A filter array includes optical filters that are disposed in a two-dimensional plane. At least one optical filter of the optical filters includes an interference layer having a first surface and a second surface opposite the first surface, and a reflective layer provided on the first surface. A transmission spectrum of the at least one optical filter has maximum values. The reflective layer is not provided on the second surface.

An optical filter system includes a Fabry-Perot interference filter, and a controller that controls the Fabry-Perot interference filter. The Fabry-Perot interference filter includes a first mirror portion, a second mirror portion, a first driving electrode and a first monitor electrode provided with the first mirror portion, and a second driving electrode and a second monitor electrode provided with the second mirror portion. The controller includes a control unit that calculates an electrostatic capacitance between the first mirror portion and the second mirror portion based on an alternating voltage generated between the first monitor electrode and the second monitor electrode while an alternating current is applied between the first monitor electrode and the second monitor electrode.

A metasurface includes a plurality of Bragg mirrors, each having a defect cavity therein, arrayed in a grid. A heat source is provided for each of the plurality of Bragg mirrors. Each heat source is positioned to selectively modulate heat applied to its respective Bragg mirror and to impart a different phase shift via the applied heat from the heat source.

An optical filter includes a first optical channel that includes a first mirror and a second mirror that are configured to reflect one or more ranges of an electromagnetic spectrum, and a first portion of a monolithic spacer that is positioned between the first and second mirrors. A second optical channel includes a third mirror and a fourth mirror that are configured to reflect one or more ranges of the electromagnetic spectrum, and a second portion of the monolithic spacer that is positioned between the third and fourth mirrors. A method of manufacturing the optical filter includes forming a first plurality of mirrors; forming, on the first plurality of mirrors, a monolithic spacer; forming a multilevel etch mask on the monolithic spacer using a grayscale lithography procedure; etching the multilevel etch mask and the monolithic spacer; and forming a second plurality of mirrors on the monolithic spacer.

A filter array includes filters disposed in a two-dimensional plane and having different transmission spectra. The filters include a first filter with a transmission spectrum having a first peak group including first and second peaks adjacent to each other, and at least one second filter with a transmission spectrum having a second peak group including third and fourth peaks adjacent to each other. Of peaks included in the second peak group, the third peak has a wavelength closest to a wavelength at the first peak. A first interval between the wavelength at the first peak and a wavelength at the second peak is different from a second interval between the wavelength at the third peak and a wavelength at the fourth peak. ΔFSR/σ≥0.25, where ΔFSR denotes an absolute value of a difference between the first and second intervals and σ denotes a half-width of the first peak.

Tunable MEMS etalon devices comprising: a front mirror and a back mirror, the front and back mirrors separated in an initial pre-stressed un-actuated etalon state by a gap having a pre-stressed un-actuated gap size determined by a back stopper structure in physical contact with the front mirror and back mirrors, the etalon configured to assume at least one actuated state in which the gap has an actuated gap size gap greater than the pre-stressed un-actuated gap size; an anchor structure, a frame structure fixedly coupled to the front mirror at a first surface thereof that faces incoming light, and a flexure structure attached to the anchor structure and to the frame structure but not attached to the front mirror, and a spacer structure separating the anchor structure from the back mirror, and wherein the front mirror and the spacer structure are formed in a same single glass layer.

A wavelength-tunable interference filter includes: a first substrate where a first mirror and a first electrode are provided; a second substrate where a second mirror corresponding to the first mirror and a second electrode facing the first electrode are provided; and a bonding part bonding the first substrate and the second substrate together. The first substrate includes a moving part where the first mirror is arranged, a diaphragm part holding the moving part in such a way that the moving part is movable in the Z-direction, and an outer circumferential part provided outside of the diaphragm part. The diaphragm part includes a planar part having a uniform thickness, and a first slope part having a thickness in the Z-direction incrementing as it goes from the planar part toward the outer circumferential part. The first electrode is provided over a range from the planar part to the first slope part. An outer edge of the first electrode, which is an edge opposite to the first mirror, is located at the first slope part. The bonding part is provided over a range from a part of the first slope part to the outer circumferential part.

A transportation method for transporting an object including a plurality of Fabry-Perot interference filters, the transportation method including a first step of accommodating the object in an accommodating container, wherein the Fabry-Perot interference filter includes a substrate, a first mirror portion and a second mirror portion provided on the substrate to face each other via a gap and in which a distance from each other is variable, and in the first step, the object is accommodated and supported in the accommodating container in a state where the plurality of Fabry-Perot interference filters is two-dimensionally arranged.

According to one aspect of the presently disclosed subject there is provided a device configured figured to allow illumination of light towards a tunable filter, each time towards a different portion thereof, and detect the optical response, (e.g., transmission or reflection from the portion that is illuminated with light). By detecting optical response of isolated illuminations towards different portions of the tunable filter each time, the state of the tunable filter at the illuminated portion, e.g. the optical gap between a movable member and a stationary member of the tunable filter, can be determined. By monitoring different portions of the tunable filter, the general state of the tunable filter is determined. For example, the general state of the tunable filter may be determined based on the optical gaps at different portions of the tunable filter while the actuation parameters are maintained unchanged.

Devices, methods and systems for generating wideband, high-fidelity arbitrary radio frequency (RF) passband signals are described. A voltage tunable optical filter for arbitrary RF passband signal generation includes a first input configured to receive a broadband optical pulse train, a second input configured to receive a first control voltage representative of an amplitude signal, an electrooptic modulator to receive the broadband optical pulse train and the first control voltage, to modulate the broadband optical pulse train in accordance with the amplitude signal, and to produce two complementary optical outputs that form two arms of an interferometer, an optical delay component to impart an optical path difference into one of the complementary outputs of the electrooptic modulator, and a combiner or a splitter to receive two complementary optical outputs of the electrooptic modulator after impartation of the optical path difference and to produce an output interference pattern of fringes.