The invention relates to a cassette supply system to store and handle cassettes for substrates and a processing apparatus for processing substrates equipped with said system. The system having a cassette storage provided with base plate constructed and arranged to support cassettes. Also a cassette handler with an end effector with at least one protrusion to support and position the cassette on the end effector is provided to transfer cassettes to and from the base plate. The base plate may be provided with a substantially flat surface to support the cassettes.

The invention relates to a cassette supply system to store and handle cassettes for substrates and a processing apparatus for processing substrates equipped with said system. The system having a cassette storage provided with base plate constructed and arranged to support cassettes. Also a cassette handler with an end effector with at least one protrusion to support and position the cassette on the end effector is provided to transfer cassettes to and from the base plate. The base plate may be provided with a substantially flat surface to support the cassettes.

Provided is a teaching method for teaching a transfer position of a consumable member in a cassette included in a substrate processing system, the substrate processing system having a transfer device configured to transfer the consumable member, and a storage module where the cassette accommodating a plurality of the consumable members is set; the teaching method comprising the steps of: (A) recognizing setting of the cassette in the storage module; and (B) after the step (A), detecting the cassette by a sensor of the transfer device and calculating three-dimensional coordinates of the cassette based on detection information of the sensor.