G05B2219/21099

CONTROL DEVICE, CONTROL METHOD, AND SEMICONDUCTOR MANUFACTURING SYSTEM
20240427317 · 2024-12-26 ·

A control device for controlling a semiconductor manufacturing apparatus including a local operation terminal displaying an apparatus screen of the semiconductor manufacturing apparatus and one or more remote operation terminals displaying the apparatus screen, includes: a login state management unit that manages the local operation terminal and at least one of the remote operation terminals that are logged into the same semiconductor manufacturing apparatus; and a communication unit that provides a function of posting and browsing a message between a first user operating the local operation terminal and a second user operating the at least one of the remote operation terminals that are logged into the same semiconductor manufacturing apparatus, by transmitting screen data enabling the posting and browsing of the message to the local operation terminal and the at least one of the remote operation terminals that are logged into the same semiconductor manufacturing apparatus.