An adaptor for a turntable of a CT system includes at least two object turntables for at least two objects and a rotation transmission element configured to be coupled to the turntable of the CT system. The two object turntables are coupled to each other using a coupler such that the at least two object turntables rotate simultaneously. The rotation transmission element is coupled to the coupler and configured to transmit a rotation from the turntable of the CT system to the coupler in order to drive the at least two object turntables.

When measuring a mass-produced work piece using a measuring X-ray CT apparatus, which is configured to emit X-rays while rotating a work piece that is arranged on a rotary table and to reconstruct a projection image thereof to generate volume data of the work piece, the present invention assigns values to volume data for a predetermined work piece and stores the same as master data; obtains volume data for a mass-produced work piece under identical conditions to the predetermined work piece; measures the volume data and obtains an X-ray CT measured value for the mass-produced work piece; and corrects the X-ray CT measured value for the mass-produced work piece using the master data.

A charged particle beam device includes: a movement mechanism configured to hold and move a sample; a charged particle source configured to emit charged particles with which the sample is irradiated to obtain an image of the sample; and a control unit configured to control the movement mechanism to move the sample and to obtain the image of the sample. The control unit obtains a reference image of the sample in a reference arrangement state by the charged particles, generates a goal image of the sample in a target arrangement state different from the reference arrangement state by calculation from the reference image, moves the sample to each of different arrangement states by the movement mechanism, obtains a candidate image of the sample in each of the different arrangement states by the charged particles, and generates a comparison result between respective candidate images and the goal image.

Methods and devices are disclosed for the tomographic imaging of a biological sample from almost all rotational perspectives in three-dimensional space and with multiple imaging modalities. A biological sample is positioned on an imaging stage that is capable of nearly full 360-degree rotation in at least one of two substantially orthogonal axes. Positioned about the stage is an X-ray imaging module enabling the recording of a series of images. A reflected light imaging module can also be positioned about the stage to enable recording of black and white or color white light images. A computer can use the images to construct three-dimensional models of the sample and to render images of the sample conveying information from one or more imaging channels.

A method and a related apparatus for performing a tomographic examination of an object (2) which advances through an examination area (6), wherein the examination area (6) is irradiated with x-rays transversally to a motion trajectory of the object (2) and the residual intensity of the x-rays which have crossed the object (2) is repeatedly detected to obtain, for each detection, an electronic two-dimensional pixel map, the two-dimensional maps thus obtained being processed by a computer to obtain a three-dimensional tomographic reconstruction of the object (2); wherein, during the advancement, the object (2) is made or let rotate, at least partly uncontrolled, in such a way that the object (2) rotates around one or more rotation axes which are transversal both to the motion trajectory and to the propagation directions of the x-rays crossing it; and wherein a computer also determines the spatial position in which the object (2) is located relative to the one or more emitters (4) and/or the one or more detectors (5) at the instant when each two-dimensional map is detected, and factors this in the tomographic reconstruction.

The present disclosure relates to X-ray imaging systems and methods. An exemplary system may comprise a distributed X-ray source arrangement, a fixed grating module, an X-ray detecting device, and a computer workstation. In one illustrative implementation, X-ray sources of the distributed incoherent X-ray source arrangement may sequentially generate and emit X-rays to an object to be detected. Further, for each exposure, the X-ray detecting device may receive the X-rays, wherein after a series of stepping exposures and corresponding data acquisitions, at each pixel of the X-ray detecting device, X-ray intensities are represented as an intensity curve; the intensity curve may be compared to an intensity curve in the absence of the object to be detected, and a pixel value at each pixel may be obtained from a variation of the intensity curves; and image information of the object to be detected may be obtained according to such pixel values.

A method including inspecting, using an X-ray transmission image, internal defects in a TSV formed in a semiconductor wafer, and detecting the X-rays, and processing an X-ray transmission image. Therein, the detection of X-rays is configured such that: the detection azimuth of the X-rays, and the detection elevation angle of the X-rays relative to the X-ray source are determined on the basis of information on the arrangement interval, depth, and planar shape of structures formed in the sample. The angle of rotation of a rotating stage on which the sample is mounted is adjusted in accordance with the detection azimuth which has been determined, and the X-rays that have been transmitted through the sample are detected with the position of the detector set to the detection elevation angle which has been determined.

This disclosure presents systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro- or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using an arrayed x-ray source or a set of Talbot interference fringes.

A specimen radiography system may include a controller and a cabinet. The cabinet may include an x-ray source, an x-ray detector, and a specimen drawer disposed between the x-ray source and the x-ray detector. The specimen drawer may be automatically positionable along a vertical axis between the x-ray source and the x-ray detector.

An X-ray diffraction method measures crystallite size distribution in a polycrystalline sample using an X-ray diffractometer with a two-dimensional detector. The diffraction pattern collected contains several spotty diffraction rings. The spottiness of the diffraction rings is related to the size, size distribution and orientation distribution of the crystallites as well as the diffractometer condition. The invention allows obtaining of the diffraction intensities of all measured crystallites at perfect Bragg condition so that the crystallite size distribution can be measured based on the 2D diffraction patterns.