A light detection and ranging (LIDAR) system includes a LIDAR measurement unit, a reference measurement unit, and a phase cancellation unit. The LIDAR measurement unit estimates a time for which a laser beam travels. The reference measurement unit determines a phase of a laser source. The phase cancellation unit identifies phase noise and cancels the phase noise from the laser beam, at least partially based on the phase of the laser source and the time for which the laser beam travels. The denoised signal is used to determine the range between a laser source and a target.

A digital measuring device implemented on a photonic integrated circuit, the digital measuring device including a tunable laser source implemented on the photonic integrated circuit configured to sweep over a frequency range to provide multi-wavelength light, a first waveguide structure implemented on the photonic integrated circuit configured to direct a first portion of light from the laser source at a moving object and receive light reflected from the moving object, a second waveguide structure implemented on the photonic integrated circuit configured to combine a second portion of light from the laser source with the light reflected from the moving object to produce a measurement beam, and a first detector implemented on the photonic integrated circuit configured to detect intensity values of the measurement beam to measure a distance between the digital measuring device and the moving object.

A sensor system includes a self-mixing interferometry sensor; a drive circuit configured to apply a modulated drive signal to an input of the self-mixing interferometry sensor; a mixer circuit configured to mix a modulated output of the self-mixing interferometry sensor with a local oscillator signal that is orthogonal to the modulated drive signal over a period of time; an integrator circuit configured to integrate an output of the mixer circuit over the period of time; and a processor configured to determine, using an output of the integrator circuit, at least one of a round-trip propagation time of electromagnetic radiation emitted by the self-mixing interferometry sensor and reflected back into the self-mixing interferometry sensor by an object or medium, or a velocity of the object or medium.

A five-degree-of-freedom heterodyne grating interferometry system, comprising a single frequency laser device (1) and an acousto-optic modulator (2); the single frequency laser device (1) emits a single frequency laser, and the single frequency laser is coupled by optical fiber and, after being split, enters the acousto-optic modulator (2) to obtain two linearly polarized lights of different frequencies, one being a reference light, and one being a measurement light; an interferometer lens group (3) and a measurement grating (4), used for forming the reference light and the measurement light into a measurement interference signal and a compensation interference signal; and multiple optical fiber bundles (5), respectively receiving the measurement interference signal and the compensation interference signal, each optical fiber bundle (5) having multiple multi-mode optical fibers respectively receiving signals at different positions on the same plane. The present measurement system has the advantages of high measurement precision, a large measurement range, not being sensitive to temperature drift, and small overall size, and can be used as a photoetching machine ultra-precision workpiece table position measurement system.

A truncated non-linear interferometer-based sensor system includes an input that receives an optical beam and a non-linear amplifier that generates a probe beam and a conjugate beam from the optical beam. The system's local oscillators are related to the probe beam and the conjugate beam. The system includes a sensor that transduces an input with the probe beam and the conjugate beam. The transduction detects changes in the phase of each of the probe beam and the conjugate beam. The system's phase sensitive detectors detect phase modulations between the respective local oscillators, the probe beam, and the conjugate beam and outputs phase signals based on detected phase modulations. The system measures phase signals indicative of the sensor's input resulting from a sum or difference of the phase signals. The measurement exhibits a quantum noise reduction in an intensity difference, a phase sum, or an amplitude difference quadrature.

An optical distance measurer includes: a beam splitter splitting a laser beam and outputting as measurement light and reference light; a measurement light beam splitter splitting the measurement light and outputting as first measurement light and second measurement light; a reference light beam splitter splitting the reference light and outputting as first reference light and second reference light; a first optical system having a first Rayleigh length, the first optical system emitting the first measurement light to a target object; and a second optical system having a second Rayleigh length different from the first Rayleigh length, the second optical system emitting the second measurement light to the target object; a first receiver receiving the first reference light and first reflection light that is the first measurement light reflected by the target object and outputting a first receiving signal indicating the first reference light and the first reflection light; and a second receiver receiving the second reference light and second reflection light that is the second measurement light reflected by the target object and outputting a second receiving signal indicating the second reference light and the second reflection light.

A tomographic imaging device includes a light source, a light pulse generator, a wave shaper, a splitter, a frequency shifter, a light path length changer, an optical detector, filters, a demodulator and an analyzer. The light pulse generator generates an optical pulse train from an output of the light source. The wave shaper modulates the optical pulse train by binary phase shift keying with PN codes. The splitter splits the pulse train into two signals, one is shifted by the frequency shifter, and one has a path length changed by the light path length changer. The optical detector inputs back scattered light from an object and the signal whose length has changed, and generates a difference signal. The filters filter the difference signals, and the demodulator demodulates the filter outputs. The analyzer calculates a reflection site of the measurement object by analyzing the output signal of the demodulator.

An interferometer system including: an optical system arranged to split a radiation beam from a laser source into a first beam along a first optical path and a second beam along a second optical path, and recombine the first beam and the second beam to a recombined beam, a detector to receive the recombined beam and to provide a detector signal based on the received recombined beam, and a processing unit, wherein a first optical path length of the first optical path and a second optical path length of the second optical path have an optical path length difference, and wherein the processing unit is arranged to determine a mode hop of the laser source on the basis of a phase shift in the detector signal.

A digital measuring device implemented on a photonic integrated circuit, the digital measuring device including a laser source configured to provide light, a first ring resonator configured to produce a first frequency comb of light from the laser source, wherein at least a portion of the first frequency comb of light is directed at a moving object, a local oscillator configured to provide a reference beam, at least one waveguide structure configured to combine the reference beam with light reflected from the moving object to produce a measurement beam, a first multiplexer configured to split the measurement beam into a plurality of channels spaced in frequency, and a plurality of detectors configured to detect an intensity value of each channel of the plurality of channels to measure a distance between the digital measuring device and the moving object.

A digital measuring device implemented on a photonic integrated circuit, the digital measuring device including a laser source configured to provide light, a first ring resonator configured to produce a first frequency comb of light from the laser source, wherein at least a portion of the first frequency comb of light is directed at a moving object, a local oscillator configured to provide a reference beam, at least one waveguide structure configured to combine the reference beam with light reflected from the moving object to produce a measurement beam, a first multiplexer configured to split the measurement beam into a plurality of channels spaced in frequency, and a plurality of detectors configured to detect an intensity value of each channel of the plurality of channels to measure a distance between the digital measuring device and the moving object.