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G
PHYSICS
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G02
OPTICS
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G02B
OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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5/00
Optical elements other than lenses
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G02B5/18
Diffraction gratings
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G02B5/1847
Manufacturing methods
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G02B5/1857
using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
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