A microelectromechanical systems (MEMS) scanning device comprising a torsional beam flexure that has a variable width in relation to a rotational axis for a scanning mirror. The geometric properties of the torsional beam vary along the rotational axis to increase a desired mode of mechanical strain at a location where a strain sensor is operating within the MEMS scanning device to generate a feedback signal. The torsional beam flexure mechanically suspends the scanning mirror from a frame structure. During operation of the MEMS scanning device, actuators induce torsional deformation into the torsional beam flexure to cause rotation of the scanning mirror about the rotational axis. The degree or amount of this torsional deformation is directly related to the angular position of the scanning mirror and, therefore, the desired mode of mechanical strain may be this torsional deformation strain component.

This optical scanning device includes: a shaft part to which a mirror part is connected; a movable magnet; a base part; a ball bearing; a core unit that has a core body and a coil body and rotationally drives the movable magnet; and a magnet position holding member that is a magnetic body provided facing the movable magnet and magnetically attracts the movable magnet to a reference position. The core unit is disposed on the outer surface side of one wall section of a pair of wall sections of the base part. An angle sensor unit for detecting the rotation angle position of the shaft part is disposed between the core unit and the one wall section.

An optical transmitting apparatus is disclosed, in the apparatus, an array light source include M*N light sources, and an included angle between any column of light sources in the N columns of light sources and any row of light sources in the M rows of light sources is a preset angle. The array light source is located on a first side of a collimating lens, a plane on which the array light source is located is perpendicular to an optical axis of the collimating lens, and a distance between the plane on which the array light source is located and a center point of the collimating lens is a focal length of the collimating lens. An rotatable scanning mirror is located on a second side of the collimating lens, and a center point of a reflective surface of the scanning mirror is on the optical axis of the collimating lens.

A rotary reciprocating drive actuator includes: a movable body including a shaft portion and a magnet fixed to the shaft portion; a fixing body including a core assembly, the core assembly including a core body and coils, the core body having magnetic poles, the core assembly being disposed such that the magnetic poles face an outer periphery of the magnet; and a pair of shaft supports configured to sandwich the core assembly in an extending direction of extension of the shaft portion and support the shaft portion at opposite sides of the core assembly such that the shaft portion is rotatable, in which a magnetic flux passing through the core body is generated by energization of the coils, causing reciprocating rotation of the movable body about an axis of the shaft portion by electromagnetic interaction between the magnetic flux and the magnet.

An optical scanning system includes one or more Micro-Electro-Mechanical System (MEMS) Micro-Mirror Arrays (MMAs) used to scan a field-of-view (FOV) over a field-of-regard (FOR). The MEMS MMA is configured such that optical radiation from each point in the FOV does not land on or originate from out-of-phase mirror segments and a diffraction limited resolution of the optical system is limited by the size of the entrance pupil and not by the size of individual mirrors.

A mirror swing actuator assembly for an optical path folding element (OPFE) for compact folding camera modules comprises an exit aperture for outputting folded light rays, and an incoming aperture for receiving incoming light rays, wherein a distance between a top lens of a lens actuator and an end of the optical path folding element is minimized by configuring the second aperture and/or a support assembly of the optical path folding element to receive, within the mirror swing actuator assembly, an end portion of the optical actuator/lens assembly that comprises the top lens.

A laser processing device for forming vias has a galvo mirror module, a first lens, a second lens, a focusing module, and a laser source. The laser source emits a laser beam through the first lens and the second lens to convert the laser beam into an incident ring beam. The galvo mirror module reflects the incident ring beam into a reflected ring beam into the focusing module to convert the reflected ring beam into a Bessel-like beam. The galvo mirror module has a scanning direction and shifts a reflection direction of the reflected ring beam to move an end of the reflected ring beam along the scanning direction. The focusing module has a third lens linearly slid along the scanning direction to reduce variations in shape and laser fluence of the Bessel-like beam focused at different positions.

Embodiments of the disclosure are drawn to apparatuses and methods for a rotating optical reflector. Optical systems may have a limited field of view, and so in order to expand the area that the optical system collects data from, the field of view of the optical system may be scanned across a target area. The present disclosure is directed to a rotating optical reflector, which includes a transmissive layer which refracts light onto a reflective layer, which has a normal which is not parallel to the axis about which the optical reflector is rotated. The optical reflector may be both statically and dynamically balanced, which may allow an increased size of the optical reflector, which in turn may increase the aperture of an optical system (e.g., a lidar system) using the rotating optical reflector.

An optical apparatus includes a deflector configured to deflect illumination light from a light source to scan an object, and configured to deflect reflected light from the object, a light guide configured to guide the illumination light form the light source to the deflector, and configured to guide the reflected light from the deflector to a light receiving element, an optical member having a reflective area that makes first light which is part of the illumination light from the deflector incident on the deflector by reflection, and a controller configured to obtain information regarding the deflector on the basis of information of the first light from the reflective area. In a cross-section including the optical path from the reflective area to the light guide, a width of the reflective area is smaller than a width of the illumination light on the reflective area.

An optical assembly in a laser scanning microscope, having an optical scanning unit providing a first pupil plane, a first beam deflecting device, made of a first scanner arranged on the first pupil plane, for scanning excitation radiation in a first coordinate direction, a first focusing device generating a second pupil plane, optically conjugated to the first pupil plane, and a second beam deflecting device for deflecting the excitation radiation. The second deflecting device is arranged on the second pupil plane. A second focusing device to generate a third pupil plane, is optically conjugated to the first pupil plane and the second pupil plane. A third beam deflecting device is arranged on the third pupil plane, and a variable beam deflecting device is provided to switch an optical beam path between a first beam path and a second beam path.