A controller is configured to perform at least a first characterization process prior to at least one discrete backside film deposition process on a semiconductor wafer; perform at least an additional characterization process following the at least one discrete backside film deposition process; determine at least one of a film force or one or more in-plane displacements for at least one discrete backside film deposited on the semiconductor wafer via the at least one discrete backside film deposition process based on the at least the first characterization process and the at least the additional characterization process; and provide at least one of the film force or the one or more in-plane displacements to at least one process tool via at least one of a feed forward loop or a feedback loop to improve performance of one or more fabrication processes.

Apparatus include a polarization state generator situated to provide an interferometer source beam with a region of polarized source light with a polarization state that is in-plane as subsequently incident on a sample and a region of polarized source light with a polarization state that is perpendicular to in-plane as subsequently incident on the sample, and an interferometer unit configured to split the interferometer source beam into test and reference arm beams, to direct the test arm beam to the sample and the reference arm beam to a reference surface, and to recombine the test and reference arm beams to produce an interferometer output beam. Methods use a polarization state generator to produce an interferometer source beam and use an interferometer unit which splits the interferometer source beam into test and reference arm beams.

A method that may include performing first measurements of the height differences between the bumps and the corresponding areas, by illuminating the bumps and the corresponding areas with first radiation; wherein the first measurements are subjected to first measurement errors resulting from a virtual penetration of the first illumination into the layer; wherein each bump has a corresponding area that is proximate to the bump; preforming second measurements of thickness of the layer at the corresponding areas; wherein at least some of the first measurements are executed in parallel to an executing of at least some of the second measurements; determining first measurement errors, based on the second measurements; and determining the height differences between the bumps and the corresponding areas based on the first measurements and the first measurements errors.

A measurement device, for measuring the shape of an interface to be measured of an optical element having a plurality of interfaces, the device including a measurement apparatus with at least one interferometric sensor illuminated by a low-coherence source, for directing a measurement beam towards the optical element to pass through the plurality of interfaces, and to detect an interference signal resulting from interferences between the measured measurement beam reflected by the interface and a reference beam, a positioning apparatus configured for relative positioning of a coherence area of the interferometric sensor at the level of the interface to be measured, and a digital processor for producing, based on the interference signal, an item of shape information of the interface to be measured according to a field of view.

According to aspects of the embodiments, there is provided a method of measuring the amount of fountain solution employed in a digital offset lithography printing system. Fountain solution thickness is measured by using phase shifted monochromic light to produce optical path differences through the fountain solution film. The intensity of the reflected light through the fountain solution film is very sensitive due to the phase shifted light so interference fringes are easier to delineate and fountain solution thickness measurement more reliable.

Systems and methods for predicting an immune response against a tumor in a patient having the tumor are provided. The relative mass or changes of mass of tumor cells or immune cell in the tumor can be ex vivo observed, and an immune status of the tumor can be determined based on the mass of tumor cells or immune cell. The immune status can provide a guidance to predict the immune response against the tumor in the patient.

Systems and methods for unwrapping a phase map are disclosed. Such systems and methods may include receiving a wrapped phase map associated with an interferometric measurement of a sample including patterned features; removing a tilt from the wrapped phase map; generating a background; detecting features in the wrapped phase, the features in the wrapped phase map corresponding to least some of the patterned features of the sample; replacing phases of the features with the background at corresponding locations in the wrapped phase map; unwrapping the modified wrapped phase map using a global phase-unwrapping; applying local phase-unwrapping to restore the phases of the features; and reapplying the tilt to generate an output unwrapped phase map.

The present invention relates to an apparatus and a method for measuring a thickness and a refractive index of a multilayer thin film using an angle-resolved spectral interference image according to polarization. More specifically, the present invention relates to an apparatus for measuring a thickness and a refractive index of a multilayer thin film using an angle-resolved spectral interference image according to polarization in an apparatus for measuring a thickness and a refractive index of a measurement object coated with the multilayer thin film, the apparatus including: an illumination optical module having a light source emitting light; a first beam splitter configured to reflect some of the light emitted from the illumination optical module; an objective lens configured to input some of the light reflected from the first beam splitter to the measurement object constituted by the multilayer thin film and reflect the remaining light to a reference plane to form interference light on a back focal plane; a second beam splitter in which interference light where the reflected light incident and reflected to the measurement object interferes with the reflected light reflected from the reference plane is incident, wherein some of the interference light is reflected and the remaining interference light is transmitted; a first angle-resolved spectral image acquiring unit configured to receive interference light reflected from the second beam splitter and first-polarize the interference light located in the back focal plane of the objective lens to acquire a first polarized interference image; and a second angle-resolved spectral image acquiring unit configured to receive interference light transmitted from the second beam splitter and second-polarize the interference light located in the back focal plane of the objective lens to acquire a second polarized interference image.

A detector for characterizing at least one of a middle ear fluid and a middle ear biofilm includes a handheld probe outputting near-infrared and visible light, an OCT system to obtain A-scans at a plurality of positions on a tympanic membrane, and a camera to obtain surface sub-images at the plurality of positions. A-scans and surface sub-images are synchronized and the surface sub-images are mosaicked to generate a surface image of the tympanic membrane. Cross-sectional scan images or a thickness map are generated from the synchronized A-scans and segmented to extract a plurality of specified features. The specified features are then classified to characterize at least one of the middle ear fluid and the middle ear biofilm. The detector, including handheld probe with camera, OCT system, and a laptop computer, is sized to fit into a handheld, portable, compact, foam-padded briefcase weighing less than 10 kg.

The magnetic tape includes a non-magnetic support; and a magnetic layer in which the magnetic layer has a timing-based servo pattern, an edge shape of the timing-based servo pattern, specified by magnetic force microscopy is a shape in which a difference between a value L.sub.99.9 of a cumulative distribution function of 99.9% and a value L.sub.0.1 of a cumulative distribution function of 0.1% in a position deviation width from an ideal shape of the magnetic tape in a longitudinal direction is 180 nm or less, and a difference between a spacing S.sub.after measured on a surface of the magnetic layer by an optical interferometry after methyl-ethyl-ketone cleaning and a spacing S.sub.before measured on the surface of the magnetic layer by an optical interferometry before methyl-ethyl-ketone cleaning is greater than 0 nm and 15.0 nm or less.