A vibrating device includes: a base body containing mobile ions; a movable member disposed facing and spaced apart from the base body; and a conductor section disposed so as to cover at least a portion of the movable member. A first voltage whose potential periodically changes based on a reference potential is applied to the movable member. A second voltage that is at the reference potential when time-averaged is applied to the conductor section. The second voltage is constant at the reference potential.

A magnetic tunnel junction (MTJ) based sensor device includes a MTJ element and processing circuitry. The MTJ element includes a free layer, a pinned layer, and a tunnel barrier, the tunnel barrier being arranged between the free layer and the pinned layer. The free layer is adapted to flex away from the tunnel barrier during acceleration. The processing circuitry is configured to measure a resistance at the MTJ element and determine acceleration based on the resistance at the MTJ element.

A magnetic tunnel junction (MTJ) based sensor device includes a MTJ element and processing circuitry. The MTJ element includes a free layer, a pinned layer, and a tunnel barrier, the tunnel barrier being arranged between the free layer and the pinned layer. The free layer is adapted to flex away from the tunnel barrier during acceleration. The processing circuitry is configured to measure a resistance at the MTJ element and determine acceleration based on the resistance at the MTJ element.

The design and fabrication of a multi-axis capacitive accelerometer is presented with sub-g resolution based on CMOS-compatible fabrication technology that can provide large proof-mass, high-aspect ratio and a large sense electrode area within a smaller footprint that previous accelerometers. In some instances, the device footprint can be reduced by placing the sense electrodes near the top or bottom of the transducer structure such that motion of the transducer causes size of the sense gap to vary in a direction that is parallel with longitudinal axis of the support beam for the transducer structure. An extra mass can also be added to the top of the transducer structure to increase sensitivity.

A vibrating device includes: a base body containing mobile ions; a movable member disposed facing and spaced apart from the base body; and a conductor section disposed so as to cover at least a portion of the movable member. A first voltage whose potential periodically changes based on a reference potential is applied to the movable member. A second voltage that is at the reference potential when time-averaged is applied to the conductor section. The second voltage is constant at the reference potential.

The design and fabrication of a multi-axis capacitive accelerometer is presented with sub-g resolution based on CMOS-compatible fabrication technology that can provide large proof-mass, high-aspect ratio and a large sense electrode area within a smaller footprint that previous accelerometers. In some instances, the device footprint can be reduced by placing the sense electrodes near the top or bottom of the transducer structure such that motion of the transducer causes size of the sense gap to vary in a direction that is parallel with longitudinal axis of the support beam for the transducer structure. An extra mass can also be added to the top of the transducer structure to increase sensitivity.

A tunneling accelerometer that can be implemented as a MEMS micro sensor provides differential sensing that minimizes large forces resulting from undesired environmental effects. Used as a seismic sensor, for example, the accelerometer exhibits maximum sensitivity for small seismic waves and suppresses very large seismic activities occurring at shallower depths. In one embodiment, detected current decreases from its maximum for stronger forces and is maximized for small vibrations. In another embodiment, separation of columns of top and bottom tunneling tip pairs, one column from the next, increases gradually so that the tunneling accelerometer suppresses sensitivity to large accelerations such as large seismic activity. A manufacturing process for the accelerometer provides reduced complexity for better yield.