A capacitive voltage sensor assembly includes an electrode extending along a longitudinal axis, the electrode having a first end and a second end opposite the first end, and a tubular shield surrounding and spaced radially outward from a portion of the electrode. The tubular shield includes a plurality of through holes. The sensor assembly also includes a circular sensor element positioned radially inward of the tubular shield and including a first layer made of electrically conductive material and a second layer made of electrically insulating material. The circular sensor element includes a plurality of circumferentially spaced gaps.

An RF sensing apparatus configured for use with a plasma processing chamber includes a penetration unit opened in an up/down direction, a main return path unit surrounding all or a portion of the penetration unit, and a secondary return path unit located between the penetration unit and the main return path unit, spaced apart from the main return path unit, and surrounding all or a portion of the penetration unit. The main return path unit and the secondary return path unit include a path through which a current flows in one of the up/down directions.

A capacitive voltage sensor assembly includes a first electrode extending along a longitudinal axis, the first electrode including a first end and a second end opposite the first end, a second electrode surrounding the second end of the first electrode, the second electrode including a tubular portion having a first end and a second end opposite the first end, and a base portion coupled to the first end of the tubular portion, and a mass of dielectric insulating material at least partially encapsulating the first electrode and the second electrode. The tubular portion includes a plurality of cantilevered tabs interconnected at the first end of the second electrode. Each tab of the plurality of cantilevered tabs is circumferentially separated from an adjacent tab of the plurality of cantilevered tabs to define a gap therebetween at the second end of the second electrode.

A constructive system regarding a capacitance electric voltage sensor comprises a source electrode (110, 210), a shielding tubular body (120, 220), an electric field sensor (130, 230) and a mass of dielectric insulating material (140, 240). The electric field sensor (130, 230) comprises at least one first inner sheet (131, 231) and a second outer sheet (132, 232) superimposed and joined together, wherein said first inner sheet (131, 231) is made by means of a conductive metal material, wherein said second outer sheet (132, 232) is made by means of an electrically insulating material, and wherein said second outer sheet (132, 232) made of insulating material is constrained with respect to the inner face (124, 224) of the shielding tubular element (120, 220).

A system for voltage measurement of dielectric material in plasma includes a vacuum chamber. The system also includes an electrostatic receiver located outside of the vacuum chamber. The system also includes a conductive probe having a first terminus in contact with the dielectric material in the vacuum chamber and a second terminus in electrical communication with the electrostatic receiver. The system also includes a non-contact electrostatic voltmeter configured to measure a floating potential of the electrostatic receiver that corresponds to a dielectric potential of the dielectric material at a location in contact with the first terminus of the conductive probe.

An apparatus and method for managing an electrostatic charge of a workpiece are disclosed. The method includes coupling an electrostatic voltmeter to a conductor, coupling a charge-adjustment system to the conductor, and coupling the conductor to the workpiece. A level of charge in the workpiece is adjusted, via the conductor, with the charge-adjustment circuit and a voltage of the workpiece is monitored, via the conductor, with the electrostatic voltmeter. A controller may be used to adjust the charge on the workpiece based upon the monitored voltage.

A construction system regarding a capacitive voltage sensor, comprises a source electrode (110/210/310/410), a tubular body (120/220/320/420), and a mass of dielectric insulating material (140/240/340/440). The tubular body (120/220/320/420) comprises: a self-supporting tubular laminar element (123/223/323/423) made of insulating material, in which the self-supporting tubular laminar element (123/223/323/423) is stretched to form the support structure for said tubular body (120/220/320/420); a first thin layer (124/224/324/424) of conductive material applied to the outer surface of said self-supporting tubular laminar element (123/223/323/423) wherein said first thin layer (124/224/324/424) of conductive material is intended to perform the function of an electric screen; a second thin layer (125/225/325/425) of conductive material applied to the inner surface of said self-supporting tubular laminar element (123/223/323/423), wherein said second thin layer (125/225/325/425) of conductive material is designed to form an armature for a capacitive coupling.

One embodiment provides a technique of adjusting a gate voltage to be applied to at least one MOS capacitor and an amount of electric charges to be stored in the MOS capacitor so as to determine a sensitivity of a change in the amount of electric charges stored in the MOS capacitor, and exposing the MOS capacitor to an electric filed for a predetermined amount of time and then reading an electron inflow or outflow result due to the electric field so as to interpret the intensity and the direction of the electric field, thereby measuring the intensity and the direction of the electric field.

The invention relates to a device for measuring an electrical quantity of one phase of an AC electric current in an overhead electrical network, comprising: a sensor designed to be attached to an electric line of the network, the sensor including: an electrically conductive plate; an electrical conductor, designed to electrically connect the plate to the line, in order to circulate a first current from the line through the conductor; a processing unit, designed to determine the electrical quantity from value values of the first electric current and a value of a capacitance between the plate and ground. The device also comprises a generator, electrically connected to the conductor and designed to inject a second current through the conductor, the second current having a frequency other than the frequency of the first current, the processing unit also being designed to calculate the capacitance between the plate and ground as a function of the second current.

A device to measure the voltage at a test point, also referred to as a test point voltage sensor, comprises a housing formed from a first material and a second material, wherein the first material comprises an insulating material and the second material comprises a conductive or semiconductive material. The housing includes an opening configured to cover a test point of a cable accessory. The device further includes a pressure pad, disposed in the housing, having a conductive mating surface configured to contact a test point of the basic insulation plug or end plug. The device further includes a low side capacitor embedded in the housing and electrically coupled to the conductive mating surface. The device further includes a signal wire electrically coupled to the low side capacitor.