Patent classifications
G05B2219/32096
MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS
A method includes identifying first parameters of a first processing chamber of a semiconductor fabrication facility. The first parameters include first input parameters and first output parameters. The method further includes identifying second parameters of a second processing chamber of the semiconductor fabrication facility. The second parameters include second input parameters and second output parameters. The method further includes generating, by a processing device based on the first parameters and the second parameters, composite parameters comprising composite input parameters and composite output parameters. Semiconductor fabrication is based on the composite parameters.
Method for operating a handling system for handling containers with recipe creation for the control
A method for operating a system for handling containers, wherein said system for handling containers has a first handling device which handles the containers in a first predetermined manner, and at least one second handling device which handles the containers in a second predetermined manner, and a transport device which transports the containers from the first handling device to the second handling device. A control device controls the handling of the containers by at least one of the two handling devices using at least one first physical parameter which is characteristic of environmental conditions at an operating site of the system and/or using at least one second physical parameter which is characteristic of a physical property of the containers to be handled, wherein at least one of these physical parameters is determined and an operating recipe is determined independently of the system and taking this parameter as a basis, which operating recipe is used by the control device to control at least one handling device.
Apparatus and Method for Distributed Batch Control for Modular Automation
A method and system are provided for distributing master recipes for process control systems comprising storing a single master recipe on a server having an enterprise database and communicating said single master recipe to each of a plurality of manufacturing units. Control recipes are seamlessly created using common master recipes across multiple process plants to deliver consistent product quality with enough flexibility and interoperability in accordance with ISA S88 batch standards.
Matching process controllers for improved matching of process
Described herein are methods and systems for chamber matching in a manufacturing facility. A method may include receiving a first chamber recipe advice for a first chamber and a second chamber recipe advice for a second chamber. The chamber recipe advices describe a set of tunable inputs and a set of outputs for a process. The method may further include adjusting at least one of the set of first chamber input parameters or the set of second chamber input parameters and at least one of the set of first chamber output parameters or the set of second chamber output parameters to substantially match the first and second chamber recipe advices.
Methods and apparatus to define stages for multi-variate batch control analytics
Methods and apparatus to define stages for multi-variate batch control analytics are disclosed. An example method includes determining, with the processor, a current stage in a current batch process based on a current value of a batch stage parameter. The current value of the batch stage parameter determined based on process control data associated with process parameters in the current batch process. The current stage determined independent of batch events defined by at least one of a start or an end of procedures, unit procedures, operations, or phases in a batch recipe. The example method further includes applying, with the processor, a model to the current batch process, the model corresponding to the current stage.
Substrate processing system, substrate processing apparatus and management device
There is provided a configuration that includes a plurality of substrate processing apparatuses and a management device for managing the plurality of substrate processing apparatuses. Upon receiving information specifying a substrate processing apparatus as a reference and file information designating a predetermined device file, the plurality of substrate processing apparatuses transmits request data including first device information and first data information to the management device. Upon receiving the request data, the management device transmits the received request data to the reference substrate processing apparatus. The reference substrate processing apparatus creates response data including second data information responding to the first data information and transmits the created response data to the management device. Upon receiving the response data, the management device transmits the received response data to the plurality of substrate processing apparatuses. The plurality of substrate processing apparatuses acquires the second data information from the response data.
Batch authoring tool and bioreactor control system
A bioreactor control system comprises a batch server for controlling a bioreactor system in response to a recipe, a batch software system for generating a control sequence for the bioreactor system via the batch server for implementing the recipe, and a recipe conversion system that inputs the recipe into the batch software system. Preferably, the recipe conversion system reads a word processor file containing the recipe and interprets styles applied to text in the word processor file as indicating equipment and phases of the recipe to the recipe conversion system. Generally, the bioreactor system includes one or more bioreactors and additional hardware to perform the upstream and downstream processing. The document properties of the word processor file containing the recipe are applied as header information for the recipe input into the batch software system. This system solves a problem associated with traditional batching software systems, in which the authoring of recipes on the systems can be relatively arcane. Here, the recipe can be authored on a common word processor.
METHOD FOR OPERATING A HANDLING SYSTEM FOR HANDLING CONTAINERS WITH RECIPE CREATION FOR THE CONTROL
A method for operating a system for handling containers, wherein said system for handling containers has a first handling device which handles the containers in a first predetermined manner, and at least one second handling device which handles the containers in a second predetermined manner, and a transport device which transports the containers from the first handling device to the second handling device. In accordance with the invention, a control device controls the handling of the containers by at least one of the two handling devices using at least one first physical parameter which is characteristic of environmental conditions at an operating site of the system and/or using at least one second physical parameter which is characteristic of a physical property of the containers to be handled, wherein at least one of these physical parameters is determined and an operating recipe is determined independently of the system and taking this parameter as a basis, which operating recipe is used by the control device to control at least one handling device.
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND MANAGEMENT DEVICE
There is provided a configuration that includes a plurality of substrate processing apparatuses and a management device for managing the plurality of substrate processing apparatuses. Upon receiving information specifying a substrate processing apparatus as a reference and file information designating a predetermined device file, the plurality of substrate processing apparatuses transmits request data including first device information and first data information to the management device. Upon receiving the request data, the management device transmits the received request data to the reference substrate processing apparatus. The reference substrate processing apparatus creates response data including second data information responding to the first data information and transmits the created response data to the management device. Upon receiving the response data, the management device transmits the received response data to the plurality of substrate processing apparatuses. The plurality of substrate processing apparatuses acquires the second data information from the response data.
Method, system and computer readable medium for managing design updates in a manufacturing execution system
In a method and a system for managing product definition updates for controlling a manufacturing process via a MES system, design information entities each defining manufacturing specifications for a specific product and including sets of data concerning different manufacturing steps are downloaded to the MES system. At the first download, first and second MES information entities are created and stored. The first entities have associated second entities each including data for a manufacturing step and include links to the associated second entities. At each update of a design information entity, a differential package including the whole of the data for a set having undergone changes and for newly added sets, and an identification for unchanged sets, is downloaded. A new version of the second entities corresponding to sets having undergone changes and/or additional second entities corresponding to sets of data that have been added are created and stored.