The invention provides a resonant sensor comprising: a substrate; one or more proof masses suspended from the substrate to allow for movement of the one or more proof masses along a sensitive axis; a first resonant element having a first end and a second end, the first resonant element extending between the first end and the second end along the sensitive axis, wherein the first end is connected to the one or more proof masses through a non-inverting lever and the second end is connected to the one or more proof masses through an inverting lever; and an electrode assembly positioned adjacent to the first resonant element. A resonant sensor in accordance the invention comprises a resonant element that is suspended between two proof masses or between two portions of a single proof mass, and so is not connected directly to the substrate. This isolates the resonant element from thermal stress that might otherwise be transferred from the substrate.

The invention provides a resonant sensor comprising: a substrate; one or more proof masses suspended from the substrate to allow for movement of the one or more proof masses along a sensitive axis; a first resonant element having a first end and a second end, the first resonant element extending between the first end and the second end along the sensitive axis, wherein the first end is connected to the one or more proof masses through a non-inverting lever and the second end is connected to the one or more proof masses through an inverting lever; and an electrode assembly positioned adjacent to the first resonant element. A resonant sensor in accordance the invention comprises a resonant element that is suspended between two proof masses or between two portions of a single proof mass, and so is not connected directly to the substrate. This isolates the resonant element from thermal stress that might otherwise be transferred from the substrate.

A resonant sensor including a support, a proof body suspended from the support and having a resonant frequency ωa, means for measuring a force including at least one resonator of resonant frequency ω.sub.rn, said force being applied by the proof body, and a mechanical decoupling structure interposed between the proof body and the resonator, said decoupling structure including a decoupling mass, a first connecting element between the decoupling mass and the proof body, a second connecting element between the decoupling mass and the resonator, the decoupling structure having a main vibration mode whose resonant frequency ω.sub.d is such that ωa <ω.sub.d< ω.sub.rn, said decoupling structure forming a mechanical low-pass filter between the proof body and the resonator.

FIG. 1

A resonant sensor including a support, a proof body suspended from the support and having a resonant frequency ωa, means for measuring a force including at least one resonator of resonant frequency ω.sub.rn, said force being applied by the proof body, and a mechanical decoupling structure interposed between the proof body and the resonator, said decoupling structure including a decoupling mass, a first connecting element between the decoupling mass and the proof body, a second connecting element between the decoupling mass and the resonator, the decoupling structure having a main vibration mode whose resonant frequency ω.sub.d is such that ωa <ω.sub.d< ω.sub.rn, said decoupling structure forming a mechanical low-pass filter between the proof body and the resonator.

FIG. 1

A high precision rotation sensor comprises an inertial mass suspended from a base wherein the mass is responsive to rotational inputs that apply loads to load-sensitive resonators whose changes in resonant frequency are related to the applied loads.

A high precision rotation sensor comprises an inertial mass suspended from a base wherein the mass is responsive to rotational inputs that apply loads to load-sensitive resonators whose changes in resonant frequency are related to the applied loads.

Provided is an accelerometer. The accelerometer includes a frame portion with an opening formed inside, a central portion disposed in the opening, a connecting portion disposed on an upper surface and a lower surface of the central portion and connecting the frame portion and the central portion, and a sensing portion that converts a sensed acceleration into an electrical signal, and the accelerometer senses an acceleration in a Z-axis direction penetrating an upper surface and a lower surface of the central portion, and reduces a sensing of an acceleration in an X-axis direction and a Y-axis direction crossing the Z-axis direction.

According to one embodiment, a sensor a sensor includes a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion. The first movable portion includes first and second movable base portions, a connecting base portion, first and second movable beams, and first and second movable conductive portions. The first movable beam includes a first beam end portion, a first beam other end portion, and a first beam intermediate portion. The second movable beam includes a second beam end portion, a second beam other end portion, and a second beam intermediate portion. The first movable conductive portion includes a first crossing conductive portion, a first extending conductive portion, and a first other extending conductive portion. The second movable conductive portion includes a second crossing conductive portion, a second extending conductive portion, and a second other extending conductive portion.

According to one embodiment, a sensor a sensor includes a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion. The first movable portion includes first and second movable base portions, a connecting base portion, first and second movable beams, and first and second movable conductive portions. The first movable beam includes a first beam end portion, a first beam other end portion, and a first beam intermediate portion. The second movable beam includes a second beam end portion, a second beam other end portion, and a second beam intermediate portion. The first movable conductive portion includes a first crossing conductive portion, a first extending conductive portion, and a first other extending conductive portion. The second movable conductive portion includes a second crossing conductive portion, a second extending conductive portion, and a second other extending conductive portion.

This disclosure is related to devices, systems, and techniques for determining an acceleration. For example, an accelerometer system includes a resonator and a light-emitting device configured to generate, based on an error signal, an optical signal. Additionally, the accelerometer includes a modulator configured to receive the optical signal, generate a modulated optical signal responsive to receiving the optical signal, and output the modulated optical signal to the resonator. A photoreceiver receives a passed optical signal from the resonator, where the passed optical signal indicates a resonance frequency of the resonator. Additionally, the photoreceiver receives a reflected optical signal from the resonator. The photoreceiver generates one or more electrical signals based on the passed optical signal and the reflected optical signal. Processing circuitry generates the error signal and determines the acceleration based on the one or more electrical signals.