A system and a method use x-ray fluorescence to analyze a specimen by illuminating a specimen with an incident x-ray beam having a near-grazing incident angle relative to a surface of the specimen and while the specimen has different rotational orientations relative to the incident x-ray beam. Fluorescence x-rays generated by the specimen in response to the incident x-ray beam are collected while the specimen has the different rotational orientations.

In order to sufficiently capture spatial distortion specific to an X-ray CT device and evaluate the three-dimensional shape measurement accuracy of the X-ray CT device, in a utensil, by attaching support rods fixing spheres to the tip thereof and having different lengths to a base spheres are arranged in an XYZ space on the base. On a flat surface on the top of the base, the support rods supporting the spheres and having different lengths are arranged at predetermined intervals. In doing so, the spheres are arranged in the XYZ space respectively at appropriate inter-sphere distances.

A specimen radiography system may include a controller and a cabinet. The cabinet may include an x-ray source, an x-ray detector, and a specimen drawer disposed between the x-ray source and the x-ray detector. The specimen drawer may be automatically positionable along a vertical axis between the x-ray source and the x-ray detector.

A method of detecting an anomaly in a crystallographic structure, the method comprising: illuminating the structure with x-ray radiation in a known direction relative to the crystallographic orientation; positioning the structure such that its crystallographic orientation is known; detecting a pattern of the diffracted x-ray radiation transmitted through the structure; generating the simulated pattern based on the known direction relative to the crystallographic orientation; comparing the detected pattern to a simulated pattern for x-ray radiation illuminating in the known direction; and, detecting the anomaly in the crystallographic structure based on the comparison.

An X-ray inspection device of the present invention includes a sample placement unit 11 for placing a sample as an inspection target therein, a sample placement unit positioning mechanism 30 for moving the sample placement unit 11, a goniometer 20 including first and second rotation members 22, 23 that rotate independently of each other, an X-ray irradiation unit 40 installed on the first rotation member 22, and a two-dimensional X-ray detector 50 installed on the second rotation member 23. The sample placement unit positioning mechanism 30 includes a χ rotation mechanism 35 for rotating the sample placement unit 11 and a ϕ-axis about a χ-axis that is orthogonal to a θs-axis and a θd-axis at a measurement point P and extends horizontally.

Techniques are disclosed for identifying and reducing pixel-specific image distortion of an x-ray detector. In one example, an x-ray detector obtains, for various calibration positions, two-dimensional (2D) images of a calibration object. The calibration object comprises reference points that comprise spatial characteristics. Processing circuitry computes an image distortion field across a plurality of pixels of the x-ray detector based on imaged characteristics of the reference points in each of the 2D images, the spatial characteristics of the reference points, and the calibration positions. The processing circuitry computes, based on the computed image distortion field, a correction transform for correcting image distortion across the x-ray detector. The processing circuitry applies the correction field to a preliminary image obtained by the x-ray detector to obtain a corrected image exhibiting reduced pixel-specific image distortion.

An X-ray transmission inspection apparatus includes an X-ray source for irradiating a sample with X-rays, a two-dimensional sensor for detecting transmission X-rays passing through the sample, a sample moving mechanism for moving the sample, a calculation unit for processing an image of the transmission X-rays detected by the two-dimensional sensor, and a display unit for displaying a cross-sectional image. When V1 is a speed at which the sample moves, F is a frame rate of the two-dimensional sensor, A is a sample pitch of the two-dimensional sensor, and LS is a distance between the X-ray source and the two-dimensional sensor, the calculation unit creates a cross-sectional image taken at a distance L from the X-ray source by adding the images of the pixels positioned at an interval of [(LS×V2)/(L×F×A)] in a direction in which the sample moves.

Systems and methods for non-destructive testing by computed tomography are provided. The system can include a stationary radiation source, a stage, and a plurality of stationary radiation detectors. The source can be configured to emit, from a focal point, a beam of penetrating radiation having a three-dimensional geometry and to direct the beam in a path incident upon a target. The stationary radiation source can be positioned with respect to the plurality of stationary radiation detectors and the stage such that, a first plurality of beam segment paths is defined between the focal point and respective sensing faces of the plurality of radiation detectors and at least one second beam segment path is defined between the focal point and a predetermined gap.

The invention relates to a method for dimensional measurement by way of X-ray computed tomography, featuring the steps (a) Irradiating a test object (26) with non-monochromatic X-ray radiation from a virtually punctiform X-ray source (12), (b) measuring the intensity (I) of the X-ray radiation (22) in the radiation path behind the test object (26) by means of a detector (14) which has a plurality of pixels (P) to obtain pixel-dependent intensity data (I(P)), and (c) calculating at least one dimension (H) of the test object (26) using the pixel-dependent intensity data (I(P)). According to the invention, the pixel-dependent intensity data (I(P)) is corrected by the influence of an effective penetration depth (τ) on the detector and/or a displacement of the effective source location (Q) on a target (20) of the X-ray source (12).

A system for computed tomography inspection can include a stage, a stationary radiation source, a stationary radiation detector, and a controller. The stage can secure a target thereon and rotate about a rotation axis. The radiation source can emit a beam of penetrating radiation from a focal point that is directed upon a portion of the target. The radiation detector can include a sensing face configured to acquire measurements of radiation beam intensity incident thereon as a function of position. The controller can command the stage to translate from a first position to a second position in a direction transverse to a central axis of the radiation beam. A magnification of the target at the first and second positions can be approximately equal. The stage does not translate transverse to the central axis of the radiation beam during measurement of the radiation beam intensity by the detector.