A defect inspection device in which an optical axis of a detection optical system is inclined with respect to a surface of a sample, and an imaging sensor is inclined with respect to the optical axis, a height variation amount of an illumination spot in a normal direction of the surface of the sample is calculated based on an output of a height measuring unit, a deviation amount of the focusing position with respect to the light receiving surface in an optical axis direction of the detection optical system is calculated based on the height variation amount of the illumination spot, the deviation amount of the focusing position being generated accompanying a height variation of the illumination spot, and the focus actuator is controlled based on the deviation amount of the focusing position, and scattered light intensities at the same coordinates of the sample are added.

An imaging system for capturing spatial images of biological tissue samples may include an imaging chamber configured to hold a biological tissue sample placed in the imaging system; a light source configured to illuminate the biological tissue sample to activate one or more fluorophores in the biological tissue sample; a Time Delay and Integration (TDI) imager comprising a plurality of partitions, where the plurality of partitions may be configured to capture images at a plurality of different depths in the biological tissue sample simultaneously during a scan by the TDI imager; and a controller configured to cause the TDI imager to scan the biological tissue sample.

This application provides a cell detection method, device and system as well as a processor and a controller. The cell detection method may include: obtaining target detection data of a target cell; and determining a detection result of the target cell based on the target detection data and standard data. The cell detection method improves the detection efficiency and detection effect of the cells.

A transmission Raman spectroscopy apparatus has a light source for generating a light profile on a sample, a photodetector having at least one photodetector element, collection optics arranged to collect Raman scattered light transmitted through the sample and direct the Raman light onto the at least one photodetector element and a support for supporting the sample. The support and light source are arranged such that the light profile can be moved relative to the sample in order that the at least one photodetector element receives Raman scattered light generated for different locations of the light profile on the sample.

Provided are methods, devices and systems that utilize free-surface fluidics and SERS for analyte detection with high sensitivity and specificity. The molecules can be airborne agents, including but not limited to explosives, narcotics, hazardous chemicals, or other chemical species. The free-surface fluidic architecture is created using an open microchannel, and exhibits a large surface to volume ratio. The free-surface fluidic interface can filter interferent molecules, while concentrating airborne analyte molecules. The microchannel flow enables controlled aggregation of SERS-active probe particles in the flow, thereby enhancing the detector's sensitivity.

Provided are methods and apparatuses for controlling a position of a target point on a processing result relative to a focus point of a focusing sensor system for determining properties of the processing result. The method includes the steps of determining an initial focus point of the focusing sensor system, controlling rotation of the cartridge and disc, checking whether the initial focus point of the focusing sensor system corresponds to the target point on the processing result, comparing (x, y) target positions in captured images with the initial focus point of the focusing sensor system, adjusting rotation of the cartridge and disc such that the focus point of the focusing sensor system corresponds to the target point on the processing result, and detecting and examining signals received from the focusing sensor system for determining properties of the processing result.

A defect inspection device in which an optical axis of a detection optical system is inclined with respect to a surface of a sample, and an imaging sensor is inclined with respect to the optical axis, a height variation amount of an illumination spot in a normal direction of the surface of the sample is calculated based on an output of a height measuring unit, a deviation amount of the focusing position with respect to the light receiving surface in an optical axis direction of the detection optical system is calculated based on the height variation amount of the illumination spot, the deviation amount of the focusing position being generated accompanying a height variation of the illumination spot, and the focus actuator is controlled based on the deviation amount of the focusing position, and scattered light intensities at the same coordinates of the sample are added.

A surface inspection system can be provided with a laser spot size or a laser line width that is selectable based on a measurable aspect of the objects under test that project upward or downward from a surface under test. The larger laser spot size or line width can be selected to cover a larger area of the surface under test at a time, which can increase scanning speed over the surface under test and enhance system measurement throughput.

According to an embodiment, an optical apparatus includes: an illumination portion, a light receiving portion, and a processor. The illumination portion is configured to illuminate an object with light. The illumination portion is configured to illuminate a first illumination point of the object with light having a first wavelength and illuminate a second illumination point different from the first illumination point of the object with light having a second wavelength. The light receiving portion is configured to move relative to the object while maintaining a positional relationship with the illumination portion and is configured to receive light that passed through the first illumination point of the object and light that passed through the second illumination point. The processor is configured to image the object by light reception signals of the light that passed through the first illumination point and the second illumination point.

The inventions provide microscopes for imaging samples within wells of multi-well plates. Microscopes of the disclosure include a beam homogenizer system that shapes a beam from a light source into a shape specific to the bottom of a well of a multi-well plate. In particular, microscopes of the disclosure can illuminate wells for imaging by passing light through a prism that is beneath the sample. The light enters the prism from the side and as refracted into the well at a steep angle such that the light only illuminates about a bottom ten microns of the well. The beam homogenizer shapes the light from the light source so that, instead of hitting the prism as a spot with an irregular shape, the light enters the prism in a substantially rectangular pattern with homogeneous optical power level over the pattern.