The present disclosure relates to a method of correcting a three-dimensional image. To correct an image distorted by coherence gate curvature (CGC) occurring by an optical system, the method generates a three-dimensional image of a sample holder on which an object to be measured is placed from an interference signal, generates a CGC profile on the basis of an image of a cover glass of the sample holder appearing in the three-dimensional image, generates a CGC fitting curve from the CGC profile, and corrects the interference signal by using the CGC fitting curve. The present disclosure also relates to an OCT system capable of performing a method of correcting a three-dimensional image.

A device is provided for determining an orientation of an optical device of a coherence tomograph. The device has an optical reference geometry, a deflection optics configured to direct an optical measuring beam reflected by the optical device onto the optical reference geometry, and an evaluation unit configured to determine a distance between a first reference plane and at least one second reference plane of the optical reference geometry in order to determine the orientation of the optical device.

A system for optimizing optics is provided. The system is configured to calibrate a position of a reference arm of an interferometric imaging system such that an image of a sample is visible when the sample is positioned at a working distance of an objective lens to provide an initial calibrated position. An image is obtained using the initial calibrated position. Image quality of the obtained image is assessed to determine if the obtained image is a valid image. A path length of the reference arm is adjusted if it is determined that the obtained image is not a valid image. A difference between the calibrated position of the reference arm and the adjusted position of the reference arm is calculated. System elements are adjusted based on the calculated difference such that the ample is visible when the sample is positioned at the working distance at the adjusted position.

Systems and methods for measuring a surface topography of a semiconductor chip are disclosed. A disclosed system comprises a light source configured to provide low coherent light to a first beam splitter, a scanner configured to use the low coherent light reflected from the first beam splitter to scan positions on a surface of a semiconductor chip, a second beam splitter configured to receive reflected signals from the positions on the surface of the semiconductor chip, a detector configured to detect interference signals from a first output of the second beam splitter, wherein each of the interference signals corresponds to a respective one of the positions, and a spectrometer configured to detect spectrum signals from a second output of the second beam splitter, wherein each of the spectrum signals corresponds to the respective one of the positions.

A calibration method of optical coherence tomography device using a non-transmissive planar target includes obtaining three-dimensional image of a surface and an inside of a calibration target (T) by scanning the calibration target (T) using the optical coherence tomography device, and extracting a surface shape image of the calibration target (T) from the obtained the three-dimensional image; and calibrating the surface shape image of the calibration target (T) obtained by the optical coherence tomography device, according to an actual surface shape of the calibration target (T).

An optical interrogation system, e.g., an OFDR-based system, measures local changes, of index of refraction of a sensing light guide subjected to a time-varying disturbance. Interferometric measurement signals detected for a length of the sensing light guide are transformed into the spectral domain. A time varying signal is determined from the transformed interferometric measurement data set. A compensating signal is determined from the time varying signal which is used to compensate the interferometric measurement data set for the time-varying disturbance. Further robustness is achieved using averaging and strain compensation. The compensation technique may be applied along the length of the light guide.

The invention provides a method for calibration of an optical measurement system, which may be a heterodyne interferometer system, wherein a first optical axis and a second optical axis have a different optical path length, the method comprises: .sup.∘measuring a first measurement value along the first optical axis using a first measurement beam, .sup.∘measuring a second measurement value along the second optical axis using a second measurement beam, .sup.∘changing a wavelength of the first measurement beam and the second measurement beam, .sup.∘measuring a further first measurement value along the first optical axis using the first measurement beam with changed wavelength, measuring a further second measurement value along the second optical axis using the second measurement beam with changed wavelength, .sup.∘determining a cyclic error of the optical measurement system on the basis of the measured values, and .sup.∘storing a corrective value based on the cyclic error.

A laser processing apparatus includes a laser oscillator that oscillates processing laser light to be incident on a processing point on a processing surface of a workpiece, a coupling mirror that deflects or transmits the processing laser light and measurement light to be incident on the processing point toward the processing point, a measurement light deflection unit that changes an incident angle of the measurement light on the coupling mirror, a lens that concentrates the processing laser light and the measurement light on the processing point, a controller that controls the laser oscillator and the measurement light deflection unit, a measurement processor that measures a depth of a keyhole generated at the processing point by the processing laser light by using an optical interference signal based on an interference generated by an optical path difference between the measurement light reflected at the processing point and reference light, and a beam position measurement unit that measures positions of the processing laser light and the measurement light.

Generating a composite image of a non-flat surface includes: acquiring, using a microscope, multiple images of different areas of the non-flat surface, where each image includes a region of overlap with at least one adjacent image, the microscope having sufficient resolution to image in three dimensions a microstructure on the non-flat surface having a lateral dimension of 10 microns or less and a height of 10 nm or less; determining, for each of the images, a set of rigid body parameters relating a position and orientation of the test object in the image to a common coordinate system, where the set of rigid body parameters is determined by fitting the resolved microstructure in the overlap region in the image with the corresponding microstructure in the overlap region of the adjacent image; and combining the images based on the sets of rigid body parameters to generate a composite image.

An optical coherence tomographic device may include a light source, a measurement light generator, a reference light generator, an interference light generator, an interference light detector, and a processor. The interference light detector may include a first and second detector that convert interference light to interference signals, a first signal processing unit that samples the interference signal from the first detector, and a second signal processing unit that samples the interference signal from the second detector. Each of the first and second signal processing units may sample the interference signal at a timing from outside. Light generated by the measurement light generator may at least include first and second correction light. The processor may correct a time lag between sampling timings of the first and second signal processing units by using a first and second correction signal converted from the first and second correction light.