A method for the X-ray inspection of products of a predefined product type including at least one first and one second component having different absorption coefficients for X-radiation. X-radiation with a spectral range is transmitted through the product to be examined. The X-radiation that has passed through the product is detected by means of a spectrally resolving X-ray detector. The X-ray detector assigns the X-ray quanta to a number of energy channels and generates image data which for each pixel include spectral values for selected or all energy channels and/or total spectral values for one or more groups of adjacent energy channels. At least on mapping rule is used to process the image data to form a total image, where each mapping rule is designed such that spectral values or total spectral values are mapped onto a total image value of an image point.

A method for performing inspection of a manufactured article. The method comprises acquiring a sequence of radiographic images of the article; determining a position of the article for each one of the acquired radiographic images; and performing a three-dimensional model correction loop which comprises, iteratively: generating a simulated radiographic image for each determined position of the article; and comparing the simulated radiographic images and the acquired radiographic images and generating a match result. If the match result is indicative of a mismatch, the method includes identifying and characterizing differences between the simulated radiographic images and the acquired radiographic images; correcting one of a geometry and a material density of a region of interest of the detailed three-dimensional model of the article based on each one of the identified and characterized differences; and performing a new iteration. A system for performing inspection is also provided.

A novel in-line X-ray CT imaging apparatus is presented. The X-ray CT imaging apparatus comprises one or a plurality of X-ray sources, one or a plurality of one-piece curved X-ray detectors, a rotational gantry, a translational stage, a computer that is loaded with data acquisition system and CT imaging software. The one-piece curved detector is truly one entity with capability of forming a native curved geometry with pre-determined radius. The detector would have the same or similar electronics to that of a conventional rigid X-ray flat panel that includes a photon conversion phosphorus layer configured to generate light photons in response to radiation. Both X-ray source and detector are mounted on a rotation gantry. X-ray CT 3D image projection data can be acquired while the gantry is rotating and object on the stage is moving translational simultaneously. Using CT software, image reconstruction can be performed at the computer.

The X-ray inspection device includes a radiation source that irradiates X-rays toward a specimen that is rotated; a detector that detects transmitted X-rays irradiated by the radiation source, and passed through the specimen, and output a plurality of detection data for each angle of rotation; and a region extracting unit that extracts a region where the specimen is projected onto the detector, using the plurality of detection data.

An inspection device includes a ray source that irradiates an object to be inspected with energy rays, a detection unit that detects energy rays that have passed through the object to be inspected, a displacement mechanism that sets a relative position of the object to be inspected and the ray source by displacing at least one of the object to be inspected and the ray source in relation to the other, an internal image generation unit that generates an internal image of the object to be inspected based on a detection amount distribution of the energy rays detected by the detection unit, and a control unit that controls the displacement mechanism based on the detection amount distribution of the energy rays detected by the detection unit.

An electron diffraction imaging system for imaging the three-dimensional structure of a single target molecule of a sample uses an electron source that emits a beam of electrons toward the sample, and a two-dimensional detector that detects electrons diffracted by the sample and generates an output indicative of their spatial distribution. A sample support is transparent to electrons in a region in which the sample is located, and is rotatable and translatable in at least two perpendicular directions. The electron beam has an operating energy between 5 keV and 30 keV, and beam optics block highly divergent electrons to limit the beam diameter to no more than three times the size of the sample molecule and provide a lateral coherence length of at least 15 nm. An adjustment system adjusts the sample support position in response to the detector output to center the target molecule in the beam.

In a method of detecting a defect, a region of a substrate may be primarily scanned using a first electron beam to detect a first defect. A remaining region of the substrate, which may be defined by excluding a portion in which the first defect may be positioned from the region of the substrate, may be secondarily scanned using a second electron beam to detect a second defect. Thus, the portion with the defect may not be scanned in a following scan process so that a scanning time may be remarkably decreased.

A test device for the irradiation of products which are fed into a housing along at least two tracks. At least one separate sensor is provided for each track in order to separately monitor the arrival at a target position selected individually for each track preferably within the housing of the test device.

An imaging system that is configured to automatically obtain and provide two and three-dimensional digital images of various types of objects (e.g., tissue specimens, animals, electrical devices, etc.) for use in analysis thereof in a manner free of manual repositioning of the objects between images and free of movement of an electromagnetic radiation source and detector within or relative to a cabinet housing of the system.

A method of operating a charged particle beam device is disclosed, including passing each of a plurality of beamlets through a deflector and a scanner, in that order. Each of the beamlets is focused with an objective lens on a sample to form a plurality of focal spots, forming an array. A first beamlet is focused on a first spot and a second beamlet is focused on a second spot. In a centered configuration of the device, each of the plurality of beamlets is directed by the deflector toward a coma free point. In a beamlet-displaced configuration of the device, the scanner is scanned such that the first beamlet passes through an acceptable aberrations point, the first beamlet scanning a displaced first field of view; and the first spot is displaced from the regular first focal spot to a displaced first focal spot.