A method for checking positioning accuracy of a CNC machine with a machine tool head and a machine table using an x, y, z coordinate system, the method comprising: a) arranging a plurality of vessels on the table, the vessels in fluid connection with each other to form a system of vessels, the vessels filled with a liquid, b) mounting a distance sensor to the tool head, c) positioning the tool head to a position above the surface of the liquid in one of the vessels, d) a determining the z coordinate for which the distance sensor touches the surface of the liquid, or, for a predetermined position of the tool head in z direction above the liquid, determining the distance between the distance sensor and the liquid; steps c) and d) are repeated for each vessel to determine a z coordinate of the surface of the liquid.

A semiconductor wafer transfer device has a wafer positioning deskewing method via steps of initially setting parameters for the size of a wafer to be measured; collecting a motor rotational angle initialization settings for the size of the wafer to be measured; collecting motor angle data .sub.i and optical calibrator optical calibrator shading length data s.sub.i; calculating the wafer turning angle .sub.i and the wafer edge to center of rotation distance data .sub.i. The distance between the edge of the wafer to be measured and the center of the rotating suction cup is determined to the center of the rotating suction cup is within the specified range.

A method of correcting a track of a cutting edge is provided. With movement of the cutting edge, a point on the cutting edge in contact with the rotation symmetry plane is moved along the cutting edge from a first end portion of the cutting edge to a second end portion of the cutting edge opposite to the first end portion. The correction method includes measuring, by a measurement unit, a shape of the cut and machined rotation symmetry plane, calculating, by an operation unit, an error of the measured shape of the rotation symmetry plane from a target shape of the rotation symmetry plane in a direction of the axial line of rotation, and correcting, by the operation unit, a component in the direction of the axial line of rotation of a track of a point of cutting based on the error.

A machine learning device provided in a controller for controlling a wire electrical discharge machine uses state variables (including data relating to a correction amount, a machining path, machining conditions, and a machining environment) observed by a state observation unit and determination data acquired by a determination data acquisition unit to machine-learn a correction for a machining path. Using the learning result, the machining path can be corrected automatically and accurately on the basis of a partial machining path, the machining conditions and the machining environment of the machining performed by the wire electrical discharge machine.

A numerical control device controlling a machine tool capable of machining on orthogonal three axes includes a parameter storage to store a noise-command allowable width to be used for determining whether to perform movement based on a movement command, and a path-correction processor to compare an absolute value of a movement amount according to a movement command in a command non-target axis direction that is a direction of an axis not included in a designated plane with the noise-command allowable width when a machining program block includes the movement command in the command non-target axis direction, determine the movement command in the command non-target axis direction to be a noise command when the absolute value of the movement amount according to the movement command in the command non-target axis direction is smaller, and perform path correction to set a movement amount according to the noise command to zero.

A numerical controller for controlling a machine tool having a parallel link mechanism specifies a commanded position and a commanded posture of a tool by analyzing a program command, corrects the commanded posture while maintaining the commanded position when a combination of the specified commanded position and commanded posture is not feasible, and outputs the commanded position and the corrected posture which has been corrected to the machine tool. In this way, machining in the unrealizable region is realised by the machine tool having the parallel link mechanism.

A servomotor control device includes: a servomotor, detection unit, driven body, connection mechanism, and motor control unit, in which the motor control unit includes: a force estimation section that estimates a drive force acting on the driven body at a connection part between the connection mechanism and the driven body; a correction amount generation section that generates a correction amount for correcting the position command value, based on the drive force estimated and a constant for correction; and a rigidity estimation section that gradually increases the constant for correction in a state suspending generation of the position command value, and estimates a magnitude of rigidity of the connection mechanism based on the constant for correction when a variation point occurs in behavior of rotation position information of the servomotor detected, drive force estimated, or correction amount generated.

A servomotor control device includes: a servomotor, detection unit, driven body, connection mechanism, and motor control unit, in which the motor control unit includes: a force estimation section that estimates a drive force acting on the driven body at a connection part between the connection mechanism and the driven body; a correction amount generation section that generates a correction amount for correcting the position command value, based on the drive force estimated and a constant for correction; and a rigidity estimation section that gradually increases the constant for correction in a state suspending generation of the position command value, and estimates a magnitude of rigidity of the connection mechanism based on the constant for correction when a variation point occurs in behavior of rotation position information of the servomotor detected, drive force estimated, or correction amount generated.

A tool-path correcting apparatus includes a cut-point calculating unit that calculates, on the basis of tool path data, tool data, and shape data, cut point information, which is information concerning cut points by a tool on a machining curved surface of a machining shape at the time when the tool is disposed at command points described in the tool path data, a correction-command-point extracting unit that extracts, on the basis of the tool path data and the cut point information, correction command points, which are command points that should be corrected, from command points described in the tool path data, a command-point-correcting-direction determining unit that determines, on the basis of the correction command points, command point correcting directions, which are directions in which the correction command points should be corrected, and a tool-path-data correcting unit that corrects the tool path data.

A numerical controller sets a parameter actually used for servo control on the basis of command data generated by analyzing a machining program. Based on the set parameter and a predefined allowable position deviation amount, a feed speed which is given by a position deviation not exceeding the predefined allowable position deviation amount is calculated. Then, when a feed speed commanded by the command data is larger than the calculated feed speed, the feed speed commanded by the command data is clamped at the calculated feed speed.