According to an embodiment, an optical device includes a light selection unit, an imaging element, and a deriving unit. The light selection unit splits an irradiated light beam into a plurality of spectral beams of different wavelength regions. The imaging element captures a subject irradiated with the spectral beams including beams of at least two different wavelengths to acquire a spectral image. The deriving unit derives a surface property or shape information of the subject from a specified result obtained by specifying, by the deriving unit, an irradiation region irradiated with each of the spectral beams on the subject based on a mixing ratio of the spectral beams and received light intensity of each of the spectral beams included in the spectral image.

An inspection device includes an objective lens that transmits inspection light reflected from a sample during inspection and measurement light from a point light source during aberration measurement, a first pupil relay lens that transmits the inspection light and the measurement light, a second pupil relay lens in which an intermediate imaging plane is formed between the second pupil relay lens and the first pupil relay lens, a diffraction grating disposed between the first pupil relay lens and the intermediate imaging plane and that diffracts the measurement light, a point diffraction interferometry plate disposed within a depth of focus of the intermediate imaging plane and that selectively transmits the diffracted light, a first detector that detects an image of the sample, and a second detector that detects a fringe image of the measurement light.

The invention relates to the domain of microscope based imaging. The invention provides methods and apparatuses for providing improved microscope based digital imaging solutions that are capable of providing high quality images with a high level of image detail. The invention additionally provides solutions for artificial intelligence based controlling of a digital microscope's imaging functions to enable bright field/dark field imaging functionality to be combined with spectroscopic functions to obtain higher detail and more meaningful information about a specimen sample.

An assembly for measurements of one or more optical parameters of a medium is disclosed. The assembly comprises a light sheet generator, a light intensity modulator, a holder for a sample, and an optical sensor.

The light sheet generator is configured to provide a polychromatic light sheet comprising a light spectrum extending in a first spatial dimension, wherein the polychromatic light sheet has a propagation path in a second spatial dimension.

The light sheet generator comprises a light source configured to provide white light, a dispersive element configured to spread the white light in the first spatial dimension to provide the light spectrum, and an optical slit extending in the first spatial dimension configured to provide the polychromatic light sheet by limitation of the spread white light.

The light intensity modulator is configured to provide an intensity modulated polychromatic light sheet by applying—to the polychromatic light sheet—an intensity modulation having a periodical (or substantially periodical) pattern in the first spatial dimension.

The holder for a sample of the medium is configured to enable the intensity modulated polychromatic light sheet to illuminate the sample.

The optical sensor is configured to record intensity of light exiting the sample over the light spectrum for provision of the one or more optical parameters.

A method of using the assembly for measuring one or more optical parameters of a medium is also disclosed.

Disclosed herein are systems and methods of obtaining a derivative Raman spectrum using an excitation or Raman pump beam whose wavelength is modulated in any suitable manner such as, for example, stochastically. Shifting the wavelength of the input excitation by a small amount in approaches like SERDS can isolate the Raman scatter from other spectral artifacts and reduce the false detection rate. For example, an input excitation sequence can be correlated with the response of an individual pixel of a detector. From this, pixels that have captured Raman scattered photons can be separated from pixels capturing non-Raman photons. These techniques can be expanded to other fields and/or types of spectroscopies that utilize a dispersive element detector with time-dependent spectral features.

An assembly for measurements of one or more optical parameters of a medium is disclosed. The assembly comprises a light sheet generator, a light intensity modulator, a holder for a sample, and an optical sensor. A method of using the assembly for measuring one or more optical parameters of a medium is also disclosed.

An apparatus for detecting defects on a sample is provided. The apparatus includes a stage for receiving a sample to be inspected, and a first light source configured to generate an incident light beam to illuminate the sample on the stage. The first light source is configured to sequentially emit light of different wavelengths in wavelength sweeps. The apparatus also includes imaging optics for collecting light scattered from the sample and for forming a detection light beam, a detector for receiving the detection light beam and acquiring images of the sample, collection optics disposed within the detection light beam and configured to direct the detection light beam to the detector, and a first light modulator. The first light modulator is configured to filter out signals from the detection light beam, where the signals originate from uniform periodicity of uniformly repeating structures on the sample.

High-throughput hyperspectral imaging systems are provided. According to an aspect of the invention, a system includes an excitation light source; an objective that is configured to image excitation light onto the sample, such that the excitation light causes the sample to emit fluorescence light; a channel separator that is configured to separate the fluorescence light into a plurality of spatially dispersed spectral channels; and a sensor. The excitation light source includes a light source and a plurality of lenslet arrays. Each of the lenslet arrays is configured to receive light from the light source and to generate a pattern of light, and the patterns of light generated by the lenslet arrays are combined to form the excitation light. The objective is configured to simultaneously image each of the patterns of light to form a plurality of parallel lines or an array of circular spots at different depths of the sample.

A spectroscope includes: a light incidence section that allows light from an outside to be incident; a diffraction grating that disperses wavelengths of the light incident on the diffraction grating by the light incidence section; a light reflector having a reflecting surface having an inclination variable around a rotation axis of the reflecting surface; and a light emitter that emits the light reflected by the light reflector to the outside. At least one of the light incidence section, the diffraction grating, and the light reflector, and the light emitter are changeable in a direction orthogonal to the rotation axis. The position of the light emitter is changeable in a direction along a center axis of the light emitted from the light emitter.

The present technology provides an irradiation method, a biological substance analysis method, and a biological substance analyzer to improve a throughput while securing signal reliability of detection data when a biological substance is caught on a substrate and the biological substance is detected by irradiating the substrate. For this, the present technology provides a biological substance analysis method and the like including: a step of segmenting a substrate on which a molecule that can be bound to a biological substance is immobilized and the biological substance is bound to the molecule, and irradiating the substrate in accordance with an irradiation pattern having a different segment with time; and a step of analyzing the biological substance on the basis of information obtained from the irradiation.