A temperature control unit has an acquisition unit that acquires first information regarding driving and stopping of a heater and second information indicating whether or not to subject a time proportional output to an SSR to autonomous control and an SSR control unit that performs time proportional output of an instruction to drive or stop the heater, to the SSR.

A temperature control unit has an acquisition unit that acquires first information regarding driving and stopping of a heater and second information indicating whether or not to subject a time proportional output to an SSR to autonomous control and an SSR control unit that performs time proportional output of an instruction to drive or stop the heater, to the SSR.