An independent cart system with safety functions that prevent unintended motion independently within different sections of the track while permitting motion along other sections of the track is disclosed. A safety controller receives one or more input signals corresponding to operating conditions along the track. A safety program executing in the safety controller monitors the state of the input signals to determine whether a safety function is to be executed. When a safety program is executed, the safety controller transmits an output signal to one or more segment controllers present in one section along the track. Each segment controller is responsible for regulating current flow to the coils mounted to the corresponding track segment. In response to the signal from the safety controller, each segment controller in the section controls the power output to the coils along that section of track to achieve the safe operation desired in that segment.

A method and system for motion control of movers in an independent cart system is disclosed. In one implementation, the independent cart system includes a plurality of track segments, each section having a respective controller. One of the controllers receives a motion command for a plurality of carts, respectively. The controller generates a force command for each of the plurality of carts and transmits the respective commands to the track segments commutating the plurality of carts.

A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.

A method for fault detection in a fabrication facility is provided. The method includes moving a wafer carrier using a transportation apparatus. The method further includes measuring an environmental condition within the wafer carrier or around the wafer carrier using a metrology tool positioned on the wafer carrier during the movement of the wafer carrier. The method also includes issuing a warning when the detected environmental condition is outside a range of acceptable values.

The present document discloses a conveyor system comprising a plurality of workpiece carriers (WPC), each adapted for supporting at least one workpiece (WP) during transportation, a conveyor (10, 10a, 10b, 10c, d), adapted for transporting the workpiece carriers (WPC), at least one flow device (3, 4, 5, 6) for controlling a movement of one of the workpiece carriers (WPC) relative to the conveyor (10, 10a, 10b, 10c, 10d), the flow device (3, 4, 6) comprising a local controller (30, 40), at least one workpiece carrier sensor and at least one actuator, and a central controller (100), which is in data communication with the flow device, and having a memory containing a flow plan comprising data describing an intended flow of workpieces in the conveyor system. The document also discloses a method of operating a conveyor system, stop devices and switch device for use in such a conveyor system.

A method for reconciliation in a drug filling line includes providing a batch number relating to a predetermined batch of containers to be filled with a drug. Each one of the containers is marked with a unique identifier differentiating and/or identifying each container among others. Each unique identifier is stored and associated with the batch number by a processing and control unit, before starting the filling step of each container. Filled containers are flashed by at least one identifier reader to check correspondence between the batch number being processed and each filled container, in order to validate or reject in real time each container with respect to a predetermined batch being processed by the filling line.

A system and method for producing products based upon demand are disclosed. In some cases, the products include containers and the contents therein. The containers are disposed on vehicles and are independently routable along a track system and are deliverable to at least one unit operation station. A control system: receives demand for finished products; determines a route for vehicles based upon the status of one or more unit operation stations; and causes a vehicle to progress along a determined route to create one or more of the demanded finished products. The system may be used to produce the same fluent products, different fluent products, and other types of products including assembled products.

Various embodiments described herein relate to controlling an accumulation conveyor that comprises at least a first zone that is upstream of a second zone and the second zone that is upstream of a third zone. A second control module associated with the second zone receives a third feedback signal, indicating that a third sensor is blocked, from a third control module associated with the third zone. The second control module sets a second drive assembly associated with the second zone to a disengaged state, and receives a first signal from a first control module associated with the first zone. The first signal indicates that one of a first article having an irregular boundary or a second article having a regular boundary exits from the first zone. The second control module controls the second drive assembly and a second brake assembly based on the indication by the first signal.

An autonomous cargo handling system having a sensor self-calibration system may comprise a sensing agent configured to monitor a sensing zone, and a system controller in electronic communication with the first sensing agent. The system controller may be configured to receive structural cargo deck data from the first sensing agent, generate a real-time cargo deck model, identify a cargo deck component in the real-time cargo deck model, and determine a position of the sensing agent relative to the cargo deck component.

The present invention provides various aspects for supporting multilevel fabricators. In some examples, the multilevel fabricators may include a cleanspace region for moving work material. In some examples, panels of filters may be positioned to support the cleanspace. In some embodiments existing processing equipment and automation are placed into the new environment. In other embodiments the processing equipment is placed and new automation equipment is used. Automated tool placement equipment may be used to place the equipment. In some examples, automated tool handling equipment may be used to remove and replace processing equipment into the multilevel fabricator.