G01B9/02057

OPTICAL INTERFERENCE RANGE SENSOR

A wavelength-swept light source projects a light beam. An interferometer includes a splitting unit that splits the light beam projected from the wavelength-swept light source into light beams radiated toward a plurality of spots on a measurement target. Each of the interference beam is generated by interference between a measurement beam radiated toward the measurement target and reflected at the measurement beam, and a reference beam passing through an optical path that is at least partially different from an optical path of the measurement beam. A light-receiving unit receives the interference beams from the interferometer. A processor calculates distance to the measurement target by associating a detected peak of the interference beams with one of the spots. The optical path length difference between the measurement target and the reference beam is made different among the light beams split in correspondence with the plurality of spots.

Illumination System with Etendue-Squeezing Module and Method Thereof
20230078844 · 2023-03-16 ·

Provided herein are devices and systems comprising a light source which provides a beam to an optical module via a multimode fiber, an interference objective module outputs the beam processed by the optical module and collects interference signals from a sample; and a detector which detects the interference signals from the interference objective module wherein the optical module comprises an etendue squeezing component configured to slice the beams to at least two sub-beams and homogenize the sub-beams to an illumination field and match the shapes of the illumination field with the region of interest.

OPTICAL INTERFERENCE RANGE SENSOR

A light source projects a light beam. An interferometer includes a splitting unit that splits the light beam. The interferometer generates interference beams with the respective split light beams. Each of the interference beam is generated by interference between a measurement beam radiated toward the measurement target and reflected at the measurement beam and a reference beam passing through an optical path. A light-receiving unit receives the interference beams. A processor calculates a distance to the measurement target by associating at least one detected peak with at least one of the spots in accordance with a mirror surface mode or a rough surface mode. The optical path length difference is made different among the split light beams. In the mirror surface mode, the processor uses a distance calculated based on a peak corresponding to a spot for which the optical path length difference is shortest.

Common path waveguides for stable optical coherence tomography imaging
11602271 · 2023-03-14 · ·

An OCT imaging system may include an OCT light source operable to emit an OCT light beam, and a beam splitter operable to split the OCT light beam into a sample beam, transferred to a sample arm waveguide, and a reference beam, transferred to a reference arm waveguide. The sample arm waveguide and the reference arm waveguide may be coupled together within a cladding, wherein the cladding improves a calibration of a generated OCT image by fixing axial movement of the sample arm and reference arm waveguides relative to one another. By routing long reference and sample arm waveguide fibers together in the OCT system using a sheath/cladding, OCT image offset due to asymmetrical fiber stretching can be minimized or eliminated.

Coherence range imaging using common path interference
11473896 · 2022-10-18 · ·

One or more devices, systems, methods and storage mediums for performing common path optical coherence tomography (OCT) with a controlled reference signal and efficient geometric coupling are provided. Examples of such applications include imaging, evaluating and diagnosing biological objects, such as, but not limited to, for Gastro-intestinal, cardio and/or ophthalmic applications, and being obtained via one or more optical instruments, such as, but not limited to, optical probes (e.g., common path probes), common path catheters, common path capsules and common path needles (e.g., a biopsy needle). Preferably, the OCT devices, systems methods and storage mediums include or involve a reference reflection or a reference plane that is at least one of: (i) disposed in the collimation field or path; and (ii) is perpendicular (or normal) or substantially perpendicular (or substantially normal) to light propagation. One or more embodiments may include beam shaping optics to properly image luminal or other hollow structures or objects.

Reflective condensing interferometer

The present invention provides a reflective condensing interferometer for focusing on a preset focus. The reflective condensing interferometer includes a concave mirror set, a convex mirror, a light splitting element, and a reflecting element. The concave mirror set has first and second concave surface portions which are oppositely located on two sides of a central axis passing through the preset focus and are concave on a surface facing the central axis and the preset focus. Light is preset to be incident in parallel to the central axis in use. The convex mirror is disposed between the concave mirror set and the preset focus on the central axis, and is convex away from the preset focus. The light splitting element vertically intersects with the central axis between the convex mirror and the preset focus. The reflecting element is disposed between the light splitting element and the convex mirror.

POLARIZING FIZEAU INTERFEROMETER
20230068859 · 2023-03-02 ·

The invention relates to the field of interferometry, in particular to Fizeau interferometers for improving a contrast of an interferogram. The Fizeau interferometer comprises a light source, a reference surface, a test surface positioned in on a support of the Fizeau interferometer and an imaging system. The Fizeau interferometer utilizes a polarizing reference surface to improve the contrast of the interferogram. The invention further relates to a method for using the Fizeau interferometer of the invention for improving contrast of an interferogram obtained by the Fizeau interferometer.

SYSTEMS AND METHODS FOR SEMICONDUCTOR CHIP SURFACE TOPOGRAPHY METROLOGY
20230144331 · 2023-05-11 ·

Systems and methods for measuring a surface topography of a semiconductor chip are disclosed. A disclosed system comprises a light source configured to provide low coherent light to a first beam splitter, a scanner configured to use the low coherent light reflected from the first beam splitter to scan positions on a surface of a semiconductor chip, a second beam splitter configured to receive reflected signals from the positions on the surface of the semiconductor chip, a detector configured to detect interference signals from a first output of the second beam splitter, wherein each of the interference signals corresponds to a respective one of the positions, and a spectrometer configured to detect spectrum signals from a second output of the second beam splitter, wherein each of the spectrum signals corresponds to the respective one of the positions.

Optical coherence tomography with graded index fiber for biological imaging
11647905 · 2023-05-16 · ·

A system for optical coherence tomography includes a source of optical radiation, an optical fiber, and a graded index fiber attached to a distal end of the optical fiber. The optical fiber and the graded index fiber are together configured to provide a common path for optical radiation reflected from a reference interface at a distal end of the graded index fiber and from a target.

Laser tracker with improved roll angle measurement
11656357 · 2023-05-23 · ·

The present disclosure relates to a tracking system for tracking the position and orientation of an object in an environment, the tracking system including: (a) a tracking base positioned in the environment; (b) a tracking target mountable to the object, wherein in use the tracking base is linked to the tracking target by: (i) a bidirectional light beam transmitted therebetween; and, (ii) a unidirectional light beam transmitted therebetween, said unidirectional light beam parallel to the bidirectional light beam; and, (c) at least one controller configured to determine a roll angle of the tracking target relative to the tracking base, the roll angle determined at least in part by signals received from a sensor housed in at least one of the tracking base and the tracking target that detects the unidirectional light beam.