A color measuring device and a color measuring method according to the present invention includes an imaging unit, a first image of a color chart and a second image accompanied with the color chart are obtained by the imaging unit, the second image being a predetermined code indicating control information about the color measuring device, the control information is obtained based on the obtained second image, and operation of the color measuring device is controlled based on the obtained control information.

A conveyance device supports and conveys an object. The conveyance device has a support portion in which an opening narrower than the object is provided at a position where the object is supported. A lighting device irradiates a first surface of the object with measurement light having a wavelength changing over time through the opening of the support portion. A light receiving device detects object light that is diffusely transmitted light emitted from a second surface of the object.

A subject-to-be-examined support unit that supports a subject to be examined, a light source unit that outputs light entering the subject-to-be-examined support unit from a side opposite to a side by which a sample is supported, a fluorescent plate that is illuminated with the light that has been output from the light source unit and passed through the subject-to-be-examined support unit and the sample, and emits fluorescence, a photomultiplier that detects fluorescence that has been emitted from the fluorescent plate and passed through the subject-to-be-examined support unit and the sample, and a plate support unit that supports the fluorescent plate are provided. The plate support unit is structured in such a manner that a distance between the subject-to-be-examined support unit and the fluorescent plate is changeable by moving the fluorescent plate in a direction closer to the subject-to-be-examined support unit and in a direction away therefrom.

A line-scan laser is directed to a sample so that a Raman-shifted light signal is emitted from the sample. An imaging spectrograph and associated camera and processor acquires the Raman-shifted light signal and processes the signal to thereby identify the composition of the sample.

A color measuring device and a color measuring method according to the present invention includes an imaging unit, a first image of a color chart and a second image accompanied with the color chart are obtained by the imaging unit, the second image being a predetermined code indicating control information about the color measuring device, the control information is obtained based on the obtained second image, and operation of the color measuring device is controlled based on the obtained control information.

A method and apparatus for obtaining reference samples during the generation of a mid-infrared (MW) image without requiring that the sample being imaged be removed is disclosed. A tunable MIR laser generates a light beam that is focused onto a specimen on a specimen stage that moves the specimen in a first direction. An optical assembly includes a scanning assembly having a focusing lens and a mirror that moves in a second direction, different from the first direction, relative to the stage such that the focusing lens maintains a fixed distance between the focusing lens and the specimen stage. A light detector measures an intensity of light leaving the point on the specimen. A controller forms an image from the measured intensity. A reference stage is positioned such that the mirror moves over the reference stage in response to a command so that the controller can also make a reference measurement.

A method and apparatus for obtaining reference samples during the generation of a mid-infrared (MW) image without requiring that the sample being imaged be removed is disclosed. A tunable MIR laser generates a light beam that is focused onto a specimen on a specimen stage that moves the specimen in a first direction. An optical assembly includes a scanning assembly having a focusing lens and a mirror that moves in a second direction, different from the first direction, relative to the stage such that the focusing lens maintains a fixed distance between the focusing lens and the specimen stage. A light detector measures an intensity of light leaving the point on the specimen. A controller forms an image from the measured intensity. A reference stage is positioned such that the mirror moves over the reference stage in response to a command so that the controller can also make a reference measurement.

The system includes a thermal subsystem, an optical subsystem, and a processor. The thermal subsystem comprises a first laser light source configured to emit laser light, a first focusing lens configured to direct the laser light onto a workpiece, and a thermal camera configured to capture a thermal image of the workpiece. The optical subsystem includes at least one light source configured to emit laser light with at least one illumination modality, at light focusing lens configured to direct the light onto the workpiece, and a detector configured to capture at least one image of the workpiece. The processor is configured to compare the at least one image received from the detector to at least one reference image for registration of the workpiece or to determine presence of a surface defect on the workpiece, and to determine presence of a bulk defect in the workpiece based on the thermal image.

A defect inspection apparatus includes an illumination unit configured to irradiate a surface of a sample with a linear illumination spot; a condensing detection unit configured to condense reflected light of the illumination spot and to control a polarization state of the incident light to form an optical image; and a sensor unit configured to output the optical image and including an array-shaped light receiving portion and an antireflection film at a position conjugate with the illumination spot, in which the condensing detection unit includes a polarization control unit configured to increase light incident efficiency to the sensor unit. The normal line of the light receiving surface of the sensor unit is inclined from the optical axis of the condensing detection unit by 10 degrees or more and less than 80 degrees. The light condensing detection unit increases the optical magnification in the lateral direction of the illumination spot.

A conveyance device supports and conveys an object. The conveyance device has a support portion in which an opening narrower than the object is provided at a position where the object is supported. A lighting device irradiates a first surface of the object with measurement light having a wavelength changing over time through the opening of the support portion. A light receiving device detects object light that is diffusely transmitted light emitted from a second surface of the object.