A substrate processing system includes a module controller that creates a log file in which a data count corresponding to timing of sampling operation data is added to the operation data of a module sampled in a predetermined sampling period, a main control apparatus that is connected to the module controller, receives the log file and start time information indicating a time at which collection of the operation data included in the log file starts from the module controller, converts the data count to a time stamp from the start time information and creates a data file including the time stamp and the operation data, and a host computer that receives the data file provided from the main control apparatus.

Provided is a device management system to suppress decreases in producibility. A device management system manages a plurality of production-line-configuring devices configuring a production line to produce products, and has a device state data storage part, an analysis part, and a server output part. The production-line-configuring devices include a combination weighing machine to weigh the products, a bag-making and packaging machine to package the products, and a boxing device to box the packaged products into boxes. The device state data storage part accumulates device state data, which is information pertaining to the components included in the production-line-configuring devices. The analysis part performs an analysis process to analyze the device state data accumulated in the device state data storage part. The server output part outputs maintenance information, which pertains to maintenance of the components, on the basis of the results of the analysis process.

A numerical controller controls a machine tool that measures a coordinate value of an object to be measured based on a position of a movable axis controlled by a manual operation. The numerical controller stores a plurality of pieces of history information formed by associating the coordinate value of the movable axis and an elapsed time from a reference time point when the coordinate value is acquired, analyzes timing when position adjustments of the movable axis are completed based on the stored history information, and sets the coordinate value of the movable axis at the analyzed timing.

A numerical control device includes an alarm corrective measure operation history information storage unit, an operation history information acquiring unit, an alarm corrective measure operation history information recording unit, and an alarm corrective measure operation history information extracting unit. The alarm corrective measure operation history information recording unit has an alarm corrective measure operation history information recording optimization section, which optimizes information on an operation included in generated alarm corrective measure operation history information to release an alarm, and the alarm corrective measure operation history information extracting unit has an alarm corrective measure operation history information extraction optimization section, which optimizes the extracted alarm corrective measure operation history information to release an alarm.

A method includes obtaining history trend data of a process variable. The method also includes determining one or more change points in a mean value of the process variable for a predetermined time interval in the history trend data using change point analysis. The method further includes detecting one or more significant change points that occur in the mean value of the process variable during the predetermined time interval. In addition, the method includes, for each detected significant change point, providing a notification to a user of the significant change point, receiving information from the user about a cause of the significant change point and generating an event in a log. The event is based on the significant change point and the information received from the user about the significant change point.

A trace memory that stores trace logs of multiple feeders set on a feeder setting table of a component mounter is provided in the feeder setting table, and while the component mounter is operating, trace logs of each feeder are output from the control sections of the multiple feeders on the feeder setting table to the feeder setting table, and are stored by a communication control section of the feeder setting table in the trace memory linked to identification information of each feeder. By this, it is possible to save trace logs from multiple feeders on the feeder setting table all together in a shared trace memory, such that it is not necessary to load trace memory on each feeder, thereby meeting requirements of compact feeders and lower costs.

In a robot system, a data amount of operation information (log) to be transferred or recorded is reduced, thereby enabling the operation information (log) to be transferred or recorded with a low load. The system has a control unit for controlling the operation of a robot of a robot device and transfers a log regarding the robot operation to a managing terminal. While making the robot operative, the control unit generates log data regarding the robot operation and stores into a short-term storage log recording unit (temporary storage device) (log data generating step). When log transfer timing comes, a part of the log data stored in the recording unit (temporary storage device) is extracted and transferred as a log to a log storage device in accordance with the robot operation (log transferring step).

A substrate processing system includes a module controller that creates a log file in which a data count corresponding to timing of sampling operation data is added to the operation data of a module sampled in a predetermined sampling period, a main control apparatus that is connected to the module controller, receives the log file and start time information indicating a time at which collection of the operation data included in the log file starts from the module controller, converts the data count to a time stamp from the start time information and creates a data file including the time stamp and the operation data, and a host computer that receives the data file provided from the main control apparatus.

This activity recorder for recording, as activity data, an activity of a worker, includes: a first specification unit for specifying the worker; a second specification unit for specifying a position of the worker; a third specification unit for specifying a target of the worker; a fourth specification unit for specifying a mode of the worker; and a recording unit for recording, as the activity data, the worker, the position, the target, and the mode, with a specified time as an activity time associated therewith, the worker, the position, the target, and the mode having been respectively specified by the first specification unit, the second specification unit, the third specification unit, and the fourth specification unit.

An event analysis device having an event collector for collecting event log data representing an operation history by a DCS operator; an event analyzer for analyzing the event log data, and extracting basic unit operations or unit operations representing an operation method based on operations of the DCS operator or an operation intention based on operations of the DCS operator; an operation sequence extractor for extracting operation sequences which the basic unit operations or the unit operations are aligned in accordance with time order in every service time period; an operation clusterer for clustering the operation sequences based on similarity among the operation sequences extracted in every service time period; and an operation procedure generator for analyzing the operation sequences clustered in same type, and estimating a structure of the operation procedure based on the operation of the DCS operator.