A MEMS triaxial magnetic sensor device includes a sensing structure having: a substrate; an outer frame, which internally defines a window and is elastically coupled to first anchorages fixed with respect to the substrate by first elastic elements; a mobile structure arranged in the window, suspended above the substrate, which is elastically coupled to the outer frame by second elastic elements and carries a conductive path for flow of an electric current; and an elastic arrangement operatively coupled to the mobile structure. The mobile structure performs, due to the first and second elastic elements and the arrangement of elastic elements, first, second, and third sensing movements in response to Lorentz forces from first, second, and third magnetic-field components, respectively. The first, second, and third sensing movements are distinct and decoupled from one another.

Systems and methods are disclosed for automatically calibrating a magnetometer during user activity. A portable device associated with a user provides magnetic field measurements during user activity, which are converted to a frequency domain and frequency component(s) that correspond to the user activity are distinguished. A criterion is defined for the distinguished frequency components such that magnetometer bias is estimated by satisfying a condition for the criterion. Accordingly, the estimated magnetometer bias may be applied to the obtained magnetic field measurements. The calibrated magnetic field measurements may be used for any suitable purposes, including for building a magnetic fingerprint map using crowdsourcing techniques.

A permanent magnet including, at least once per group of ten consecutive ferromagnetic layers, a growth layer directly interposed between a top antiferromagnetic layer of a previous pattern and a bottom antiferromagnetic layer of a following pattern. This growth layer is entirely realized in a nonmagnetic material chosen from the group made up of the following metals: Ta, Cu, Ru, V, Mo, Hf, Mg, NiCr and NiFeCr, or it is realized by a stack of several sublayers of nonmagnetic material disposed immediately on one another, at least one of these sublayers being entirely realized in a material chosen from the group. The thickness of the growth layer is greater than 0.5 nm.

Systems and methods for a door or window contact sensor are provided. Some systems can include a three-dimensional (3D) microelectromechanical system (MEMS) magnetic sensor, a programmable processor, and executable control software stored on a non-transitory computer readable medium, wherein the 3D MEMS magnetic sensor can measure magnetic parameters of a magnetic field along three axes, and wherein the programmable processor and the executable control software can compare the magnetic parameters to reference values to determine whether the magnetic parameters indicate that a door or a window associated with the 3D MEMS magnetic sensor is open or closed.

A method for calibrating a sensor system, including: providing at least one first sensor unit and one second sensor unit, providing first correction data for the first sensor unit on the basis of measuring signals of the first sensor unit, providing second correction data for the first sensor unit, in the case of an activated second sensor unit, on the basis of measuring signals of the first sensor unit and on the basis of measuring signals of the second sensor unit, determining a first quality parameter for the first correction data and a second quality parameter for the second correction data, determining present correction data for measuring signals of the first sensor unit based on the correction data having the highest of the two determined quality parameters, and calibrating the first sensor unit by correcting first measuring signals on the basis of the present correction data.

Systems and methods are disclosed for generating a magnetic fingerprint map. Information representing orientation and position of each portable device is obtained along with magnetic field measurements that are correlated with positions determined from the information. Uncertainties associated with the magnetic field measurements are estimated and the magnetic field measurements and associated uncertainties are converted from a device frame to a unified fingerprint frame using the orientations determined from the information. Parameters of a probability distribution function for magnetic field measurements and contaminating measurements are mitigated at each determined position based at least in part on the converted magnetic field measurements and associated uncertainties. Correspondingly, the magnetic fingerprint map is generated from the determined parameters of the probability distribution functions.

Aspects and embodiments are generally directed to magnetic field detector systems and methods. In one example, a magnetic field detector system includes a proof-mass including a magnetic dipole source, a plurality of supports, each individual support of the plurality supports being coupled to the proof-mass, a plurality of sensors, each individual sensor of the plurality of sensors positioned to measure a resonant frequency of a corresponding support of the plurality of supports, and a controller coupled to each individual sensor of the plurality of sensors, the controller configured to measure a characteristic of a magnetic field imparted on the proof-mass based on at least a first resonant frequency of the measured resonant frequencies.

Provided is an acceleration sensor capable of realizing a simultaneous operation method of signal detection and servo control in place of a time-division processing method, by an MEMS process in which a manufacturing variation is large. The acceleration sensor is an MEMS capacitive acceleration sensor and has capacitive elements for signal detection and capacitive elements for servo control different from the capacitive elements for the signal detection. A voltage to generate force in a direction reverse to a detection signal of acceleration by the capacitive elements for the signal detection is applied to the capacitive elements for the servo control. Further, the acceleration sensor includes a variable capacity unit compensating for a mismatch of capacity values of the capacitive elements for the servo control at an ASIC side, detects a leak signal due to the mismatch of the capacity values in an ASIC, controls a capacity value of the variable capacity unit, on the basis of a detection result, compensates for an influence of the mismatch of the capacity values, and executes a normal signal detection/servo control simultaneous operation.

An electromagnetic gradiometer that includes multiple torsionally operated MEMS-based magnetic and/or electric field sensors with control electronics configured to provide magnetic and/or electric field gradient measurements. In one example a magnetic gradiometer includes a first torsionally operated MEMS magnetic sensor having a capacitive read-out configured to provide a first measurement of a received magnetic field, a second torsionally operated MEMS magnetic sensor coupled to the first torsionally operated MEMS magnetic sensor and having the capacitive read-out configured to provide a second measurement of the received magnetic field, and control electronics coupled to the first and second torsionally operated MEMS magnetic sensors and configured to determine a magnetic field gradient of the received magnetic field based the first and second measurements from the first and second torsionally operated MEMS electromagnetic sensors.

A permanent magnet includes at least two antiferromagnetic layers and at least two first ferromagnetic layers. A magnetization direction of each first ferromagnetic layer is set, by an exchange coupling, with one of the antiferromagnetic layers of the stack, parallel to and in the same direction as the magnetization directions of the other first ferromagnetic layers. The permanent magnet also includes at least one second ferromagnetic layer. A magnetization direction of each second ferromagnetic layer is pinned only by RKKY (Ruderman-Kittel-Kasuya-Yosida) coupling with at least one of the first ferromagnetic layers or with at least one other of the second ferromagnetic layers.