An apparatus for chemical mechanical polishing includes a support for a polishing pad having a polishing surface, and an electromagnetic induction monitoring system to generate a magnetic field to monitor a substrate being polished by the polishing pad. The electromagnetic induction monitoring system includes a core and a coil wound around a portion of the core. The core includes a back portion, a center post extending from the back portion in a first direction normal to the polishing surface, and an annular rim extending from the back portion in parallel with the center post and surrounding and spaced apart from the center post by a gap. A width of the gap is less than a width of the center post, and a surface area of a top surface of the annular rim is at least two times greater than a surface area of a top surface of the center post.

A method for in-situ measurement of a thickness of a coating deposited by a deposition process, includes the steps of initiating deposition within a deposition chamber such that a first coating forms on an outer surface of a probe disposed in the deposition chamber, wherein the probe comprises a coil assembly including at least one coil, wherein the probe is separated by a distance from a substrate disposed within the deposition chamber; exciting the coil assembly with a first alternating current to produce a first time-varying magnetic field, the first time-varying magnetic field generating an eddy current in the first coating; determining a metric related to an inductance or resistance of the coil assembly, wherein a value of the metric is related to a first thickness of the first coating and results at least partially from an eddy current magnetic field produced by an eddy current in the coating; and correlating the first thickness of the first coating to a second thickness of a second coating deposited on a surface of the substrate.

An inspection robot incudes a robot body, at least two sensors, a drive module, a stability assist device and an actuator. The at least two sensors are positioned to interrogate an inspection surface and are communicatively coupled to the robot body. The drive module includes at least two wheels that engage the inspection surface. The drive module is coupled to the robot body. The stability assist device is coupled to at least one of the robot body or the drive module. The actuator is coupled to the stability assist device at a first end, and coupled to one of the drive module or the robot body at a second end. The actuator is structured to selectively move the stability assist device between a first position and a second position. The first position includes a stored position. The second position includes a deployed position.

A flaw detection apparatus for use with a tubular has a helixing conveyor adapted to receive the tubular thereon, a frame positioned over a center section of the helixing conveyor, and a plurality of inspection devices retained by the frame so as to detect flaws in the tubular as said helixing conveyor moves the tubular through the frame. The helixing conveyor has a plurality of sets of rollers that are angularly adjustable relative to a longitudinal axis of the helixing conveyor. The plurality of inspection devices include a longitudinal inspection device, a Hall Effect wall thickness inspection device, an oblique inspection device, a transverse inspection device, and a grade verification/comparator device.

A system includes an inspection robot having an input sensor comprising a laser profiler and a plurality of wheels structured to engage a curved portion of an inspection surface, wherein the laser profiler is configured to provide laser profiler data of the inspection surface; a controller, comprising: a profiler data circuit structured to interpret the laser profiler data; determine a feature of interest is present at a location of the inspection surface in response to the laser profiler data; and wherein the feature of interest comprises a shape description of the inspection surface at the location of the feature of interest.

A system includes an inspection robot for performing an inspection on an inspection surface with an inspection robot, the apparatus comprising a position definition circuit structured to determine an inspection robot position on the inspection surface; a data positioning circuit structured to interpret inspection data, and to correlate the inspection data to the inspection robot position on the inspection surface; and wherein the data positioning circuit is further structured to determine position informed inspection data in response to the correlating of the inspection data with the inspection robot position, wherein the position informed inspection data comprises absolute position data.

A method for electrically activating a measurement stand with a movement of at least one measuring probe (26) from a starting position (31) into a measuring position (32) and also a measurement stand for supporting a measuring probe, in particular for measuring the thickness of thin layers, in which a motor (34) is activated by a control arrangement (25), which moves a ram (23) up and down via a drive arrangement (35), wherein a retainer (24) is provided on the ram (23), to which retainer the measuring probe (26) can be fastened, in which a freewheel is activated between the drive arrangement (35) and the ram (33) as soon as the measuring probe (26) or retainer (23) is set down in the measuring position (32) on an item to be measured (14) and the movement of the drive arrangement (35) is decoupled from the vertical movement of the ram (23), wherein a movement speed of the at least one measuring probe (14) from the starting position (31) into the measuring position (32) is reduced by mechanical damping or electrical damping before the measuring position (32) is reached.

The present invention relates to a measuring device for determining the thickness of a dielectric layer on a conductive substrate. The device comprises a resonance cavity for electromagnetic fields which has a rotationally symmetrical wall, an end plate and an open end and is adapted to be positioned with the open end on the dielectric layer. The device further comprises an antenna which is adapted to excite an electro-magnetic field in the resonance cavity, a reflection measuring unit for determining at least one property of the electromagnetic field and an evaluation circuit for determining the thickness of the dielectric layer from the at least one property of the electromagnetic field. A diameter of the rotationally symmetrical wall varies in a longitudinal direction of the resonance cavity.

Metrology systems and processing methods for continuous lithium ion battery (LIB) anode pre-lithiation and solid metal anode protection are provided. In some embodiments, the metrology system integrates at least one complementary non-contact sensor to measure at least one of surface composition, coating thickness, and nanoscale roughness. The metrology system and processing methods can be used to address anode edge quality. The metrology system and methods can facilitate high quality and high yield closed loop anode pre-lithiation and anode protection layer deposition, alloy-type anode pre-lithiation stage control improves LIB coulombic efficiency, and anode coating with pinhole free and electrochemically active protection layers resist dendrite formation.

A method of chemical mechanical polishing includes bringing a conductive layer of a substrate into contact with a polishing pad, supplying a polishing liquid to the polishing pad, generating relative motion between the substrate and the polishing pad, monitoring the substrate with an in-situ electromagnetic induction monitoring system as the conductive layer is polished to generate a sequence of signal values that depend on a thickness of the conductive layer, and determining a sequence of thickness values for the conductive layer based on the sequence of signal values. Determining the sequence of thickness values includes at least partially compensating for a contribution of the polishing liquid to the signal values.