Provided is a composite metal-wide-bandgap semiconductor tip for scanning tunneling microscopy and/or scanning, tunneling lithography, a method of forming, and a method for using the composite metal-wide-bandgap semiconductor tip.

Electrically conductive columns of intertwined carbon nanotubes embedded in a mass of material flexible, resilient electrically insulating material can be used as electrically conductive contact probes. The columns can extend between opposing sides of the mass of material. Terminals of a wiring substrate can extend into the columns and be electrically connected to an electrical interface to a tester that controls testing of a device under test. A pair of physically interlocked structures can coupling the mass of material to the wiring substrate. The pair can include a receptacle and a protrusion.

Provided is a conical nano-carbon material functionalized needle tip, formed by assembling a nano-carbon material with a material of a needle tip by means of a covalent bond; and the material of the needle tip is a metal selected from one or more of tungsten, iron, cobalt, nickel and titanium. Further provided is a method for preparing the conical nano-carbon material functionalized needle tip. The conical nano-material functionalized needle tip has an outstanding interface formed by metal-carbide covalent bonds, and the orientation of the conical nano-material is matched with the axial direction of the metal needle tip (illustrated in FIG. 6). The proposed preparation method affords a robust interface and avoids the potential pollution to the nano-material caused during the deposition of fixing materials, such as carbon or platinum or the like, in other preparation methods.

Provided is a conical nano-carbon material functionalized needle tip, formed by assembling a nano-carbon material with a material of a needle tip by means of a covalent bond; and the material of the needle tip is a metal selected from one or more of tungsten, iron, cobalt, nickel and titanium. Further provided is a method for preparing the conical nano-carbon material functionalized needle tip. The conical nano-material functionalized needle tip has an outstanding interface formed by metal-carbide covalent bonds, and the orientation of the conical nano-material is matched with the axial direction of the metal needle tip (illustrated in FIG. 6). The proposed preparation method affords a robust interface and avoids the potential pollution to the nano-material caused during the deposition of fixing materials, such as carbon or platinum or the like, in other preparation methods.

The present invention provides a cantilever for a scanning type probe microscope, the cantilever including a support portion, a lever portion extending from the support portion, a protrusion portion formed on a free end side of the lever portion, an apex angle of the protrusion portion being an acute angle, and a probe in which a fine wire formed at a distal end of the protrusion portion is coated with a functional film, and a major axis/minor axis ratio of a cross-sectional shape of the probe is smaller than a major axis/minor axis ratio of a cross-sectional shape of the fine wire.

The present invention provides a cantilever for a scanning type probe microscope, the cantilever including a support portion, a lever portion extending from the support portion, a protrusion portion formed on a free end side of the lever portion, an apex angle of the protrusion portion being an acute angle, and a probe in which a fine wire formed at a distal end of the protrusion portion is coated with a functional film, and a major axis/minor axis ratio of a cross-sectional shape of the probe is smaller than a major axis/minor axis ratio of a cross-sectional shape of the fine wire.

A carbon nanotube or similar structure is used as the final end tip structure in a Scanning Probe Microscope to measure, modify or identify material and reentrant structures in typical recesses or very small recesses. Further the nanotube or similar structure is acoustically driven such that its locus of motion forms a dynamic reentrant probe. The nanotube is calibrated by known vertical or reentrant structures.

A carbon nanotube or similar structure is used as the final end tip structure in a Scanning Probe Microscope to measure, modify or identify material and reentrant structures in typical recesses or very small recesses. Further the nanotube or similar structure is acoustically driven such that its locus of motion forms a dynamic reentrant probe. The nanotube is calibrated by known vertical or reentrant structures.

A cantilever used in a scanning probe microscope includes a supporting section, a lever section, and a protrusion section, which is a probe. A crystalline carbon composite layer including a crystalline carbon nanomaterial and a metal material, a melting point of which is 420 C. or lower, is deposited on a distal end portion of the protrusion section.

A cantilever used in a scanning probe microscope includes a supporting section, a lever section, and a protrusion section, which is a probe. A crystalline carbon composite layer including a crystalline carbon nanomaterial and a metal material, a melting point of which is 420 C. or lower, is deposited on a distal end portion of the protrusion section.