This accelerometer (100) includes a substrate (30) and a bonding member (90) that bonds the substrate (30) and a supporting member (50) to each other, and the bonding member (90) is arranged in a region (R3) that straddles a first region (R1) in which a first sensor element (11) is arranged and a second region (R2) in which a second sensor element (12) is arranged in a plan view.

This accelerometer (100) includes a substrate (30) and a bonding member (90) that bonds the substrate (30) and a supporting member (50) to each other, and the bonding member (90) is arranged in a region (R3) that straddles a first region (R1) in which a first sensor element (11) is arranged and a second region (R2) in which a second sensor element (12) is arranged in a plan view.

A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.

A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.

According to one aspect of the present disclosure, a device and technique for impact detection includes a housing and switch circuitry having an omega-shaped switch element. A passive radio-frequency identification (RFID) module is coupled to the switch circuitry and is configured to detect a state of a circuit condition of the switch circuitry. A mass member is movable within the housing from a first position to a second position in response to receipt by the housing of an acceleration event. Movement of the mass member to the second position causes the mass member to move the switch element to change the state of the circuit condition of the switch circuitry.

According to one aspect of the present disclosure, a device and technique for impact detection includes a housing and switch circuitry having an omega-shaped switch element. A passive radio-frequency identification (RFID) module is coupled to the switch circuitry and is configured to detect a state of a circuit condition of the switch circuitry. A mass member is movable within the housing from a first position to a second position in response to receipt by the housing of an acceleration event. Movement of the mass member to the second position causes the mass member to move the switch element to change the state of the circuit condition of the switch circuitry.

An accelerometer comprising a plurality of proof-masses moveable along a measurement axis; a respective spring rigidly attached to each proof-mass, configured to exert an elastic recall on the proof-mass in the measurement axis; and a fixed stop associated with each proof-mass, arranged to intercept the proof-mass when the acceleration in the measurement axis increases by a step. The proof-masses are suspended in series with respect to one another by springs in the measurement axis, the stops being arranged to successively intercept the respective proof-masses for increasing thresholds of acceleration.

An accelerometer comprising a plurality of proof-masses moveable along a measurement axis; a respective spring rigidly attached to each proof-mass, configured to exert an elastic recall on the proof-mass in the measurement axis; and a fixed stop associated with each proof-mass, arranged to intercept the proof-mass when the acceleration in the measurement axis increases by a step. The proof-masses are suspended in series with respect to one another by springs in the measurement axis, the stops being arranged to successively intercept the respective proof-masses for increasing thresholds of acceleration.

According to one aspect of the present disclosure, a device and technique for impact detection includes a housing and switch circuitry having an omega-shaped switch element. A passive radio-frequency identification (RFID) module is coupled to the switch circuitry and is configured to detect a state of a circuit condition of the switch circuitry. A mass member is movable within the housing from a first position to a second position in response to receipt by the housing of an acceleration event. Movement of the mass member to the second position causes the mass member to move the switch element to change the state of the circuit condition of the switch circuitry.

According to one aspect of the present disclosure, a device and technique for impact detection includes a housing and switch circuitry having an omega-shaped switch element. A passive radio-frequency identification (RFID) module is coupled to the switch circuitry and is configured to detect a state of a circuit condition of the switch circuitry. A mass member is movable within the housing from a first position to a second position in response to receipt by the housing of an acceleration event. Movement of the mass member to the second position causes the mass member to move the switch element to change the state of the circuit condition of the switch circuitry.