A mirror unit includes a light scanning device and a package. The package has a main body portion provided with a light incident opening that opens on one side in a predetermined direction, a protrusion provided on a top surface of the main body portion, and a flat plate-shaped window member disposed on the top surface on an inward side of the protrusion and covering the light incident opening. An end surface of the protrusion on the one side is positioned more to the one side than the window member. A thickness of the protrusion is smaller than a height of the protrusion from the top surface. When viewed in any direction perpendicular to the predetermined direction, a length of a part covered by the protrusion in the window member is longer than a length of a part exposed from the protrusion in the window member.

An optical scanning device includes a substrate, a frame, a plurality of light source modules, and a scanning mirror assembly. The frame is disposed on the substrate to form an accommodating space, and includes a side wall and a reflective portion located on a top end of the side wall and having a light exit. The light source modules are disposed in the accommodating space, surround the scanning mirror assembly, and are configured to provide a plurality of light beams to the reflective portion. The scanning mirror assembly is disposed in the accommodating space and located on a transmission path of the light beams reflected by the reflective portion. The scanning mirror assembly includes a scanning element oscillating along at least one rotation axis and being configured to reflect the light beams to form a scanning light beam transmitted through the light exit out of the optical scanning device.

A measuring device (10) for the interferometric shape measurement of a surface (12) of a test object (14-1; 14-2)includes (i) a diffractive optical element (26-1; 26-2) that generates a test wave (28) from incoming measurement radiation (18), wherein the diffractive optical element radiates the test wave onto the surface of the test object, (ii) a deflection element (22) that is disposed upstream of the diffractive optical element in the beam path of the measurement radiation, and (iii) a holding device (24, 124) that holds the deflection element and that changes a position of the deflection element (22) through a combination of a tilting movement and a translation movement.

An adjustable mirror motor assembly includes a base, a mirror motor component, and a housing. The mirror motor component is fixed on the base and includes a mount and a dragging member. The mount is fixed on the base. A pivot end of the dragging member is pivotally connected to a pivot portion of the mount, and a slide end of the dragging member is slidably disposed in a slide portion of the mount, so that the slide end is pivotally rotated with respect to the pivot end and is slidably moved in the slide portion. A magnet component is on a magnet fixation portion of the dragging member. A mirror is on a mirror fixation portion of the dragging member. The housing covers the base and the mirror motor component.

A light source module includes a light source, a fluorescent ring, a reflector, and a driving device. The light source is configured to emit light. The fluorescent ring has an inner surface. The reflector is configured to reflect the light to form a light spot on the inner surface. The driving device is configured to rotate the reflector to cause the light spot to move along a circular path on the inner surface.

One example implementation of a mirror system comprises a carrier, and a first chip package arranged on a surface of the carrier and comprising a first MEMS mirror. Furthermore, the mirror system comprises a second chip package arranged on the surface of the carrier and comprising a second MEMS mirror. The mirror system furthermore comprises a reflective element arranged over the surface of the carrier and above the first chip package and the second chip package in such a way that a radiation that is incident in the mirror system and is reflected by the first MEMS mirror in the direction of the reflective element is reflected by the reflective element in the direction of the second MEMS mirror.

The present disclosure provides a method for preparing a MEMS micro mirror with electrodes on both sides. The method includes: providing a first base, forming an electrode lead groove in the first base; forming an insulating groove, a plurality of lower comb plates and a moving space groove in a first device layer to obtain a bonded structure layer; providing a second base bonded with the bonded structure layer to obtain a bonded piece; forming a frame, upper comb plates, movable micro light reflector, and elastic beams in a second device layer, with the movable micro light reflector located inside the frame, and the elastic beam connected with the frame and/or the movable micro light reflector; forming a metal reflecting layer, a first upper comb plate electrode, a first lower comb plate electrode, a second upper comb plate electrode and a second lower comb plate electrode.

A rotatable polygon mirror including a plurality of reflecting surfaces includes first and second surfaces connecting to the reflecting surfaces provided on opposite ends, first and second protrusion portions with an annular shape, provided on the first and second surfaces and protruding inversely to each other in the rotational axis direction, about a rotational axis of the rotatable polygon mirror. A height of a top surface portion of the first protrusion portion from the first surface is higher than that of a top surface portion of the second protrusion portion from the second surface with respect to the rotational axis direction. In a case that the rotatable polygon mirrors are stacked in the rotational axis direction, a wall of an inner peripheral side of the first protrusion portion and a wall of an outer peripheral side of the second protrusion portion are engaged with each other.

A mirror device includes: a mirror including a rotation shaft pivotably supported, a coupling shaft separated from the rotation shaft, and a reflecting surface that reflects display light; a coupling member including a first coupling portion coupled to the rotation shaft and a second coupling portion coupled to the coupling shaft, and configured to pivot integrally with the mirror; a motor that is connected to the coupling member via a gear and that pivots the coupling member; and a first spring having one end side immovably fixed and another end side coupled to the coupling member, and configured to apply force to the coupling member in one rotation direction.

A mirror clip for use in an optical mirror housing for an optical emission spectrometer includes a body having a mirror seating portion, at least one hinge member for positioning and attaching the clip to an optical mirror housing, and at least one clamping member for releasably securing the mirror clip to the optical mirror housing. A mirror can be accommodated in the mirror seating portion. The at least one hinge member may include a hook to provide a releasable hinged connection between the mirror clip and the optical mirror housing.