This invention addresses the abovementioned problem, and the purpose of this invention is to provide a far-infrared spectroscopy device that uses an is-TPG method to generate far-infrared light, and is capable of efficiently detecting is-TPG light without a detection optical system being fine-tuned. Even if the far-infrared light incidence angles on an Si prism for detection are the same when far-infrared light having a first frequency is incident on a non-linear optical crystal for detection and when far-infrared light having a second frequency is incident on the non-linear optical crystal for detection, this far-infrared. spectroscopy device adjusts the incidence surface angle of pump light in relation to the non-linear optical crystal for detection such that the angle of the far-infrared light in relation to the pump light within the non-linear optical crystal for detection can be appropriately set for each far-infrared light frequency (see FIG. 1A).

A tunable laser assembly uses a fundamental wavelength between 1 μm and 1.1 μm to alternately generate laser output light at two or more output wavelengths within the range of 184 nm to 200 nm by directing the fundamental light through different regions of a fan-out periodically poled nonlinear crystal to generate corresponding different down-converted signals, and using different nonlinear summing crystals to mix the different down-converted signals with a fifth harmonic of the fundamental wavelength. Each nonlinear summing crystal has a crystal axis aligned at an angle relative to the light propagation direction to facilitate the efficient transmission and summing of the fifth harmonic with an associated down-converted signal. In response to a user-selected output wavelength, a frequency control system positions the fan-out periodically poled nonlinear crystal to generate a corresponding down-converted signal frequency and positions an associated nonlinear summing crystal to receive the fifth harmonic and the corresponding down-converted signal.

An ultraviolet laser apparatus includes: a semiconductor laser that emits an excitation laser light; a fiber laser medium to which the excitation laser light enters from the semiconductor laser and that causes laser oscillation; and an external resonator that: converts a wavelength of a laser light oscillated in the fiber laser medium, and outputs an ultraviolet region continuous wave of at least 0.1W.

A decrease of an output of a wavelength converted light converted by a nonlinear optical crystal is suppressed. A light source apparatus according to the present disclosure includes a fundamental wave light source configured to generate a fundamental wave which is a continuous oscillation laser beam, an external cavity including a plurality of optical mirrors, a nonlinear optical crystal installed inside the external cavity and configured to generate a light with a wavelength shorter than that of the fundamental wave. The light source apparatus includes at least one phase modulator disposed between the fundamental wave light source and the external cavity and configured to modulate the fundamental wave by a modulation frequency of an integer multiple of a resonance frequency interval of the external cavity.

A light modulator includes a base layer, a metal reflective layer formed on the base layer, a modulation layer of a nonlinear optical crystal formed on the reflective layer, and a conductive pattern layer including a plurality of pattern portions arranged periodically in a first direction and each extending in a second direction, and formed on the modulation layer. The modulation layer changes a reflectance for object light by changing a refractive index when a voltage is applied between the reflective layer and the conductive pattern layer. The light modulator outputs the object light being incident from an upper surface side of the modulation layer, transmitted through the modulation layer, and reflected by the reflective layer to the outside as modulated light with an intensity modulated by the reflectance change.

Provided are a wavelength converting particle, a method for manufacturing a wavelength converting particle, and a light-emitting diode containing a wavelength converting particle. The wavelength converting particle comprises a hybrid OIP nanocrystal that converts a wavelength of light generated by an excitation light source into a specified wavelength. Accordingly, it is possible to optically stabilize and improve color purity and light-emission performance without changes in a light-emitting wavelength range.

A method and a system for generating intense, ultrashort pulses of XUV and soft X-ray radiation via high-order harmonic generation (HHG), the method comprising selecting a nonlinear solid target and a laser source; separating a beam from the laser source into a first laser beam and a second laser beam; focusing the first laser beam onto the nonlinear solid target, thereby generating a laser ablated plume; and compressing and frequency-doubling the second laser beam and directing a resulting second compressed and frequency-doubled laser beam to the laser ablated plume, thereby yielding high-order harmonic generation of radiation of photon energies in a range between 12 eV and 36 eV. A high-order harmonic source of radiation, comprising a nonlinear solid target; a laser source; a beam splitter separating a beam from the laser source into a first beam line and a second beam line; the first beam line comprising a first focusing unit directing a first, uncompressed, laser beam onto the nonlinear solid target, to generate a laser ablated plume; and the second beam line directing a second, compressed and frequency-doubled laser beam, to the laser ablated plume, yielding high-order harmonic generation of radiation of photon energies in a range between 12 eV and 36 eV.

A device for shifting a nonlinear crystal arranged to frequency convert a laser beam includes an anchor, a mount for holding the nonlinear crystal, and two parallel flexures each interconnecting the mount and the anchor to cantilever the mount from the anchor. Each flexure extends in a first horizontal direction from the mount to the anchor. The two flexures being offset from each other in a vertical direction. The device also includes a transducer connecting between the anchor and the mount. Bending of the transducer shifts the position of the mount in the vertical direction, and the two parallel flexures cooperate to prevent rotation of the mount during shifting of the mount position induced by the transducer. This device provides an inexpensive and compact crystal-shifter solution with crystal-orientation stability equaling that of far more costly and bulky conventional translation stages.

An amorphous layer is used as a protective coating for hygroscopic nonlinear optical crystals. The amorphous layer consists of one or more alkali metal borates and/or alkali earth metal borates. The amorphous layer slows or prevents water and/or oxygen from diffusing into the hygroscopic nonlinear optical crystal, thus simplifying handling, storage and operating environmental requirements. One or multiple additional coating layers may be placed on top of the amorphous layer, with the additional coating layers including conventional optical materials. The thicknesses of the amorphous layer and/or additional layers may be chosen to reduce reflectance of the optical component at one or more specific wavelengths. The coated nonlinear optical crystal is used in an illumination source utilized in a semiconductor inspection system, a metrology system, or a lithography system.

A pyramidal growth method for long-seed KDP-type crystal. In the growth method provided by the present invention, the lower end of the long-seed crystal is restricted by a lower tray, and the upper end is free to grow into a pyramidal. At the same time, the four prismatic faces at two directions of [100] and [010] can grow, avoiding growth stress problem during crystal growth, and all cut optical elements have high optical quality. Because the growth process is that four prismatic faces with highly similar growth environments grow at the same time and stirring is applied by blade-like stirring paddles during the crystal growth process, the cut optical elements have high optical uniformity.