Patent classifications
G01B9/02063
MEMS TUNABLE VCSEL POWERED SWEPT SOURCE OCT FOR 3D METROLOGY APPLICATIONS
Disclosed is an optical probe system that is capable of high speed, high precision, and high resolution 3D digitalization of engineered objects. The 3D dimensional data of the engineered object is measured using a swept source optical coherence tomography system with improved speed, spatial resolutions, and depth range. Also disclosed is a type of coordinate measurement machine (CMM) that is capable of performing high speed, high resolution, and non-contact measurement of engineered objects. The mechanic stylus in the touch-trigger probe of a conventional CMM is replaced with an optical stylus with reconfigurable diameter and length. The distance from the center of the optical stylus to the measurement probe is optically adjusted to match the height of the object to be measured quickly, which eliminates one dimensional movement of the probe and greatly improves the productivity.
AUTOMATIC OPTICAL PATH ADJUSTMENT IN HOME OCT
Retinal imaging systems and related methods employ a user specific approach for controlling the reference arm length in an optical coherence tomography (OCT) imaging device. A method includes restraining a user's head relative to an OCT imaging device. A reference arm length adjustment module is controlled to vary a reference arm length to search a user specific range of reference arm lengths to identify a reference arm length for which the OCT image detector produces an OCT signal corresponding to the retina of the user. The user specific range of reference arm lengths covers a smaller range of reference arm lengths than a reference arm length adjustment range of the reference arm length adjustment module.
OPTICAL COHERENCE TOMOGRAPHY WITH DISPERSED STRUCTURED ILLUMINATION
Apparatus and methods are presented for enhancing the acquisition speed or performance of Fourier domain optical coherence tomography. In preferred embodiments a plurality of wavelength combs containing interleaved selections of wavelengths from a multi-wavelength optical source are generated and projected onto a sample. In certain embodiments the wavelength combs are projected simultaneously onto a plurality of regions of the sample, while in other embodiments the wavelength combs are projected sequentially onto the sample. Light in the wavelength combs reflected or scattered from the sample is detected in a single frame of a sensor array, and the detected light processed to obtain a tomographic profile of the sample. In preferred embodiments the wavelength comb generator comprises a wavelength interleaver in the form of a retro-reflective prism array for imparting different displacements to different selections of wavelengths from the optical source.
IMAGING APPARATUS AND CONTROLLING METHOD THEREOF
An imaging apparatus for optical coherence tomographic imaging of the invention includes an objective optical system which causes illumination light to be incident on an imaging object in a specimen container and receives reflected light from the imaging object, a focus adjustor which adjusts a focus position of the objective optical system in an optical axis direction with respect to the specimen container, a temperature detector which detects a temperature of the objective optical system, and a calculator which calculates an adjustment amount of the focus position for an adjustment operation by the focus adjustor based on the temperature detected by the temperature detector and a correlation relationship of the temperature and the adjustment amount obtained in advance.
Automatic optical path adjustment in home OCT
Retinal imaging systems and related methods employ a user specific approach for controlling the reference arm length in an optical coherence tomography (OCT) imaging device. A method includes restraining a user's head relative to an OCT imaging device. A reference arm length adjustment module is controlled to vary a reference arm length to search a user specific range of reference arm lengths to identify a reference arm length for which the OCT image detector produces an OCT signal corresponding to the retina of the user. The user specific range of reference arm lengths covers a smaller range of reference arm lengths than a reference arm length adjustment range of the reference arm length adjustment module.
MEMS tunable VCSEL powered swept source OCT for 3D metrology applications
Disclosed is an optical probe system that is capable of high speed, high precision, and high resolution 3D digitalization of engineered objects. The 3D dimensional data of the engineered object is measured using a swept source optical coherence tomography system with improved speed, spatial resolutions, and depth range. Also disclosed is a type of coordinate measurement machine (CMM) that is capable of performing high speed, high resolution, and non-contact measurement of engineered objects. The mechanic stylus in the touch-trigger probe of a conventional CMM is replaced with an optical stylus with reconfigurable diameter and length. The distance from the center of the optical stylus to the measurement probe is optically adjusted to match the height of the object to be measured quickly, which eliminates one dimensional movement of the probe and greatly improves the productivity.
Machining Head for a Laser Machining Device
A processing head for a laser processing device adapted for processing a workpiece using laser radiation has: adjustable focusing optics to focus laser radiation in a focal spot having an adjustable distance from the processing head; an optical coherence tomograph to measure a distance between the processing head and the workpiece by measuring an optical interference between measuring light reflected by the workpiece and measuring light not reflected by the workpiece; a path length modulator that can change, synchronously with and dependent on a change of the focal spot distance from the processing head, an optical path length in an optical path along which measuring light propagates; a scanning device, which deflects the laser radiation in different directions; and a control device, which i) controls a focal length of the focusing optics in such a way that the focal spot is situated at a desired location on the workpiece, ii) receives, from the coherence tomograph, information representing the distance between the processing head and the workpiece, and iii) uses information received from the coherence tomograph for a continuous correction of a positioning of the focal spot on the workpiece.
STEERABLE FOCAL ADJUSTMENT FOR OPTICAL COHERENCE TOMOGRAPHY
A system and method for surface inspection of an object using optical coherence tomography (OCT) is provided. The method includes determining a surface profile of the object, the surface profile includes one or more regions on a surface of the object; moving the object relative to the OCT scanner head; and for each of the one or more regions on the surface of the object, performing: determining a working distance where the surface of the object at the respective region is within a present depth of field; determining an angle where the respective region is at the determined working distance from an OCT scanner head; directing the OCT scanner head at the determined angle towards the respective region when the respective region is at the determined working distance along the respective angle; and performing an A-scan of the object when the respective region is within the present depth of field.
ANTICIPATORY DEPTH OF FIELD ADJUSTMENT FOR OPTICAL COHERENCE TOMOGRAPHY
A system and method for surface inspection of an object using optical coherence tomography (OCT) with anticipatory depth of field adjustment is provided. The method includes determining a present working distance and one or more forward working distances; determining a present depth of field in which the surface of the object is in focus at the location of the present working distance and at as many of the consecutive forward surface locations as determined possible; changing to the present depth of field; performing an A-scan of the object; moving the object such that the scanner head is directed at each of the consecutive forward surface locations determined to be in the present depth of field; and performing an A-scan at each of the consecutive forward surface locations determined to be in the present depth of field.
ACQUIRING APPARATUS, ACQUIRING METHOD, AND OPTICAL SYSTEM MANUFACTURING METHOD
An acquiring apparatus includes a first light source, a measurement optical system, an image sensor, an adjusting unit, an interferometer, and a calculating unit configured to calculate a distance between adjacent target surfaces among the plurality of target surfaces based on an interference signal. The index surface, a surface containing the first point, a surface containing the second point, and the light receiving surface have a conjugate relationship with each other with respect to the measurement optical system.