An imaging system can include a first and second camera configured to capture first and second sets of oblique images along first and second scan paths, respectively, on an object area. A drive is coupled to a scanning mirror structure, having at least one mirror surface, and configured to rotate the structure about a scan axis based on a scan angle. The first and second cameras each have an optical axis set at an oblique angle to the scan axis and include a respective lens to focus first and second imaging beams reflected from the mirror surface to an image sensor located in each of the cameras. The first and second imaging beams captured by their respective cameras can vary according to the scan angle. Each of the image sensors captures respective sets of oblique images by sampling the imaging beams at first and second values of the scan angle.

A multi-beam laser processing system comprising a plurality of laser beams and a plurality of pairs of selectively rotatable mirrors for laser beam steering where each laser beam is independently steered by one pair of selectively rotatable mirrors. The plurality of pairs of mirrors are positioned adjacent to one another within a single main body. The main body is positioned directly opposing the beams, the mirrors directing each laser beam simultaneously to a selected location on a substrate. The main body comprises a plurality of vents; a plurality of passages; a plurality of openings; and a plurality of galvos nested densely within the main body. The galvos direct multiple laser beams to a substrate wherein the fields of view overlap and the laser beam focal point remains small and precise.

A micromechanical light deflection device, including a micromechanical light deflection unit and a transparent cover for the micromechanical light deflection unit, the transparent cover including at least one passive beam shaping unit for a light beam.

A laser projection device, including at least one reflector unit having at least one reflector element that is configured to deflect at least one laser beam to be projected, and having at least one drive unit that is configured to excite at least the reflector element into resonant vibration. The laser projection device includes at least one temperature compensation unit, which is configured to acquire a vibrational frequency of at least the reflector element and to ascertain the temperature of the reflector unit from it.

An oscillator control system that includes an oscillator structure; a phase error detector configured to generate a phase error signal based on a delayed event time signal and delayed reference signal; an analog signal path coupled between the oscillator structure and the phase error detector, the analog signal path configured to receive an event time signal and produce the delayed event time signal; a control circuit configured to generate a reference signal; a programmable delay circuit configured to receive the reference signal and induce a programmable delay on the reference signal thereby generating the delayed reference signal; and an analog delay measurement circuit configured to inject a test signal into the analog signal path, receive a delayed test signal from the analog signal path, measure an analog delay of the delayed test signal, and generate a configuration signal configured to adjust the programmable delay according to the measured analog delay.

Diffraction-based imaging systems are described. Aspects of the technology relate to imaging systems having one or more sensors inclined at angles with respect to a sample plane. In some cases, multiple sensors may be used that are, or are not, inclined at angles. The imaging systems may have no optical lenses and are capable of reconstructing microscopic images of large sample areas from diffraction patterns recorded by the one or more sensors. Some embodiments may reduce mechanical complexity of a diffraction-based imaging system. A diffractive imaging system comprises a light source, a sample support configured to hold a sample along a first plane, and a first sensor comprising a plurality of pixels disposed in a second plane that is tilted at an inclined angle relative to the first plane. The first sensor is arranged to record diffraction images of the light source from the sample.

An electromagnetic radiation system for directing an electromagnetic radiation beam (11) at a target (28) having a first arrangement (12) in which the radiation beam (11) is directed along a marking beam path that is within a marking range of the electromagnetic radiation system and a second arrangement (12, 15) in which the radiation beam (27) is directed along a different beam path (27) that is not within the marking range of the electromagnetic radiation system, wherein a positional relationship between the marking beam path (11) and the different beam path (27) satisfies a predetermined condition at the target (28) when the electromagnetic radiation system is at a predetermined distance (29) from the target (28).

An electro-optical system may include a light source configured to emit a beam of radiation, and a pivotable scanning mirror configured to project the beam of radiation toward a field of view. The electro-optical system may also include a first electrode associated with the scanning mirror, and a plurality of second electrodes spaced apart from the first electrode. The electro-optical system may further include a processor programmed to determine a capacitance value for each of the second electrodes relative to the first electrode. Each of the determined capacitance values may have an accuracy in a range of ± 1/100 to ± 1/1000 of a difference between a highest capacitance value and a lowest capacitance value between the first electrode and a respective one of the second electrodes. The processor may also be programmed to determine an orientation of the scanning mirror based on one or more of the determined capacitance values.

A mirror unit includes a mirror device includes a support portion and a movable mirror portion configured to be movable with respect to the support portion, and a package including a light incident opening and accommodating and holding the mirror device such that light incident from the light incident opening is able to be incident on the movable mirror portion. The package is provided with a ventilation port communicating an inside and an outside of the package.

A mirror unit includes a light scanning device and a package. The package has a main body portion provided with a light incident opening that opens on one side in a predetermined direction, a protrusion provided on a top surface of the main body portion, and a flat plate-shaped window member disposed on the top surface on an inward side of the protrusion and covering the light incident opening. An end surface of the protrusion on the one side is positioned more to the one side than the window member. A thickness of the protrusion is smaller than a height of the protrusion from the top surface. When viewed in any direction perpendicular to the predetermined direction, a length of a part covered by the protrusion in the window member is longer than a length of a part exposed from the protrusion in the window member.