Crystallographic information of crystalline sample can be determined from one or more three-dimensional diffraction pattern datasets generated based on diffraction patterns collected from multiple crystals. The crystals for diffraction pattern acquisition may be selected based on a sample image. At a location of each selected crystal, multiple diffraction patterns of the crystal are acquired at different angles of incidence by tilting the electron beam, wherein the sample is not rotated while the electron beam is directed at the selected crystal.

An improved charged particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus for detecting a thin device structure defect is disclosed. An improved charged particle beam inspection apparatus may include a charged particle beam source to direct charged particles to a location of a wafer under inspection over a time sequence. The improved charged particle beam apparatus may further include a controller configured to sample multiple images of the area of the wafer at difference times over the time sequence. The multiple images may be compared to detect a voltage contrast difference or changes to identify a thin device structure defect.

An x-ray imaging apparatus includes an x-ray source module configured to output source x-rays, a pencil-beam-forming module having input and output ports, and a module engagement interface that enables a user to select aligned and non-aligned configurations of the source and pencil-beam-forming modules. In the aligned configuration, the pencil-beam-forming module is aligned with the source module to receive source x-rays at the input port and to output a scanning pencil beam through the output port toward a target. In the non-aligned configuration, the pencil-beam-forming module is not aligned with the x-ray source module to receive the source x-rays nor to output the pencil beam, but instead enables the source x-rays to form a stationary, wide-area beam directed toward the target. Example embodiments can be handheld, can enable both backscatter imaging and high-resolution transmission imaging using the same apparatus, and can be employed in finding and disarming explosive devices.

A method for imaging a sample by means of an X-ray detector is disclosed, including providing an electron beam interacting with a target to generate X-ray radiation emitted from an X-ray spot on the target, moving the sample relative to the target, deflecting the electron beam such that the X-ray spot is moved over the target simultaneously and in accordance with the movement of the sample, and detecting X-ray radiation emitted from the X-ray spot and interacting with the sample.

The X-ray imaging device (100) is provided with an X-ray source (1), a plurality of gratings, a moving mechanism (8), and an image processing unit (6). The image processing unit (6) is configured to generate a phase-contrast image (16) by associating a pixel value in each pixel of a subject (T) in a plurality of subject images (10) with phase values of a Moire fringe (30) at each pixel and aligning the pixel of the subject of the same position in the plurality of subject images.

Arrangements involving objective lens array assemblies for charged-particle assessment tools are disclosed. In one arrangement, the assembly comprises an objective lens array and a control lens array. Each objective lens projects a respective sub-beam of a multi-beam onto a sample. The control lens array is associated with the objective lens array and positioned up-beam of the objective lens array. The control lenses pre-focus the sub-beams.

The present invention relates to acquiring reference scan data for X-ray phase-contrast imaging and/or X-ray dark-field imaging. Therefore an X-ray detector (26) is arranged opposite an X-ray source (12) across an examination region (30) with a grating arrangement (18) arranged between the X-ray source (12) and the X-ray detector (26). During an imaging operation without an object in the examination region (30) the grating arrangement (18) is moved in a scanning motion to a number of different positions (a) relative to the X-ray detector (26) whilst the X-ray detector (26) remains stationary relative to the examination region (30) such that in the scanning motion a series of fringe patterns is detected by the X-ray detector (26). The scanning motion is repeated for a different series of fringe patterns. This allows acquiring reference scan data required for calibration of an X-ray imaging device (10′″) with less scanning motions.

An improved charged particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus for detecting a thin device structure defect is disclosed. An improved charged particle beam inspection apparatus may include a charged particle beam source to direct charged particles to a location of a wafer under inspection over a time sequence. The improved charged particle beam apparatus may further include a controller configured to sample multiple images of the area of the wafer at difference times over the time sequence. The multiple images may be compared to detect a voltage contrast difference or changes to identify a thin device structure defect.

An x-ray imaging apparatus includes an x-ray source module configured to output source x-rays, a pencil-beam-forming module having input and output ports, and a module engagement interface that enables a user to select aligned and non-aligned configurations of the source and pencil-beam-forming modules. In the aligned configuration, the pencil-beam-forming module is aligned with the source module to receive source x-rays at the input port and to output a scanning pencil beam through the output port toward a target. In the non-aligned configuration, the pencil-beam-forming module is not aligned with the x-ray source module to receive the source x-rays nor to output the pencil beam, but instead enables the source x-rays to form a stationary, wide-area beam directed toward the target. Example embodiments can be handheld, can enable both backscatter imaging and high-resolution transmission imaging using the same apparatus, and can be employed in finding and disarming explosive devices.

Provided is an X-ray analysis apparatus including: a goniometer including an incident-side arm extending in a first direction, a fixing portion, and a receiving-side arm; an X-ray source portion, which is arranged on the incident-side arm and generates an X-ray source extending in a second direction, which crosses the first direction; a support base, which is arranged on the fixing portion, and is configured to support a sample; a parallel slit, which is arranged on the fixing portion, and is configured to limit a line width along the second direction of the X-ray source generated by the X-ray source portion; and a detector, which is arranged on the receiving-side arm, and is configured to detect a scattered X-ray generated by the sample.