Methods, apparatuses, and methods of manufacture are described that provide one or more fixed blades mounted to a frame or substrate, one or more movable blades mounted to each structure to be moved, and flexures on which the structures are suspended which reduces moment of inertia during use.

A rotary reciprocating drive actuator includes: a movable body including a shaft portion and a magnet fixed to the shaft portion; a fixing body including a core assembly, the core assembly including a core body and coils, the core body having magnetic poles, the core assembly being disposed such that the magnetic poles face an outer periphery of the magnet; and a pair of shaft supports configured to sandwich the core assembly in an extending direction of extension of the shaft portion and support the shaft portion at opposite sides of the core assembly such that the shaft portion is rotatable, in which a magnetic flux passing through the core body is generated by energization of the coils, causing reciprocating rotation of the movable body about an axis of the shaft portion by electromagnetic interaction between the magnetic flux and the magnet.

A mirror swing actuator assembly for an optical path folding element (OPFE) for compact folding camera modules comprises an exit aperture for outputting folded light rays, and an incoming aperture for receiving incoming light rays, wherein a distance between a top lens of a lens actuator and an end of the optical path folding element is minimized by configuring the second aperture and/or a support assembly of the optical path folding element to receive, within the mirror swing actuator assembly, an end portion of the optical actuator/lens assembly that comprises the top lens.

Embodiments of the present disclosure relate to mount apparatuses for digital micromirror devices of digital lithography systems and methods of mounting the digital micromirror devices. The mount apparatuses described herein retain spatial light modulators, such as DMDs. The mount apparatus enables the flattening of the DMD by providing a force such that the pair of contact pads contact the DMD. The DMD is positioned in a mounting frame of the mount apparatus. Contact pads of the mounting frame are operable to apply pressure to the DMD.

In an optical device, when viewed from a first direction, first, second, third, and fourth movable comb electrodes are respectively disposed between a first support portion and a first end of a movable unit, between a second support portion and a second end of the movable unit, between a third support portion and the first end, and between a fourth support portion and the second end of the movable unit. The first and second support portions respectively include first and second rib portions formed so that the thickness of each of the first and second support portions becomes greater than the thickness of the first torsion bar. The third and fourth support portions respectively include third and fourth rib portions formed so that the thickness of each of the third and fourth support portions becomes greater than the thickness of the second torsion bar.

An optical sensing system is provided, including a sensing module, a light emitter, and a light receiver. The sensing module has a substrate, an optical waveguide disposed on the substrate, and a sensing membrane disposed on the optical waveguide for carrying a specimen. The light emitter emits a sensing light to the optical waveguide, and the light receiver receives the sensing light that propagates through the optical waveguide.

An imaging system can include a first and second camera configured to capture first and second sets of oblique images along first and second scan paths, respectively, on an object area. A drive is coupled to a scanning mirror structure, having at least one mirror surface, and configured to rotate the structure about a scan axis based on a scan angle. The first and second cameras each have an optical axis set at an oblique angle to the scan axis and include a respective lens to focus first and second imaging beams reflected from the mirror surface to an image sensor located in each of the cameras. The first and second imaging beams captured by their respective cameras can vary according to the scan angle. Each of the image sensors captures respective sets of oblique images by sampling the imaging beams at first and second values of the scan angle.

A coupling element for a positioning device, which includes a first and second linear guides for guiding first and second carriages respectively along first and second linear directions, is configured to create a coupling between the first carriage and the second linear guide. The coupling element includes a central part and a surrounding part spaced at a distance therefrom. The surrounding part has a central portion surrounding the central part, and has two end portions adjoining the central portion in the first linear direction. Connecting flat springs are disposed to create the distance and connect together the central part and the central portion of the surrounding part. The connecting flat springs lie in planes which intersect at a center of the central part. A vertical flat spring is disposed parallel to the first linear direction at each of the two end portions of the surrounding part.

Embodiments of the disclosure provide a micromachined mirror assembly. The micromachined mirror assembly includes a micro mirror configured to tilt around an axis and a first and a second torsion beam each having a first and a second end. The second end of the first torsion beam and the second end of the second torsion beam are mechanically coupled to the micro mirror along the axis. The micromachined mirror assembly also includes a first DC voltage applied to the first end of the first torsion beam and a second DC voltage, different from the first DC voltage, is applied to the first end of the second torsion beam.

A mirror unit includes a mirror device includes a support portion and a movable mirror portion configured to be movable with respect to the support portion, and a package including a light incident opening and accommodating and holding the mirror device such that light incident from the light incident opening is able to be incident on the movable mirror portion. The package is provided with a ventilation port communicating an inside and an outside of the package.