Resonator measurement system having at least MEMS and/or NEMS, comprising: an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr and at least one optical element whose optical index is sensitive to the displacement of the resonating element, excitation circuitry of exciting the resonating element at least at one operating frequency of fm, injection device for injecting a light beam whose intensity is modulated at frequency f1=fm+Δf in the optomechanical device, a photodetection device configured measure the intensity of a light beam coming out of the optomechanical device, the intensity of the measurement beam having at least one component at frequency Δf.

An inertial sensor not susceptible to temperature change and vibration disturbance in an implementation environment of the inertial sensor is provided. In the present invention, for example, as illustrated in FIG. 9, an extending portion EXU is provided so as to connect to a fixing portion FU3, this extending portion EXU and a third region P3 which configures part of a mass body MS are connected via a support beam BM3 and a support beam BM4, and the support beam BM3 and the support beam BM4 are disposed oppositely with respect to a virtual line IL1. With this, natural frequency of an unwanted mode due to rotation and torsion of the mass body MS can be shifted to a high frequency band.

An inertial sensor not susceptible to temperature change and vibration disturbance in an implementation environment of the inertial sensor is provided. In the present invention, for example, as illustrated in FIG. 9, an extending portion EXU is provided so as to connect to a fixing portion FU3, this extending portion EXU and a third region P3 which configures part of a mass body MS are connected via a support beam BM3 and a support beam BM4, and the support beam BM3 and the support beam BM4 are disposed oppositely with respect to a virtual line IL1. With this, natural frequency of an unwanted mode due to rotation and torsion of the mass body MS can be shifted to a high frequency band.

This disclosure is related to devices, systems, and techniques for determining an acceleration. For example, an accelerometer system includes a resonator and a light-emitting device configured to generate, based on an error signal, an optical signal. Additionally, the accelerometer includes a modulator configured to receive the optical signal, generate a modulated optical signal responsive to receiving the optical signal, and output the modulated optical signal to the resonator. A photoreceiver receives a passed optical signal from the resonator, where the passed optical signal indicates a resonance frequency of the resonator. Additionally, the photoreceiver receives a reflected optical signal from the resonator. The photoreceiver generates one or more electrical signals based on the passed optical signal and the reflected optical signal. Processing circuitry generates the error signal and determines the acceleration based on the one or more electrical signals.

This disclosure is related to devices, systems, and techniques for determining an acceleration. For example, an accelerometer system includes a resonator and a light-emitting device configured to generate, based on an error signal, an optical signal. Additionally, the accelerometer includes a modulator configured to receive the optical signal, generate a modulated optical signal responsive to receiving the optical signal, and output the modulated optical signal to the resonator. A photoreceiver receives a passed optical signal from the resonator, where the passed optical signal indicates a resonance frequency of the resonator. Additionally, the photoreceiver receives a reflected optical signal from the resonator. The photoreceiver generates one or more electrical signals based on the passed optical signal and the reflected optical signal. Processing circuitry generates the error signal and determines the acceleration based on the one or more electrical signals.

The present invention relates to a device which can measure, induce, and correct perturbations acting on an electromagnetic (EM) propagation source. Piezoelectric transducers are used to measure and control perturbations within a system to improve operation of an EM source. Perturbation measurements can be used to determine the environmental and system impacts on the EM source. Moreover, measurements can be used to correct or nullify perturbations applied to the EM source, through active or passive means.

The present invention relates to a device which can measure, induce, and correct perturbations acting on an electromagnetic (EM) propagation source. Piezoelectric transducers are used to measure and control perturbations within a system to improve operation of an EM source. Perturbation measurements can be used to determine the environmental and system impacts on the EM source. Moreover, measurements can be used to correct or nullify perturbations applied to the EM source, through active or passive means.

Magnet placement is described for integrated circuit packages. In one example, a terminal is applied to a magnet. The magnet is then placed on a top layer of a substrate with solder between the terminal and the top layer, and the solder is reflowed to attach the magnet to the substrate.

Magnet placement is described for integrated circuit packages. In one example, a terminal is applied to a magnet. The magnet is then placed on a top layer of a substrate with solder between the terminal and the top layer, and the solder is reflowed to attach the magnet to the substrate.

A method of making a resonating beam accelerometer (RBA). In an example process, a proof mass device and resonators are created from a quartz material. A direct bond is formed between the proof mass and the resonators by applying a predefined amount of pressure at a predefined temperature for a predefined amount of time. One or more damping plates are created from a quartz material. A direct bond is formed between the damping plates and the proof mass device. The proof mass device is created by applying a predefined amount of pressure at pressure at temperature to two bases, two proof mass portions, and a flexure. The proof mass bases are on opposite sides of the flexure. The proof mass portions are on opposite sides of the flexure. A gap is present between the proof mass bases and the proof mass portions.