A control device, a control program and a control system are provided. The control device includes: a first identification device for giving a first command as a command value to a drive device and determining a torque required for the controlled object to execute the first command; a second identification device for giving a second command as the command value and a third command as a compensation command to the drive device and determining a preceding switching time based on a response from the controlled object; a command value updating device for sequentially updating the command value based on a predetermined target trajectory; and a compensation command updating device for sequentially updating the compensation command based on the command value. The compensation command updating device updates the compensation command according to a moving direction after a reversal of the moving direction of the controlled object in the target trajectory.

A position controller includes a position detector, a speed command operator, a first adder, a torque command operator, a second adder, a drive unit, a runout amount correcting device, and a third adder. The runout amount correcting device is configured to employ a value related to deviation between a command value and a detection value in physical quantity of a movable part as a reference signal. The runout amount correcting device is configured to calculate a position correction amount from rotation angle information of the main spindle and the reference signal. The runout amount correcting device is configured to estimate a runout amount of a cutting edge of the tool from the reference signal. The runout amount correcting device is configured to calculate the position correction amount such that influences of the respective cutting edges appearing in the reference signal are leveled.

Disclosed are a method, a device and a system for improving system accuracy of an X-Y motion platform, and the method includes: taking a picture of a preset calibration board synchronously as a controlled equipment on an X-Y motion platform moves, and analyzing the picture to obtain pixel coordinates of a calibration point in the picture, where the preset calibration board is taken as a reference; acquiring actual coordinates of the calibration point on the calibration board, and calculating actual position coordinates of the controlled equipment on the X-Y motion platform from the actual coordinates and the pixel coordinates of the calibration point; and adjusting a motion control system of the X-Y motion platform according to the actual position coordinates, to control the motion of the X-Y motion platform to perform motion compensation for the controlled equipment. With the technical solution of the invention, the system accuracy can be improved, and the requirements for assembly and device selection can be reduced.

A method includes receiving, by a processing device, position error data from one or more motors of a process chamber. The method further includes performing preprocessing of the position error data. The method further includes transforming the position error data to a frequency domain. The method further includes determining, based on the frequency domain position error data, that a vibration fault has occurred in connection with the process chamber. The method further includes performing a corrective action in view of the vibration fault.

A method includes receiving first sensor data, generated during a manufacturing process by sensors associated with a substrate manufacturing chamber. The method further includes receiving simulated sensor data generated by a trained physics-based model. The method further includes determining which one or more components of the manufacturing chamber contribute to a difference between the first sensor data and the simulated sensor data. The method further includes causing performance of a corrective action in view of the difference.

This numerical control device includes a calculation unit that calculates, from a machining program, a start point and an end point of a reciprocating movement of a feed shaft; a control unit that synchronous controls, between the start point and the end point calculated by the calculation unit, a feed movement of the feed shaft and a relative rotational movement between a tool and a workpiece; and a determination unit that determines whether a condition for reversing the feed direction of the feed shaft has been satisfied before the feed shaft reaches the start point or the end point during synchronous control. When the determination unit determines that the condition for reversing the feed direction of the feed shaft has been satisfied, the control unit reveres the feed direction of the feed shaft before the feed shaft reaches the start point, or the end point.

Disclosed are a method, a device and a system for improving system accuracy of an X-Y motion platform, and the method includes: taking a picture of a preset calibration board synchronously as a controlled equipment on an X-Y motion platform moves, and analyzing the picture to obtain pixel coordinates of a calibration point in the picture, where the preset calibration board is taken as a reference; acquiring actual coordinates of the calibration point on the calibration board, and calculating actual position coordinates of the controlled equipment on the X-Y motion platform from the actual coordinates and the pixel coordinates of the calibration point; and adjusting a motion control system of the X-Y motion platform according to the actual position coordinates, to control the motion of the X-Y motion platform to perform motion compensation for the controlled equipment. With the technical solution of the invention, the system accuracy can be improved, and the requirements for assembly and device selection can be reduced.

A numerical controller includes: a model holding unit that holds a machine model, the machine model being a model that simulates deformation of a mechanical structure accompanying motion of the mechanical structure in axial directions and representing an error amount as an amount of displacement of a tool; a machining error estimation unit that estimates an error direction and the error amount in the error direction on the basis of axis data that is data on drive of a drive mechanism and the machine model, the error direction being a direction in which displacement of the tool occurs among the axial directions; and a correction amount arithmetic unit that selects one or more of the axes subject to correction, and performs arithmetic to find a correction amount used for correction of a command to be output to the drive mechanism for the axis selected.

A numerical controller includes: a model holding unit that holds a machine model, the machine model being a model that simulates deformation of a mechanical structure accompanying motion of the mechanical structure in axial directions and representing an error amount as an amount of displacement of a tool; a machining error estimation unit that estimates an error direction and the error amount in the error direction on the basis of axis data that is data on drive of a drive mechanism and the machine model, the error direction being a direction in which displacement of the tool occurs among the axial directions; and a correction amount arithmetic unit that selects one or more of the axes subject to correction, and performs arithmetic to find a correction amount used for correction of a command to be output to the drive mechanism for the axis selected.

A semiconductor wafer transfer device has a wafer positioning deskewing method via steps of initially setting parameters for the size of a wafer to be measured; collecting a motor rotational angle initialization settings for the size of the wafer to be measured; collecting motor angle data .sub.i and optical calibrator optical calibrator shading length data s.sub.i; calculating the wafer turning angle .sub.i and the wafer edge to center of rotation distance data .sub.i. The distance between the edge of the wafer to be measured and the center of the rotating suction cup is determined to the center of the rotating suction cup is within the specified range.