Patent classifications
G03F7/0384
Polymer, Positive And Negative Photosensitive Resin Compositions, Patterning Process, Method For Forming Cured Film, Interlayer Insulating Film, Surface Protective Film, And Electronic Component
The present invention is a polymer containing: a structural unit of general formula (1) and/or (2); and a structural unit of general formula (3) and/or (4), where X.sub.1 represents a tetravalent organic group, R.sub.1 to R.sub.4 each represent a monovalent organic group or a hydrogen atom, provided that at least one is a monovalent organic group, L represents a divalent organic group or a divalent atom, X.sub.2 represents a divalent organic group, X.sub.3 represents a tetravalent organic group, s represents 0 or 1, Z represents a divalent bonding group, and X.sub.4 represents a divalent organic group. This provides a polymer soluble in an aqueous alkaline solution and usable as a base resin for positive and negative photosensitive resin compositions which enable fine pattern formation, provide high resolution, and have excellent mechanical characteristics even when cured at low temperatures.
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METHOD FOR PREPARING PIXEL DEFINE LAYER
Provided is a method to prevent interference between electrodes that causes pixel defects in a pixel defining layer, thereby lowering the touch defect rate of the panel, and implementing a coloring pattern with high optical density on the electrode substrate to not only make the colors vivid but also increase the reliability and lifespan of the display, particularly a composition and a method for forming a pixel defining layer pattern, which comprises a colorant, and the coating film formed by treating at high temperature during post-baking treatment has a high optical density (OD) per thickness, has a low permittivity of 5.0 or less even with changes in measured Hz, and can improve visibility and contrast.
WAFER END PROTECTIVE-FILM FORMING COMPOSITION FOR SEMICONDUCTOR MANUFACTURING
A wafer end protective-film forming composition for semiconductor manufacturing including: a polymer or compound having a crosslinkable group, and a solvent, wherein the solvent contains a first solvent and a second solvent, and when an evaporation rate of n-butyl acetate is 1, an evaporation rate of the first solvent is 0.10 or more and an evaporation rate of the second solvent is 0.05 or less.
Photosensitive resin composition for flexographic printing
A photosensitive resin composition for flexographic printing includes components (A) to (E) below: (A) a first styrene-butadiene-styrene block copolymer (SBS); (B) a second styrene-butadiene-styrene block copolymer (SBS); (C) a polybutadiene or a derivative thereof; (D) a photopolymerizable monomer; and (E) a photopolymerization initiator, and comprises with respect to (A), 5 to 100 wt % of (B), 10 to 40 wt % of (C), 40 to 200 wt % of (D), and 4 to 20 wt % of (E).
PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE RESIN FILM, PHOTOSENSITIVE DRY FILM, AND PATTERN FORMATION METHOD
Provided is a photosensitive resin composition that contains: (A) a silicone resin containing an acid-crosslinkable group; (B) an epoxy compound represented by formula (B); and (C) a photoacid generator.
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(In the formula, R.sup.51-R.sup.55 each independently represent a hydrogen atom or a saturated hydrocarbyl group having 1-6 carbon atoms.)
PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE RESIN LAYER AND SEMICONDUCTOR DEVICE USING THE SAME
A photosensitive resin composition, a photosensitive resin layer manufactured utilizing the photosensitive resin composition, and a semiconductor device including the photosensitive resin layer are provided. The photosensitive resin composition includes: (A) at least one resin selected from among a polyimide precursor and a polybenzoxazole precursor; (B) a photopolymerizable compound; (C) a photoinitiator represented by Chemical Formula 1; and (D) a solvent.
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PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE RESIN LAYER USING THE SAME, DISPLAY DEVICE, AND MANUFACTURING METHOD OF PHOTOSENSITIVE RESIN LAYER
A photosensitive resin composition including a polymer resin having a refractive index of greater than or equal to about 1.66; a photopolymerizable monomer; a photopolymerization initiator; and a solvent, wherein the polymer resin has a repeating structural unit, and the structural unit includes a moiety derived from an acid dianhydride.
Photoresist compositions and methods of fabricating a semiconductor device
Photoresist compositions may include a photosensitive polymer including a first repeating unit of Chemical Formula 1; a photoacid generator (PAG); and a solvent. ##STR00001##
PHOTORESIST COMPOSITION AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
A photoresist composition is provided. The photoresist composition includes a photosensitive polymer, a photoacid generator, and a solvent. The photosensitive polymer can include a first main chain group, a second main chain group, and an acid-dissociative group attached to the first main chain group, and at least one of the first main chain group or the second main chain group comprises an acid-dissociative functional group which is cleaved between the first main chain group and the second main chain group and between the first main chain group and the acid-dissociative group under presence of an acid catalyst.
COMPOUND, POLYMER COMPOUND, PHOTOSENSITIVE SURFACE TREATMENT AGENT, LAMINATE, SUBSTRATE FOR PATTERN FORMATION, TRANSISTOR, PATTERN FORMATION METHOD, AND TRANSISTOR MANUFACTURING METHOD
A compound represented by General Formula (M1) below is provided. In Formula (M1), Y is a linear or branched alkyl group having 1 to 10 carbon atoms, a polymerizable group-containing group, or a group represented by [SiX.sub.3Y.sup.11*]. Y.sup.11 is a linear or branched alkylene group having 1 to 4 carbon atoms, X is a halogen atom or an alkoxy group, and * is a bonding site to an N atom. R.sup.1 is a hydrogen atom or a methyl group. R.sup.2 is a hydrogen atom or a alkyl group having 1 to 6 carbon atoms. R.sup.3 and R.sup.4 each independently represents a alkyl group having 1 to 3 carbon atoms or a fluoroalkyl group. n=2.
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