent layer that is disposed on the substrate and capable of being excited by laser light. The fluorescent layer has an optically inactive matrix having embedded therein a carbon-based component that is excitable to light emission.

A non-linear optical pumping detection apparatus and a non-linear optical absorption cross-section measurement method, which can simultaneously measure degenerate and non-degenerate two-photon absorption cross-section spectra. The measurement process is automatic, efficient and fast. The working wavelength band is from 380 nm to near infrared 1064 nm, and the non-linear performance measurement of the super-continuous wide spectra can be realized. A zoom optical system with a larger entrance pupil diameter is adopted as a weak signal acquisition lens. So the weak signal can be effectively extracted from background noise. Meanwhile, the mean square root diameter of an on-axis image point of the zoom optical system is 100 to 150 microns, the divergence angle 2α of the on-axis image point is 30.6 degrees, which well match the optical fiber coupling condition, thereby improving the coupling efficiency of the space light coupling into the optical fiber, and greatly improving the measurement sensitivity.

A detection device for virus detection is provided, which includes: a carrier including a recess; and a metal layer disposed in the recess and having a contact angle ranging from 0 degrees to 10 degrees, wherein a plurality of cavities are formed on a first surface of the metal layer opposite to a second surface of the metal layer facing the carrier, the plurality of cavities are arranged in an array, and a plurality of first protrusions are formed on the first surface of the metal layer and near to the plurality of cavities. In addition, a detection system for virus detection comprising the aforesaid detection device, a method for detecting viruses using the aforesaid detection device, and a method for preparing the detection device are also provided.

An apparatus for monitoring and controlling a haze and/or particulate level in the air is disclosed. The apparatus comprises a detecting unit (sensor) and a controller. The detecting unit is configured to detect the haze and/or particulate level in real time. The controller in communication with the detecting unit is configured to receive data related to a haze level from the detecting unit. The apparatus further comprises a display and a control switch. The display in communication with the controller is configured to display data related to the haze level monitored by one or more sensors. The sensors are laser based particulate sensors. The control switch in communication with the controller is configured to send a signal to control a haze generator, thereby monitoring the haze level in real time and controlling the haze generator at predetermined time periods using the control switch for attaining and maintaining a desired haze level.

A method of inspecting a semiconductor processing chamber includes providing a vision sensor into the semiconductor processing chamber, aligning the vision sensor on a target in the semiconductor processing chamber, obtaining an object image of the target using an image scanning module of the vision sensor, generating a three dimensional model of the target based on the object image, and obtaining a physical quantity of the target from the three dimensional model. The obtaining of the object image of the target includes projecting a pattern onto the target using an illuminator of the image scanning module, and scanning an image of the target in which the pattern is projected, using a camera of the image scanning module.

A method of inspecting a substantially transparent light control layer for an optically variable security device and a corresponding inspection apparatus, the substantially transparent light control layer including a surface relief defined by an array of substantially transparent refractive microstructures. The method includes: directing a beam of substantially collimated light towards a first region that is expected to contain the surface relief of the light control layer so as to generate an inspection light pattern; providing reference data that is indicative of a light control layer that meets a predetermined quality threshold; comparing the inspection light pattern with the reference data; and determining whether the light control layer meets the predetermined quality threshold based on the comparison.

Modular docking station and methods for sampling and monitoring gas and other fluids, where a sampling device is able to be removably attached to the docking station, thereby allowing the sampling device to be replaced without having to remove or disconnect the docking station from the rest of the sampling system. This allows the docking station to remain connected to the rest of the system with minimal or no interruption and reduces maintenance costs and time when replacing the sampling device.

A photon peak event detection system accepts an analog output from a photon sensor, directly digitizes the analogy output and includes a graphics processing unit (GPU) programmed to conduct a photon peak event detection in real-time via a photon count program that analyzes the digitized photon sensor output in sampling periods each having at least three consecutive data points to determine a local maximum among the consecutive data points and compare the local maximum to one or more predetermined thresholds to determine whether or not a photon was received in each sampling period, the algorithm providing photon counts to a phasor analysis program in the GPU. The phasor analysis program calculates pixelwise fluorescence lifetime phasor data in real-time and sends the data to a central processing unit.