Techniques are described herein for dynamically adjusting a resonant frequency of a resonance circuit to optimize power transfer to a mirror device such as a MEMS mirror. A variable capacitance circuit can be operated responsive to a bias control signal. A capacitance control circuit can vary the bias control signal to the resonance circuit responsive to a sense signal. The sense circuit is configured to generate the sense signal responsive to an output of the mirror device. By monitoring a signal level from the output of the mirror device 130, and adjusting the bias control signal of the resonance circuit, the exact resonance frequency of the resonance circuit can be adjusted until a peak signal level is observed, thus improving the efficiency of the energy transferred from the driver circuit 110 to the mirror device 130, and counteracting the impact of parasitic capacitances on the resonance.

An optical scanning device includes a mirror device that has a mirror portion, which is swingable around a first axis and a second axis orthogonal to each other, having a reflecting surface reflecting incident light, a first actuator causing the mirror portion to swing around the first axis by applying a rotational torque around the first axis to the mirror portion, and a second actuator causing the mirror portion to swing around the second axis by applying a rotational torque around the second axis to the mirror portion, and a processor that provides a first driving signal to the first actuator and provides a second driving signal to the second actuator. The processor, with the first driving signal and the second driving signal each as cyclic voltage signals whose amplitudes and phases change with time, causes the mirror portion to perform a spiral rotation operation including a period in which a swing amplitude around the first axis and a swing amplitude around the second axis change linearly.

A LIDAR system has a switch configured to direct a switch signal to one of multiple different alternate waveguides. The switch signal carries multiple different channels. The system also includes one more redirection components that receive multiple different channel output signals. Each of the channel output signals carries a different one of the channels. The one more redirection components are configured to redirect the channel output signals such that a direction that each of the channel output signals travels away from the one more redirection components changes in response to a change in the alternate waveguide which receives the switch signal.

The invention relates to a MEMS mirror assembly for detecting a large angular range up to 180°, preferably up to 160°, and to a method for producing a MEMS mirror assembly. The mirror assembly comprises a carrier substrate (1), on which a mirror (2) vibrating about at least one axis is mounted, a transparent cover (4), which is connected in a hermetically sealed manner to the carrier substrate (1) and which comprises an ellipsoidal dome (6) having a substantially round base area, and a compensation optical system (8), which is arranged in a predefined beam path for an incident beam outside the dome (6). The middle of the mirror (2) lies in the centre point of the dome, and the compensation optical system (8) collimates the incident beam in such a way that a divergence or convergence of the beam caused by the boundary surfaces of the dome once said beam has exited from the dome (6) is substantially compensated. The MEMS mirror assemblies are produced by joining a cover wafer and a mirror wafer, which each comprise a plurality of hemispherical domes and mirrors mounted on the carrier substrate. The mirror assemblies are then separated from the joined wafers. The domes of the cover wafer are produced by a glass flow process.

A fractional handpiece and systems thereof for skin treatment include a passively Q-switched laser assembly operatively connected to a pump laser source to receive a pump laser beam having a first wavelength and a beam splitting assembly operable to split a solid beam emitted by the passively Q-switched laser assembly and form an array of micro-beams across a segment of skin. The passively Q-switched laser assembly generates a high power sub-nanosecond pulsed laser beam having a second wavelength.

An optical system for a virtual retinal scan display. The optical system includes: a projector unit including a modulatable light source for generating at least one modulated light beam and including a movable deflection device for the light beam, a scanning projection of an image content being generatable from the at least one light beam as a result of the movement of the movable deflection device; a diverting unit, onto which the image content is projectable and which is configured to map the projected image content into an exit pupil and to guide it onto an eye of a user; an optical exit pupil shifting unit situated in an optical path of the light beam for spatially shifting the exit pupil of an eye box of the optical system in directions which extend at least essentially in parallel to an exit pupil plane of the exit pupil.

A LIDAR system includes a light source configured to generate a plurality of laser beams arranged in a beam pattern, a rotatable deflector configured to rotate about a scanning axis, a beam rotator configured to cause rotation of the beam pattern of the plurality of laser beams relative to the scanning axis of the rotatable deflector and at least one sensor configured to receive, via the rotatable deflector and the beam rotator, laser light resulting from one or more of the plurality of laser beams reflected from at least one object in the field of view of the LIDAR system wherein the multibeam array is maintained at a substantially fixed orientation with respect to the optical axis.

The invention relates to microelectromechanical systems (MEMS), and specifically to a mirror system, for example to be used in LiDAR (Light Detection and Ranging). The MEMS mirror system of the invention uses four suspenders, each of which is connected to the reflector body at two separate connection points which can be independently displaced by piezoelectric actuators. By actuating adjacent and opposite pairs of piezoelectric actuators, the reflector body can be driven to oscillated about two orthogonal axes.

Some embodiments may include a method of generating assessment data in a system including a galvanometric scanning system (GSS) having a laser device to generate a laser beam and an X-Y scan head module to position the laser beam on a work piece. The method may include selecting a dimension based on a desired accuracy for validation (and/or a characteristic of an imaging system in embodiments that utilize an imaging system). The method may include commanding the GSS to draw a mark based on a polygon or ellipse of the selected dimension around a predetermined target point associated with the work piece to generate assessment data, and following operation of the GSS based on said commanding, validating a calibration of the GSS using the assessment data (or an image thereof in embodiments that utilize an imaging system). Other embodiments may be disclosed and/or claimed.

A lens positional adjustment device having a lens mounted to a moveable lens body, with the lens body including a bearing member and the lens mounted to the body to enable a laser beam to be projectable at and through the lens. A first voice coil member is mounted to the lens body and is axially offset from the optical axis of the lens. The device also includes a housing having a second voice coil member and a housing bearing with the bearing member of the lens housing being engaged with the housing bearing. The voice coil members are constructed to be one of an electrical coil winding and a magnet that engage to enable movement of the lens body relative to the housing when a current is supplied to the electrical coil winding whereby movement of the lens body relative to the housing adjusts the position of the lens.