The present disclosure relates to an inspection apparatus and an inspection method that enable inspection of the performance of an image pickup element. Generation of collimated light and transmission of part of the collimated light through a transmission filter having a light-blocking face provided with circular holes arranged regularly, causes conversion to rays of columnar collimated light arranged regularly. An image including the rays of columnar collimated light arranged regularly, is captured by an image pickup element being inspected. Then, acquisition of the difference between the image captured by the image pickup element being inspected and an ideal image captured by an ideal image pickup element and comparison between the difference and a threshold, result in inspection of the performance of the image pickup element being inspected.

The present disclosure relates to an inspection apparatus and an inspection method, and a program that enable inspection of the performance of an image pickup element. Generation of collimated light and transmission of part of the collimated light through a transmission filter having a light-blocking face provided with circular holes arranged regularly, causes conversion to rays of columnar collimated light arranged regularly. An image including the rays of columnar collimated light arranged regularly, is captured by an image pickup element being inspected. Then, acquisition of the difference between the image captured by the image pickup element being inspected and an ideal image captured by an ideal image pickup element and comparison between the difference and a threshold, result in inspection of the performance of the image pickup element being inspected The present disclosure can be applied to the manufacturing of an image pickup device.

In a method for testing an image sensor having (i) regular pixels and test pixels, of which each is interconnected with one of two predefined voltage values, and (ii) a signal processing unit for providing digital signal values for output voltages of the pixels and test pixels, the following steps are performed: receiving digital signal values of the test pixels; and using the signal values of at least one proper or improper subset of the test pixels for testing the image sensor, all test pixels of the subset being interconnected with a first of the two voltage values. Using the test pixels for testing allows testing during ongoing operation, i.e., during reception of regular image signals.