A probe test card includes a substrate, a plurality of test needles, and a fixing layer. The substrate includes a trench formed at a surface of the substrate. Each of the test needles includes a first end positioned in the trench and a second end, opposite to the first end, protruding from the trench. The fixing layer is formed in the trench to fix the test needles to the trench. The fixing layer includes a resin layer having a ceramic powder.

Proposed are a probe head and a probe card having the same. The probe head includes: an upper guide plate having an upper guide hole; a lower guide plate having a lower guide hole; an intermediate guide plate having an intermediate guide hole, and provided between the upper guide plate and the lower guide plate; and a guide member provided at a side of the intermediate guide plate, wherein the intermediate guide plate is limited in movement by the guide member.

A sheet connector according to the present invention has: a first insulating layer having a first surface positioned on one side in the thickness direction, a second surface positioned on the other side, and a plurality of first through-holes passing through between the first surface and the second surface; and a plurality of first conductive layers arranged on the inner wall surfaces of the first through-holes. First ends of the first conductive layers on the first surface side project from the first surface.

A jig (30) includes a first block portion (100) at which a probe head (300) is installed, and a first suction port (112) formed on the first block portion (100). Air present on a side where one end of a probe (330) provided in the probe head (300) is located is sucked from the first suction port (112).

A spring connector includes: a conductive tube; a movable pin that has a tip end portion protruding from an opening of the tube along an axial direction of the tube; a movable body that is provided inside the tube and that has one end portion in contact with a rear end portion of the movable pin; and a spring that is provided inside the tube and that is configured to urge another end portion of the movable body in a direction in which the movable pin protrudes. The other end portion of the movable body is an inclined surface inclined with respect to the axial direction, and at least one of the one end portion of the movable body and the rear end portion of the movable pin includes a convex portion.

The disclosure relates to a method of fabricating a test socket that supports a probe stretchable in a longitudinal direction. The method of fabricating a test socket includes forming a probe hole for accommodating the probe in a base member made of a conductive material, filling the probe hole with a resin as an insulating material to a predetermined depth from an upper surface of the base member to form a probe support member; and forming a first support hole for supporting one end portion of the probe in the probe support member in the probe hole to expose the one end portion of the probe.

High voltage assemblies and detectors are provided. In one aspect, a high voltage assembly includes a high voltage base board and a plurality of sub-detectors. Each sub-detector includes a crystal substrate, a crystal, a high voltage transfer board, and a high voltage cathode board. One of the high voltage transfer board and the high voltage base board includes first and second connection members, and the other one includes first and second contact members. The first connection member is configured to shift relative to the first contact member in response to a first force, and the second connection member is configured to shift relative to the second contact member in response to a second force. A high voltage is applied at both ends of the crystal through electrically contacting the first connection member with the first contact member and electrically contacting the second connection member with the second contact member.

A test apparatus includes a movable stage to support a sample, tips above the stage that have different shapes and alternately perform profiling and milling on the sample, a tip stage connected to a cantilever coupled to the tips, the tip stage to adjust a position of the cantilever, a position sensor to obtain information about a positional relationship between the tips and the sample, a stage controller to control movements of the stage and the tip stage, based on the information about the positional relationship, and a tip controller to select the tips for performing the profiling or milling and to determine conditions for performing milling, wherein a depth of the sample being processed by the milling in the first direction is controlled based on a relationship between a distance between the tips and the sample and a force between the tips and the sample.

The cylindrical member includes a cylindrical base material 40 made of beryllium copper, a first coating layer that is formed on the base material 40 and made of a Ni-based material and serves as a reinforcing material for the base material 40, and a second coating layer 42 that is formed on the first coating layers and made of a metal-based material different from the base material 40, wherein the first coating layer 41 has higher hardness than the base material 40, when the thickness of the base material 40 is represented by T.sub.B and the layer thickness of the first coating layer 41 formed on the outer surface is represented by T1.sub.OUT, the base material 40 is formed so as to satisfy 13 μm≤T.sub.B≤25 μm, and the first coating layer 41 is formed so as to satisfy T1.sub.OUT≥T.sub.B×4%.

An elastic probe element, an elastic probe assembly, and a testing device are provided. The testing device includes a substrate, a guiding member, and multiple ones of the elastic probe elements. The guiding member has a plurality of through holes for the multiple ones of the elastic probe elements correspondingly passing through. The elastic probe element includes a main body, a first contact segment, and a second contact segment that are integrally formed. The main body has a plurality of needle structures, and any two adjacent needle structures have a gap arranged therebetween. The needle structures are connected to each other through a first connection part and a second connection part arranged at a first end and a second end of the elastic probe element, respectively. The first contact segment is arranged at the first end. The second contact segment is arranged at the second end.