A device for measuring an aberration has an image sensor, projection optics for optically projecting onto the image sensor, an optical unit for influencing the optical projection onto the image sensor so that the result on the image sensor is a multiple image of a plurality of sub-images, wherein the optical unit has at least one region per sub-image, wherein the regions influence different lateral portions of a wavefront incident on the projection optics in different ways, and an evaluator configured to determine information relating to the aberration based on the multiple image.

A device for measuring an aberration has an image sensor, projection optics for optically projecting onto the image sensor, an optical unit for influencing the optical projection onto the image sensor so that the result on the image sensor is a multiple image of a plurality of sub-images, wherein the optical unit has at least one region per sub-image, wherein the regions influence different lateral portions of a wavefront incident on the projection optics in different ways, and an evaluator configured to determine information relating to the aberration based on the multiple image.

A vehicle, a head-up displaying system and a projector are provided, the projector including a displaying component (1) configured to project an image, and a three-mirror optical device positioned in an optical path of an emergent light of the displaying component (1), configured to reflect the image projected by the displaying component (1) onto a front windshield (5) such that the front windshield (5) reflects the image to eyes of a driver and including: a zoom lens assembly (2) having a zoom lens (21) for zooming in/out the image projected by the displaying component (1), and a first curvature adjusting component configured to adjust a curvature of the zoom lens (21); an image quality compensation lens assembly (3) having an image quality compensation lens (31) configured to compensate for an image quality distortion caused during a change of the curvature of the zoom lens (21), and a second curvature adjusting component configured to adjust a curvature of the image quality compensation lens (31); and a front windshield compensation lens assembly (4) configured to compensate for an image distortion caused by the front windshield (5).

A vehicle, a head-up displaying system and a projector are provided, the projector including a displaying component (1) configured to project an image, and a three-mirror optical device positioned in an optical path of an emergent light of the displaying component (1), configured to reflect the image projected by the displaying component (1) onto a front windshield (5) such that the front windshield (5) reflects the image to eyes of a driver and including: a zoom lens assembly (2) having a zoom lens (21) for zooming in/out the image projected by the displaying component (1), and a first curvature adjusting component configured to adjust a curvature of the zoom lens (21); an image quality compensation lens assembly (3) having an image quality compensation lens (31) configured to compensate for an image quality distortion caused during a change of the curvature of the zoom lens (21), and a second curvature adjusting component configured to adjust a curvature of the image quality compensation lens (31); and a front windshield compensation lens assembly (4) configured to compensate for an image distortion caused by the front windshield (5).

An apparatus for generating extreme ultraviolet (EUV) radiation includes a droplet generator configured to generate target droplets. An excitation laser is configured to heat the target droplets using excitation pulses to convert the target droplets to plasma. A deformable mirror is disposed in a path of the excitation laser. A controller is configured to adjust parameters of the excitation laser by controlling the deformable mirror based on a feedback parameter.

An apparatus for generating extreme ultraviolet (EUV) radiation includes a droplet generator configured to generate target droplets. An excitation laser is configured to heat the target droplets using excitation pulses to convert the target droplets to plasma. A deformable mirror is disposed in a path of the excitation laser. A controller is configured to adjust parameters of the excitation laser by controlling the deformable mirror based on a feedback parameter.

A mirror arrangement (30) includes: a substrate (31), which has a front side (31a) having a mirror face (32a) for reflecting radiation (5), and a rear side (31b) facing away from the front side (31a), as well as at least one actuator (27) arranged to generate deformations of the mirror face (32a). The at least one actuator (27) is secured on the rear side (31b) of the substrate (31), and the mirror arrangement (30) has a hydrogen barrier (38) which is configured to protect a hydrogen-sensitive material (M) on the rear side (31b) of the substrate (31), in particular on the at least one actuator (27), from the attack by hydrogen (37) from the surroundings (36) of the mirror arrangement (30). An associated optical arrangement, in particular an EUV lithography apparatus (1), incorporating such a mirror arrangement (30) is also disclosed.

A mirror arrangement (30) includes: a substrate (31), which has a front side (31a) having a mirror face (32a) for reflecting radiation (5), and a rear side (31b) facing away from the front side (31a), as well as at least one actuator (27) arranged to generate deformations of the mirror face (32a). The at least one actuator (27) is secured on the rear side (31b) of the substrate (31), and the mirror arrangement (30) has a hydrogen barrier (38) which is configured to protect a hydrogen-sensitive material (M) on the rear side (31b) of the substrate (31), in particular on the at least one actuator (27), from the attack by hydrogen (37) from the surroundings (36) of the mirror arrangement (30). An associated optical arrangement, in particular an EUV lithography apparatus (1), incorporating such a mirror arrangement (30) is also disclosed.

A mirror assembly includes a mirror housing and a mirror. The mirror is supported by the mirror housing. The mirror has an outer reflective surface. The mirror is bendable between a flat shape and a fisheye shape. The mirror assembly further includes an actuator assembly coupled to the mirror. Upon actuation, the actuator assembly is configured to bend the mirror between the flat shape and the fisheye shape to adjust a field of view of the mirror.

An apparatus for generating extreme ultraviolet (EUV) radiation includes a droplet generator configured to generate target droplets. An excitation laser is configured to heat the target droplets using excitation pulses to convert the target droplets to plasma. A deformable mirror is disposed in a path of the excitation laser. A controller is configured to adjust parameters of the excitation laser by controlling the deformable mirror based on a feedback parameter.