A capacitive detection device that may include at least one electrode of a capacitive sensor, an alternating voltage source, a device for measuring a complex value of impedance or admittance between the detection electrode and an electrical circuit reference point and a calibration resistor, and a switching device arranged so as to connect the voltage source to the electrode, in the measurement mode, and to connect the voltage source to the calibration resistor and disconnect the voltage source from the electrode, in the calibration mode. The measuring device is arranged so as to measure a first complex value of the calibration resistor, during operation in the calibration mode; to measure a second complex value between the electrode and the electrical circuit reference point during operation in measurement mode, and to correct the second measured complex value according to the first measured complex value.

An apparatus and a method for non-destructive inspection of quality of an electrostatic chuck are disclosed. The apparatus includes a measurement unit for measuring a first capacitance of a dielectric layer of the electrostatic chuck and for measuring a second capacitance of an electrode installed in the dielectric layer; and a control unit configured to evaluate quality of the electrode, based on the first capacitance and the second capacitance.

A micromechanical device that includes a carrier substrate; a sensor device that is situated on the carrier substrate and spaced apart from a surface section of the carrier substrate with the aid of spring elements in such a way that the sensor device is oscillatable relative to the surface section; and at least one stopper element, situated on the sensor device and/or on the surface section of the carrier substrate, which limits a deflection of the sensor device in the direction of the surface section.

A capacitive sensor including a substrate, detection and drive electrodes, and a controller. The substrate includes one or a plurality of insulating layers including first and second faces. The detection electrode includes mutually electrically connected detection lines arrayed at spaced intervals on the first face. The drive electrode includes mutually electrically connected drive lines each arranged on the first or second face and located between adjacent two of the detection lines. When a target approaches the detection electrode being charged and discharged by the controller, the approach causes a change in a first capacitance between the detection electrode and the target. When a target approaches the detection and drive electrodes while the controller is supplying drive pulses to the drive electrode, the approach causes a change in a second capacitance between the detection electrode and the drive electrode. The controller detects the target referring to changes in the first and second capacitances.

A sensing module and an electronic device are provided. The sensing module includes a substrate, at least one light-emitting unit, a light-guiding assembly, at least one sensing circuit structure, and a sensing processor. The light-guiding assembly is connected to the substrate and includes at least one light-guiding structure. The at least one light-emitting unit is configured to emit a light beam outwardly through the at least one light-guiding structure. One end of the at least one sensing circuit structure is disposed on the substrate. The sensing processor is disposed on the substrate, and is configured to sense a capacitance change in a peripheral area of the at least one sensing circuit structure by the at least one sensing circuit structure and to generate a sensing signal. The sensing processor or an external controller is configured to control the at least one light-emitting unit according to the sensing signal.

A system and method for compensating for drift in a switch gear voltage sensor. The system includes a circuit, and an electronic processor. The circuit is configured to receive a first signal from a first capacitor of the voltage sensor and receive a second signal from a second capacitor of the voltage sensor. The circuit is further configured to generate a third signal and a fourth signal based on the first signal and the second signal. The electronic processor is configured to receive the third signal and the fourth signal and determine an angular frequency, a phase difference, a resistance value, a voltage across a compensation capacitor, an initial gain, a capacitance of the second capacitor, a capacitance and a voltage of the compensation capacitor, and a final gain.

A system may include an array of sensor elements, the array of sensor elements each comprising a first type of passive reactive element, a second type of passive reactive element electrically coupled to the array of sensor elements, a driver configured to drive the array of sensor elements and the second type of passive reactive element, and control circuitry configured to control enabling and disabling of individual sensor elements of the array of sensor elements to ensure no more than one of the array of sensor elements is enabled at a time such that when one of the array of sensor elements is enabled, the one of the array of sensor elements and the second type of passive reactive element together operate as a resonant sensor.

Provided is a capacitance detection circuit, which has better detection performance. The capacitance detection circuit includes: a first charging and discharging circuit configured to perform charging or discharging on a capacitor to be detected; a second charging and discharging circuit configured to perform charging or discharging on a calibration capacitor; an analog-to-digital conversion circuit configured to continuously sample a voltage difference between the capacitor to be detected and the calibration capacitor in a charging or discharging process to obtain sampled data; and a digital processing circuit configured to detect a capacitance of the capacitor to be detected according to the sampled data.

A display device may include a display panel, a sensor unit, and a touch driver. The sensor unit is provided on the display panel and may output a sensing signal corresponding to a touch input. The sensor unit may include a first electrode and may include a conductive layer provided between the display panel and the first electrode and spaced from the first electrode. The touch driver may include a signal receiver. The signal receiver may include a first input terminal electrically coupled to the first electrode, may include a second input terminal electrically coupled to the conductive layer, may receive the sensing signal, and may output a signal corresponding to a voltage difference the first input terminal and the second input terminal.

A method and a photovoltaic inverter determines the system capacitance of a photovoltaic system relative to ground. The voltage required for the measurement can be provided by the intermediate circuit in the form of the intermediate circuit voltage, and the measuring device is designed to actuate an input short-circuit switch for short-circuiting the DC input with the AC disconnector open, as a result of which the intermediate circuit voltage can be applied to the DC input in the reverse direction, and the measuring device is configured to determine the system capacitance from the temporal waveform of the measured voltage after the switch of the voltage divider is closed.